隨著第五代行動通訊（5G）與未來第六代通訊技術（6G）的快速發展，無線系統對於高頻、大頻寬及小型化的射頻濾波器元件提出更高要求。薄膜體聲波共振器（Film Bulk Acoustic Resonator, FBAR）因具有高品質因數、低插入損耗與優異的製程整合性，成為目前應用於高頻通訊模組中的重要濾波解決方案。然而，傳統FBAR模擬方法大多基於Mason等效電路模型，並僅考慮縱向模態（longitudinal mode）之響應，忽略剪切模態（shear mode）在高頻或多層結構下所產生的影響，容易導致模擬準確性不足。
本研究針對此一限制，提出一套整合縱向與剪切模態的改良型Mason模型，並以MATLAB實作模擬流程。所建構之模擬架構可處理多層結構、多材料與多模態的物理參數設定，並透過Christoffel方程式計算材料中聲波的傳播速度與極化方向，再依據各層物理性質與模態類型建立對應的聲學阻抗與電聲耦合元件，最後以等效電路方式組裝結構並進行頻率響應模擬。程式亦提供模式選擇與結果視覺化功能，便於辨識不同模態之阻抗特性。
在模擬驗證方面，本研究選用單層（AlN）、三層（Al/AlN/Al）與四層（Al/ZnO/Al/SiO₂）等不同結構進行分析，並與文獻中之模擬數據與結果進行比較。結果顯示，改良模型在縱向模態的諧振頻率與阻抗變化趨勢上，與既有文獻具高度一致性，證實其模擬準確性與實用性。此外，模型亦能呈現剪切模態於特定結構下的響應行為，顯示其對於模態辨識與結構特性分析具有良好輔助效果。
本模擬系統具備高度模組化與可擴充性，適用於高頻通訊元件之設計、參數掃描與性能分析，並可作為多模態聲波元件模擬與結構優化之有效分析工具。

Film Bulk Acoustic Resonators (FBARs) are essential components in modern RF modules due to their high Q factor and compact size. Traditional Mason models primarily focus on longitudinal modes and often overlook shear modes, which are increasingly relevant in multilayer structures. This thesis proposes an enhanced Mason model implemented in MATLAB to analyze hybrid longitudinal and shear modes in FBAR devices. The model incorporates acoustic impedance calculations, Christoffel-based wave velocity analysis, and multilayer circuit assembly to simulate input impedance behavior. Through case studies of single-layer, three-layer, and four-layer FBAR structures, the simulation results demonstrate consistency with previously published data, particularly in longitudinal mode analysis. The proposed framework serves as a versatile simulation tool that facilitates the interpretation of complex modal behaviors and assists in the preliminary evaluation of device configurations.

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