本論文提出一新型之振動感測器，利用雙環互補式開口環型共振器(Double-ring complementary split-ring resonator, DCSRR)的微波平面共振器結構，並結合單擺的機械結構應用於微小振動之檢測，最終欲應用於地震之偵測與預警系統。鑒於地震偵測對於即時量測系統之要求，本感測器量測原理採用振幅調變量測法，並使用包絡檢波器(Envelope detector, ED)進行解調變過程，避免掃頻訊號的使用，使取樣率較傳統頻率偏移量測法高，以達到即時量測之效果。
本論文之微波平面共振器經由圖形與軸向的設計，基於模擬軟體之驗證結果可見其具有量測軸向獨立的特性，並先後以實驗證實對於單軸、水平二軸之振動訊號，此感測器可以正確偵測出其振動頻率，且擺錘在各分量下的振動振幅估測可達到絕對誤差0.35 mm以下，而對於振動源方向的推測平均誤差為11.9°以下，初步展現了此感測器在二軸量測的可行性。論文中同時討論了感測器部分結構之材料選用會影響輸出訊號的特性，並且在文中提出利用互相關(Cross-correlation)運算可以有效抑制部分干擾訊號，以提升目標訊號在頻譜上的清晰度。感測器之量測極限經由實驗測試可偵測振動頻率範圍為 0.1 – 55.0 Hz，此範圍已涵蓋大部分之地震震動頻率(30.0 Hz以下)，偵測到最小振動振幅為0.004 mm (55.0 Hz振動時)，而可偵測最小加速度經由換算為4.78 μg (或0.0047 cm/s2)。此研究結果初步證實將微波感測技術應用於振動偵測的可行性與潛力，經由後續開發與優化，將有機會應用於實際地震偵測與預警的系統中。

This thesis proposes a novel vibration sensor using microwave planar resonators of double-ring complementary split-ring resonators (DCSRRs) based on pendulum structure for tiny vibration detection. The research ultimately aims for the earthquake detection and early warning system. Hence, a high sampling rate is required for real-time detection. In this work, a real-time measuring system is achieved by using the amplitude modulation to avoid the use of sweeping frequencies.
In this work, the pattern and direction design of the microwave planar resonator are simulated and possess the property of axial independence. Experiments of horizontally one- and two-dimensional vibrations are conducted respectively. The results show that the vibration frequency can be extracted accurately, and absolute error approximated within the displacement of the pendulum bob on different axial components is less than 0.35 mm. Then, the average error of the vibration direction estimation is 11.9°. The performance due to different pendulum string materials is also discussed. String materials prone to absorb vibration energy are going to exhibit poorer sensitivities. The unwanted interference is generated by the materials of some structures, so the cross-correlation method is applied to suppress the interference and is verified in this thesis. The measurable vibration frequency range of the proposed sensor is tested to be 0.1 – 55.0 Hz, covering frequencies of most earthquakes (less than 30.0 Hz). The minimum detectable vibration displacement is 0.004 mm at 55.0-Hz vibration frequency, and the minimum detectable acceleration is calculated to be 4.78 μg (or 0.0047 cm/s2). The results preliminarily show feasibility and potential for introducing microwave sensing technologies into vibration detection. With succeeding development and optimization, the proposed method is possible to be used in real earthquake detection and the early warning system.

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