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研究生: 張恩柔
Chang, En-Jou
論文名稱: 高靈敏度基板整合波導微波感測器於介電特性量測與手腕脈搏偵測之應用
High-Sensitivity SIW-Based Microwave Sensors for Dielectric Characterization and Wrist Pulse Detection
指導教授: 楊慶隆
Yang, Chin-Lung
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 102
中文關鍵詞: 基板整合波導微波感測器介電特性量測手腕脈搏偵測非侵入式生醫感測
外文關鍵詞: Substrate Integrated Waveguide (SIW), Microwave Resonant Sensor, Dielectric Characterization, Wrist Pulse Detection, Non-invasive Biomedical Sensing
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  • 本研究以微波共振式感測原理為基礎,提出一種基於基板整合波導之高靈敏度平面式微波感測架構,同時應用於靜態介電材料量測與動態手腕脈搏訊號偵測。在設計上,本研究以微帶線錐形漸變結構作為訊號饋入架構,並選定電場集中之 TM010 模態為主操作模態,據此提出三種感測器:Sensor A 依序整合互補式開口環形共振器、指叉電容與軸向電容延伸機制強化局部電場,並建立等效電路模型驗證電氣特性;Sensor B 利用 TM010 模態之磁牆特性演進為半模基板整合波導以縮減電路面積;Sensor C 引入耦合模態理論,以雙八角形 CSRR 之奇偶模態分裂並運用奇模高電場集中特性提升靈敏度。三種感測器均實作於印刷電路板並以標準介電基板驗證,另整合包絡檢波解調架構與 LabVIEW 平台建構非接觸式手腕脈搏量測系統。

    量測結果顯示,Sensor A 實測平均感測靈敏度達 5.85%;Sensor B 維持相近效能並成功縮減 28.6% 電路面積,實測平均感測靈敏度達 5.99%;Sensor C 靈敏度則為三者最高,實測平均靈敏度達 6.51%。在手腕脈搏偵測方面,選定 Sensor A 為主要元件,經機械震動校正後,人體手腕脈搏主頻與 BIOPAC 參考系統相比,平均心率估測誤差僅為 0.35%,展示本架構於介電量測與非接觸式生理監測之可行性。

    This study presents a high-sensitivity planar microwave sensing platform based on the substrate integrated waveguide (SIW), developed for both static dielectric characterization and dynamic wrist-pulse detection. Accurate dielectric characterization and non-invasive physiological monitoring are of growing importance in electronics manufacturing and wearable healthcare, yet conventional approaches to both are often constrained by bulky equipment, strict sample requirements, or susceptibility to motion and pressure artifacts. Three sensor architectures, Sensor A, Sensor B, and Sensor C, are proposed by progressively incorporating a complementary split-ring resonator (CSRR), an interdigital capacitor (IDC), an axial capacitive extension (ACE), a half-mode SIW (HMSIW) topology, and a coupled-mode dual-resonator scheme to enhance sensitivity and reduce circuit area. The TM010 mode of a circular SIW cavity was selected as the operating mode for its highly concentrated electric field, and an equivalent-circuit model was established to verify the electrical behavior of the proposed structures.

    In actual fabrication, all sensors were manufactured on printed circuit boards (PCB) and validated using standard dielectric substrates spanning a wide permittivity range. Sensor A achieved a measured average sensitivity of 5.85%, Sensor B reduced the circuit area by 28.6% while retaining comparable performance, and Sensor C attained the highest measured average sensitivity of 6.51%, outperforming several recently reported microwave dielectric sensors. Sensor A was further integrated with an envelope-detection demodulation system to measure wrist-pulse vibrations, achieving a heart-rate estimation error of only 0.35% compared with a BIOPAC reference system, demonstrating the feasibility of the proposed platform for future wearable biomedical sensing applications.

    摘要                 I Extended Abstract             II 誌謝                    X 目錄                    XII 表目錄                   XV 圖目錄                   XVI 縮寫總表                  XIX 第一章 緒論                 1   1.1 研究背景與動機            1   1.2 文獻回顧               4     1.2.1 基板整合波導          4     1.2.2 共振腔感測器設計        9   1.3 論文架構               10   1.4 研究貢獻               12 第二章 微波共振感測器           14   2.1 平面式共振感測器之特點        14   2.2 分裂環共振器與互補式分裂環共振器   14   2.3 非平面式共振感測器之特點       16   2.4 微波波導與共振腔           17     2.4.1 波導原理分析          18     2.4.2 模態簡併            20     2.4.3 微波共振腔           21   2.5 基板整合波導之工作原理與設計限制   21   2.6 指叉電容架構             23   2.7 耦合模態理論             25   2.8 感測器量測原理            27     2.8.1 頻率偏移量測法         27     2.8.2 振幅偏移量測法         28 第三章 微波感測器的設計與分析        30   3.1 基板整合波導共振腔激發結構之選擇與設計  31     3.1.1 激發架構之評估與選擇依據    31     3.1.2 微帶線漸變過渡結構之參數優化  33     3.1.3 共振腔工作模態挑選與場型驗證  34   3.2 Sensor A 之複合式感測器設計與分析   37     3.2.1 Sensor A 之感測器設計      37     3.2.2 等效電路模型分析        40     3.2.3 靈敏度分析           42   3.3 Sensor B 之結合半模基板整合波導感測器設計  44   3.4 Sensor C 之基於耦合模態理論感測器設計分析  48     3.4.1 等效電路模型分析        54 第四章 實驗設置與量測結果          56   4.1 靜態高靈敏度感測器驗證        56     4.1.1 實驗設置             56     4.1.2 Sensor A 之感測結果       57     4.1.3 Sensor B 之感測結果       60     4.1.4 Sensor C 之感測結果       62     4.1.5 本研究與相關文獻之感測性能比較與討論  65   4.2 動態脈搏系統量測           66     4.2.1 實驗系統架設          66     4.2.2 系統校正            67     4.2.3 手腕脈搏震動量測        69 第五章 結論與未來展望            74   5.1 結論                 74   5.2 未來展望               75 參考文獻                    77

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