本論文研製一應用於電漿之低電壓漣波之高壓電源轉換器，其架構為傳統對稱型倍壓電路與並聯諧振電路之結合。透過並聯諧振電路產生之高頻交流訊號與倍壓電路本身之輸出電壓漣波訊號相互抵消以達到高電壓低漣波輸出之效果，藉此以改善傳統型倍壓電路之輸出電壓因倍壓電容充放電所導致之輸出電壓漣波較大之問題。文中亦對各類傳統型倍壓電路與諧振電路進行介紹。提出轉換器架構相較於傳統抑制輸出電壓漣波之交錯並聯式電路與三相並聯式電路簡單且需要較少元件，文中對轉換器之動作模式及輸出電壓漣波作分析且敘述各重要元件參數設計與選用。最後，研製一輸入電壓400Vdc、輸出電壓20kVdc、輸出電壓漣波0.95%以及輸出功率400W之雛型電路，並由實驗結果驗證本文所提方法之可行性。

The thesis proposes a low ripple high voltage converter applied in plasma field. The structure of the circuit combines conventional symmetry high voltage circuit and a parallel resonant circuit. Acircuit for high output voltage with low ripple can be achieved by canceling the high frequency from the charging and discharging of capacitors alternating signals from the parallel resonant circuit. The problem of higher output voltage ripple created in conventional high step up circuits can be improved. Many types of conventional voltage multiplier circuits and resonant circuits are also presented. Comparing to conventional interleaved circuits for deceasing output voltage ripple and three-phase parallel-type circuits, the structure of the proposed converter needs less components. Operating modes and output voltage ripple analysis were developed. For the implement the circuit, the parameters of the components are provided in the thesis. Finally, a prototype converter with 400 Vdc input voltage, 20 kVdc output voltage, 0.95% output voltage ripple and 400 W output power is implemented in the laboratory to verify the feasibility of the proposed method.

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