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Author: 林竣嘉
Lin, Chun-Chia
Thesis Title: 以霧化化學氣相沉積法於藍寶石及鐵摻雜β氧化鎵基板上製備錫δ摻雜氧化鎵金氧半場效電晶體之研究
Investigation of Sn δ-Doped Ga2O3 MOSFETs on Sapphire and Fe-Doped β-Ga2O3 Substrates Utilizing Mist Chemical Vapor Deposition
Advisor: 許渭州
Hsu, Wei-Chou
Degree: 碩士
Master
Department: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
Thesis Publication Year: 2026
Graduation Academic Year: 114
Language: 英文
Pages: 87
Reference times: Clicks: 9Downloads: 0
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    Public:2031-07-17
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