本論文之受控體為由兩顆交流伺服馬達所帶動之XY運動平台，存在許多機械傳動問題，如：摩擦力、背隙、結構共振等，並受到其他外擾影響，如：系統非線性、各軸動態不匹配、伺服落後及未知干擾等。如何消除上述問題，以降低追蹤誤差及輪廓誤差，為高精密加工之關鍵。因此本論文提出具有高精度性能之動態快速非奇異終端滑模控制，並提出修改型適應性LuGre摩擦力補償架構以抑制摩擦力之影響，且對未知干擾、模型及參數之集總不確定性提出基於NURBS之強健遞迴模糊類神經網路干擾補償架構。此外，為了達到高精度之訴求，本論文進一步提出基於NURBS 之 RFCMAC速度估測器。本論文除了使用Matlab來模擬驗證控制系統總架構之可行性，亦在XY運動平台上進行循跡控制實驗，最終達到高精度循跡控制之訴求，使各軸RMS追蹤誤差小於〖10〗^(-7)m，而輪廓誤差RMS值小於1.124μm。

The controlled plant of this thesis is an XY motion platform actuated by two AC servomotors. Such a platform will encounter many mechanical transmission problems such as friction, backlash, and structural resonance, as well as other external disturbances such as system nonlinearity, servo lags, and unknown disturbances. Hence, eliminating the above problems to reduce tracking error and contour error is crucial in achieving high-precision machining. Therefore, this thesis proposes a dynamic fast nonsingular terminal sliding mode control (DFNTSMC) with high precision performance. In addition, to suppress the adverse effects caused by friction, an adaptive LuGre friction force compensation model is also propsed in this thesis. Moreover, a NURBS-based robust recurrent neural-fuzzy disturbance compensation is proposed to cope with the unknown disturbances and modeling uncertainties. In addition, to achieve the goal of high tracking precision, a NURBS-based RFCMAC velocity estimator is proposed to obtain accurate velocity estimation. This thesis uses Matlab software to verify the feasibility of the algorithms of the overall control system and implements the algorithms on the XY motion platform. This thesis achieves the aim of high precision tracking control, in that the RMS tracking error is smaller than 〖10〗^(-7)m, and the RMS contour error is within 1.124 μm.

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