| 研究生: |
呂俊賢 Lu, Chun-Hsien |
|---|---|
| 論文名稱: |
低溫燒結Pb(Mn1/3Nb2/3)O3-PbZrO3-PbTiO3壓電陶瓷之製作及其在表面聲波濾波器的應用 Fabrications of Low-Temperature-Sintered Pb(Mn1/3Nb2/3)O3-PbZrO3-PbTiO3 Piezoelectric Ceramics and Their Applications on the Surface Acoustic Wave (SAW) Filters |
| 指導教授: |
朱聖緣
Chu, Sheng-Yuan |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 電機工程學系 Department of Electrical Engineering |
| 論文出版年: | 2007 |
| 畢業學年度: | 95 |
| 語文別: | 中文 |
| 論文頁數: | 116 |
| 中文關鍵詞: | 表面聲波元件 、壓電陶瓷 |
| 外文關鍵詞: | PMnN-PZT, SAW, piezoelectric ceramics |
| 相關次數: | 點閱:68 下載:0 |
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鋯鈦酸鉛(PZT)為最常使用的壓電材料,但在製作過程中,高溫燒結對於製造成本部分會大幅的增加,主要是因為電極的部份,因在高溫燒結為了防止電極氧化一般都用Pd、Pt這類貴重金屬。此外高溫燒結會使得PbO揮發而造成環境污染。但若使用低溫燒結不僅僅可以解決環境汙染的問題以及能源耗損的情況,而電極亦可以使用較廉價的銀。
本實驗中探討添加氧化銅(CuO)以及氧化鋅(ZnO)對Pb(Mn1/3Nb2/3)O3-PbZrO3-PbTiO3的影響,實驗結果在CuO添加量為0.1wt%時有較佳機電耦合因數,量得厚度機械耦合因數(kt)和徑向機電耦合因數(kp)分別為48%和53%,經由電滯曲線的量測其Ec和Pr值分別為11kV/cm與26μC/cm2。添加CuO之樣品再繼續添加ZnO量為1wt%時有較佳機電耦合因數,量得厚度機械耦合因數(kt)和徑向機電耦合因數(kp)分別為47.6%和54.7%,經由電滯曲線的量測其Ec和Pr值分別為11.3kV/cm與29.3μC/cm2。本實驗中亦成功以Pb(Mn1/3Nb2/3)O3-PbZrO3-PbTiO3添加0.1wt%CuO陶瓷基板製作出表面聲波濾波器,並量得波速為2196m/s、插入損為-19.65dB、頻率溫度係數(TCF)為-40.15ppm/°C、機電耦合因數(K2)為7.13%。
PZT is the most common piezoelectric material but it has too high sintering temperature which will use expensive internal electrode with high melting point such as palladium(Pd) or platinum(Pt). Beisdes, high sintering temperature induces evaporation of PbO during sintering process. Volatized PbO generates environmental pollution. Low temperature sintering method can inhibit evaporation of PbO. Silver (Ag) is an economical material capable of being effectively used as internal electrode of multilayer ceramic devices. Thus, the development of low temperature sintering piezoelectric ceramics is necessary.
In this report, we investigated the doping effect by introducing CuO and ZnO dopants into Pb(Mn1/3Nb2/3)O3-PbZrO3-PbTiO3 ceramics. The results show that 0.1wt% CuO doped samples provide electromechanical planar and thickness coupling coefficients of kp = 53% and kt = 48%. According to the P-E measurements, the coercive field and remanent polarization are 11kV/cm and 26μC/cm2. 1 wt% ZnO doped samples provide electromechanical planar and thickness coupling coefficients of kp = 54.7% and kt = 47.6%. According to the P-E measurements, the coercive field and remanent polarization are 11.3kV/cm and 29.3μC/cm2, respectively. In this report, we successfully fabricated the surface acoustic wave filters on the Pb(Mn1/3Nb2/3)O3-PbZrO3-PbTiO3 doped 0.1wt%CuO substrates. The phase velocity is 2196m/s, insertion loss is -19.65dB, TCF is -40.15ppm/°C and K2 is 7.13%.
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