本文使用奈米壓印製程製作表面聲波元件，量測其頻率響應；並且以模態耦合理論分析換能器的波傳激振效應。
模態耦合理論的方便性與其廣泛的適用性相當適合用來分析反射柵或是指叉狀電極換能器；因此本文採用此理論模型，並將其表示成三埠矩陣的型式，分析壓電材料表面之均勻結構換能器的表面波傳及共振行為。分析時假設壓電材料表面為準靜態半無限域。
元件實作及實驗量測方面，使用接觸式金屬轉印製程在Y128X-cut鈮酸鋰商用基板上製作最小電極寬度為0.5μm的單埠表面聲波諧振器，並以網路分析儀及高頻探針量測其頻率響應。量測得到的最高共振頻率約在1.95GHz。
比較量測訊號與理論分析的結果，討論材料性質與設計參數對元件頻率響應的影響，作為往後設計元件的參考依據。

This thesis investigates surface acoustic wave (SAW) devices fabricated by nanoimprinting process, and simulates its wave excitation effect by coupling of mode analysis.
Coupling of mode (COM) analysis for analyzing reflective gratings and transducers has become very widespread because of its relative simplicity and wide applicability. Therefore, the simulation of uniform structure transducer on the surface of piezoelectric material in this thesis is based on COM analysis, which is expressed as a three-port matrix. It is assumed that surface of piezoelectric material is quasi-static half space.
On the part of device fabrication and experimental measurement, fabricated one-port SAW resonator on the Y128X-cut Lithium niobate substrate with contact-transfer and mask-embedded lithography (CMEL). The minimum electrode width of devices is 0.5μm. Frequency response of device is measured by network analyzer and microwave probe. The highest resonant frequency is about 1.95GHz.
Compare the results of experimental measurement and theoretical analysis, discuss how material properties and design parameters affected frequency response of device. The parameters of device design is base on the conclusion of analysis.

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