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研究生： 曾意達
Tseng, I-Ta
論文名稱： 以微機電壓阻式感測器設計之新生兒呼吸偵測儀
Design of an Infant Respiration Detection Instrument by Use of a MEMS Piezo-Resistive Sensor
指導教授： 魏嘉玲
Wei, Chia-Ling
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年： 2008
畢業學年度： 96
語文別： 中文
論文頁數： 77
中文關鍵詞： 微機電感測器 、呼吸偵測
外文關鍵詞： MEMS sensor, respiration detection
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    • 嬰兒猝死症(SIDS)是新生嬰兒最常見的死亡原因，根據統計大約每千名活產嬰兒中有2到3名會死亡，其中呼吸暫停是造成嬰兒死亡的很大因素。本論文目的在設計出一套偵測嬰兒呼吸的監護儀，嬰兒在呼吸暫停時可以發出警報提醒照護人員。目前常見的嬰兒監護儀以偵測嬰兒的運動為主，在嬰兒停止活動時發出警報。本論文採用直接偵測呼吸，在應用上更加廣泛。

    本論文使用微機電(MEMS)壓阻式感測器當作呼吸量測的感測器，壓阻式感測器一般用在壓力量測，經實驗顯示本論文所用的感測器用在低風速量測有不錯的線性度。電路部份使用現有市售IC組成，以少量的IC達到所要的功能，未來可以將電路積體化，減少外部接線以提高效能。

    Sudden infant death syndrome (SIDS) is the most common death reason of infants statistically, about 2 to 3 of every thousand newborns die, and apnea is a main reason for infant death. This thesis is to design an infant-respiration detector, when the instrument stop breathing, the designed instrument will alarm. Most commercially available respiration detectors are to sense the infant movements, and the sensor may be in contact with the body. In this coork, piezo-resistive sensor is adopted and the detector is contacts.

    A micro electro mechanical systems(MEMS) piezo-resistive sensor is used. In fact, piezo-resistive sensor is generally used to sense pressure, but it also can be used to detect air flow. From our experimental data, the sensor has a very linear relation ship with flow rate. The signal pressing circuit is made by a few commercially available ICs, In the future, the whole circuit can be integrated into a single chip to reduce cost and size.

    第一章 簡介………………………………………………………………….1 1.1 研究動機………………………………………………………………………….1 1.2 論文架構.................................................................................................................3 第二章 呼吸量測儀基本原理.........................................................................4 2.1呼吸量測儀基本需求..............................................................................................4 2.2呼吸量測儀原理......................................................................................................4 2.2.1 肺活量計......................................................................................................4 2.2.2 呼吸容積量測器..........................................................................................5 2.2.3 胸阻抗法......................................................................................................6 2.2.4 壓力式流速儀..............................................................................................6 2.2.5 轉輪式流速儀..............................................................................................7 2.2.6 熱傳導式流速儀...........................................................................................8 2.2.7 超音波流測法............................................................................................9 第三章 微機電壓力感測器...........................................................................11 3.1微機電系統............................................................................................................11 3.2微機電系統製程簡介............................................................................12 3.2.1 微影...........................................................................................13 3.2.2 沉積...........................................................................................14 3.2.3 蝕刻...........................................................................................14 3.3壓力感測器...........................................................................................15 3.3.1壓阻式........................................................................................15 3.3.2電容式........................................................................................17 3.3.3壓電式........................................................................................19 3.3.4 本論文所使用感測器.................................................................20 第四章 感測電路...........................................................................................24 4.1 感測電路原理.......................................................................................................24 4.1.1 電橋電路....................................................................................................25 4.1.2 儀表放大器................................................................................................26 4.1.3 低通濾波器................................................................................................28 4.2 感測電路實作設計...............................................................................................29 4.3 感測電路量測.......................................................................................................32 4.3.1 電阻變化....................................................................................................33 4.3.2 流速感測....................................................................................................36 4.3.3 不同距離量測............................................................................................39 第五章 後端電路...........................................................................................41 5.1後端電路架構與基本電路....................................................................................41 5.1.1比較電路.....................................................................................................41 5.1.2 計時器........................................................................................................46 5.2判斷N秒無呼吸信號電路...................................................................................47 5.2.1計數器.........................................................................................................50 5.2.2 判斷是否為N.............................................................................................51 5.2.3 警報電路....................................................................................................53 5.3 計數每分鐘呼吸次數...........................................................................................54 5.3.1計數器設計.................................................................................................56 5.3.2 暫存器........................................................................................................60 5.3.3 控制電路....................................................................................................61 5.3.4 解碼與顯示................................................................................................62 5.4 後端電路實做.......................................................................................................63 第六章 結論與未來展望.......................................69 參考文獻....................................................70 附錄........................................................71

    [1] http://120.39.net/0710/9/134270.html 39健康網
    [2] The Lancet柳葉刀雜誌 2005年3月5日
    [3] John G. Webster,” Measurements of the Respiratory System”, Medical Instrumentation, Application and Design, ch.9,1998
    [4] http://designer.mech.yzu.edu.tw/article/articles/course/(2000-05-05)%20%ACy%B
    6q%B7P%B4%FA%A4%B8%A5%F3%C2%B2%A4%B6.htm
    流量感測元件(flow sensors)簡介
    [5] http://bionems.bme.ntu.edu.tw/MMS/projects/flow/HotWire.htm
    熱絲式流量計感測原理
    [6] http://www.tbt2u.com/pro/b/z/z004.pdf 超音波流量計測流
    [7] P.U.Chen,J.J. Mian, G.B.Lee”A Study of Applying MEMS Pressure Sensors in Wind Tunnel Expriment”2001
    [8] Stephen W.Director ”Design with Operational Amplifiers and Analog Integrated Circuits”,Circuits with Resistive Feedback,ch.2
    [9] Sedra&Smith “Microelectronic Circuits”,ch13,p1185-1189,2004
    [10] Charles H.Roth,Jr ”Fundamentals of Logic Design”, Sequential Network Design,ch16,2002

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