細胞進行低頻率範圍之電性阻抗量測時，因電流只會沿著細胞膜外圍流動，加上電雙層與定位之影響，故無法有效與正確得知細胞器內是否發生異常、甚至是細胞核的病變。為了改善低頻量測的缺點，本論文結合了介電泳單一細胞捕捉電極之定位與利用共平面波導技術之量測微電極。在一兆赫到一千兆赫的射頻範圍之間對單一子宮頸癌細胞阻抗進行量測及網路分析。本論文設計雙面電路板與玻璃兩種不同基底之結構來完成單一細胞量測微電極之製作。其中雙面印刷電路板做成外框之固定座，並能夠與網路分析儀之小型射頻同軸連接器接頭進行連接；玻璃基板則利用微機電製程技術製作雙埠之量測微電極，並於量測微電極旁設計介電泳單細胞捕捉之定位電極。之後進行空氣、去離子水、各種濃度之磷酸鹽緩衝溶液及單細胞阻抗測量與驗證。最後，進行分析磷酸鹽緩衝溶液及單細胞的測量，並由測量曲線之結果建立其等效電路模型，其將可以應用於單細胞特性之評估。

While cell impedance measurement is operated at low frequency, the current passes through outside the cell membrane. In addition, the capacitance effect of double layer and the position of the cell give rise to change the impedance. We can not know that the pathological change inside the cell or the cell nucleus effectively and correctly. In order to overcome these shortcomings of low frequency measurement, this thesis combines a dielectrophoretic trapping technique to position single cells and a coplanar waveguide electrode inside a channel to measure the impedance of a single HeLa cell (human cervical epithelioid carcinoma) in the frequency range of 1 MHz to 1 GHz. In the thesis, two materials (double-sided PCB and glass) are used to achieve the fabrication of the measuring microelectrodes. The double-sided PCB is fabricated as a frame to fasten the glass plate and as the connection interface of a vector network analyzer (VNA) using a SubMiniature-A (SMA) adapter. The microelectrode patterns on the glass substrate are formed using microelectromechanical systems (MEMS) technology. The microelectrodes which are used to position a single cell using dielectrophoretic trapping technique are designed near the measuring microelectrodes. The impedance of the air, de-ionized (DI) water, phosphate buffer saline (PBS) with various concentrations, and a single HeLa cell are measured and verified. Finally, the measured impedance of PBS and a single cell are analyzed. The equivalent circuit models of PBS and a single cell are established by measured curves, and it can be used to estimate properties of the cell.

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