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研究生: 王睿祺
Wang, Ruei-Ci
論文名稱: 具高靈敏度、寬動態範圍及獨立位移監測功能之微波角度感測器雙路徑設計
A Dual-Path Design for High-Sensitivity Microwave Angular Sensors with Wide Dynamic Range and Independent Displacement Monitoring
指導教授: 楊慶隆
Yang, Chin-Lung
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 103
中文關鍵詞: 互補式開口諧振環型共振腔角度位移偵測水平位移偵測微波感測器雙路徑
外文關鍵詞: Complementary split-ring resonator (CSRR), angular detection, linear displacement detection, microwave sensor, dual-path
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  • 本論文旨在解決傳統微波感測器動態範圍受限(<180°)與多變數解耦高度依賴複雜演算法之瓶頸,提出創新之「雙路徑多功能微波感測系統」。
    本研究有效結合層疊式三環互補式開口諧振環形共振腔(Stacked TCSRR)與互補式閉合圓環共振腔(CCRR)。針對角度感測, 透過TCSRR第三環正交配置引入非對稱性,有效延後了頻率折返現象,將無模糊量測之單調區間拓展至 200°, 單一架構平均角度靈敏度達 19.88 𝑀𝐻𝑧/°,快速變動區更上升至 31.68 𝑀𝐻𝑧/°。
    在雙路徑系統中,平均角度靈敏度因空間分集之工程權衡調整為 5.63 𝑀𝐻𝑧/°,但主導模態 𝑓𝑧1,𝑇𝐶𝑆𝑅𝑅 仍穩定維持涵蓋 200° 之連續單調頻偏。更關鍵的是,本系統達成了免演算法之「硬體級互斥解耦」:純旋轉時,CCRR 處於物理休眠以確保角度量測純淨;當發生水平位移時,𝑓𝑧1,𝑇𝐶𝑆𝑅𝑅 因金屬屏蔽導致其共振邊界被破壞而使特徵大幅衰退,整體頻率響應改由 𝑓𝑧,𝐶𝐶𝑅𝑅 主導,精準追蹤 2 𝑚𝑚 至 6 𝑚𝑚 之水平位移,平均位移靈敏度高達 270𝑀𝐻𝑧/𝑚𝑚。
    總結而言,本研究將角度感測動態範圍擴展至 200°,並透過硬體級互斥機制實現角度與水平位移之獨立量測,無須額外解調演算法。此架構可為工業 4.0 機台狀態監控提供一種低成本之射頻感測方案。

    This thesis proposes an innovative "dual-path multi-function microwave sensor system" to address the bottlenecks of limited dynamic range (typically < 180°) and the high reliance on complex algorithms for multi-variable decoupling in traditional microwave sensors.
    This research effectively integrates a stacked triple complementary split-ring resonator (Stacked TCSRR) and a complementary circular ring resonator (CCRR). For angular sensing, structural asymmetry is introduced by orthogonally orienting the gaps of the TCSRR's third rings. This design effectively delays the frequency fold-back phenomenon, extending the monotonic range of unambiguous measurement to 200°. The single-architecture average angular sensitivity reaches 19.88 MHz/°, peaking at 31.68 MHz/° in the fast-varying region.
    In the dual-path system, the average angular sensitivity is adjusted to 5.63 MHz/° due to spatial-diversity engineering trade-offs, but the dominant mode 𝑓𝑧1,𝑇𝐶𝑆𝑅𝑅 still stably maintains a continuous monotonic frequency shift covering the 200° range. More crucially, the system achieves an algorithm-free "hardware-level mutually exclusive decoupling": during pure rotation, the CCRR remains physically inactive to ensure pure angular measurement; when horizontal translation occurs, the resonance boundary of 𝑓𝑧1,𝑇𝐶𝑆𝑅𝑅 is disrupted by metal shielding, causing its features to severely degrade. The overall frequency response is instead dominated by 𝑓𝑧,𝐶𝐶𝑅𝑅, accurately tracking horizontal displacements from 2 𝑚𝑚 to 6 𝑚𝑚 with an average displacement sensitivity up to 270 MHz/mm.
    In conclusion, this research extends the angular dynamic range to 200° and achieves independent, algorithm-free measurement of both rotational and horizontal displacements, providing a low-cost RF solution for Industry 4.0 condition monitoring.

    摘要 I Extended Abstract II 誌謝 X 目錄 XII 表目錄 XV 圖目錄 XVI 縮寫總表 XX 第一章 緒論 1 1.1 研究背景與動機 1 1.2 文獻回顧 3 1.2.1 微波角度位移感測器 3 1.2.2 多參數微波感測器與解耦技術 10 1.3 論文架構 12 1.4 研究貢獻 14 第二章 微波共振腔感測器 15 2.1 平面微波共振腔感測器之優點 15 2.2 激發共振腔之微帶線設計 16 2.3 開口式環形共振腔與互補式開口環形共振腔 18 2.3.1 開口式環形共振腔 (SRR) 19 2.3.2 互補式開口環形共振腔 (CSRR) 20 2.4 平面微波共振腔感測器之量測原理 21 2.4.1 頻率變化量測法 22 2.4.2 振幅變化量測法 22 2.4.3 相位變化量測法 23 2.4.4 本系統採用頻率解調之綜合考量 23 2.5 微波角度共振腔感測器之操作原理 24 2.5.1 交叉極化對角度感測之影響 24 2.5.2 層疊架構與平行版電容之動態微擾 26 2.5.3 金屬遮蔽效應對等效電感之微擾 27 第三章 微波角度位移感測器設計 28 3.1 具延伸動態範圍之高靈敏度微波角度位移感測器設計 29 3.1.1 靈敏度優化與層疊式架構設計 29 3.1.2 動態範圍擴展與正交缺口設計 32 3.1.3 結構參數最佳化與共振機制分析 34 3.2 多功能感測系統之挑戰與雙路徑架構演進 41 3.2.1 一體化結構之物理限制與雙路徑架構之提出 41 3.2.2 雙路徑架構下 NB-CSRR 之角度串擾分析 43 3.3 雙路徑感測器設計與解耦機制 45 3.3.1 互補式閉合圓環共振腔(CCRR)之拓樸演變與位移感測特性 45 3.3.2 雙路徑整合架構與有效操作區間之互斥解耦分析 48 3.3.3 雙路徑感測系統之全域操作範圍與量測策略 54 第四章 系統量測與實驗驗證 56 4.1 單一參數角度位移感測系統之量測與驗證 56 4.1.1 感測器實作與高精度 3D 列印載台設計 56 4.1.2 實驗流程與量測架設 58 4.1.3 量測結果與模擬數據比較 59 4.2 雙路徑多功能感測系統之雙態解耦驗證 62 4.2.1 雙路徑感測器實作與複合量測載台架設 62 4.2.2 純角度位移響應之實體驗證 64 4.2.3 純水平位移響應之實體驗證 66 第五章 結論與未來展望 72 5.1 結論 72 5.2 未來展望 73 參考文獻 77

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