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研究生: 高學譽
Kao, Hsueh-Yu
論文名稱: 無鉛壓電式微機電加速規之CMOS感測晶片設計
Design of Sensing Circuit for Lead-Free Piezoelectric MEMS Accelerometers
指導教授: 魏嘉玲
Wei, Chia-Ling
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2019
畢業學年度: 107
語文別: 中文
論文頁數: 77
中文關鍵詞: 感測晶片微機電加速規
外文關鍵詞: Sensing chip, MEMS, Accelerometer
相關次數: 點閱:77下載:2
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  • 近年來,全球興起「工業4.0」之後,工具機產業資訊化成為近幾年來提升產業水平的重要指標,而加速規感測器在機台故障監測診斷中扮演重要的角色,如果能透過無線傳輸傳遞感測器的訊號,更能進一步的應用於物聯網上。本篇論文為一個壓電式微機電加速規無線傳輸系統開發計畫的一個分項,目的為設計一個可以讀取加速規原始訊號的感測晶片,同時具有放大以及濾波的功能,使得整個加速規系統能夠有好的效能,且更貼進智慧機械的應用情境。
    本晶片使用台灣積體電路公司(TSMC)提供之0.18μm 1P6M Mixed-signal Standard CMOS 製程,晶片總面積為1.408×1.733mm^2,並採用DIP 28 S/B進行封裝,晶片內部主要包含四個部分,分別是讀取電路、兩個不同型式的濾波電路以及放大電路,其中本篇論文提出的讀取電路可以改變來自加速規訊號的直流準位,使加速規較不容易因為製程偏移所造成的直流偏壓電壓而損壞,此晶片與加速規整合後,可以使整個加速規系統量測頻寬達導1–3kHz,量測G值為±10g,且靈敏度達到100mV/g以上。

    Accelerometer sensors play an important role in machine malfunction monitoring. In addition, if the sensed signal of accelerometers could be transmitted wirelessly, it could be further applied to internet of things (IoT) applications. This thesis propose an accelerometer-sensing chip, which is a part of a wireless lead-free piezoelectric MEMS accelerometers system. The proposed sensing chip could sense and amplify the original signal from accelerometers, and then filter out noise, including 60-Hz noise. As a result, the whole accelerometers system could have better performance and fit for the need of intelligence machine.
    The proposed chip is fabricated by TSMC 0.18μm 1P6M mixed-signal standard CMOS process, and the chip area is 2.44 mm2. This chip consists of four parts: a front-end sensing circuit, two types of filter circuits, and amplifying circuits. Among them, the front-end sensing circuit can change the bias of the signal from accelerometers, which prevents the accelerometers from being damaged by the offset voltages caused by process variations. According to measurement results, the accelerometers system can achieve 100mV/g sensitivity and 1–3 kHz bandwidth.

    第1章 簡介 1 1.1 動機 1 1.2 論文架構 2 第2章 加速規運作原理與讀取方式探討 3 2.1 .壓電式加速規運作原理 3 2.1.1 壓電效應 3 2.2 壓電材料的選擇與製作 5 2.2.1 微機電製程簡介 5 2.2.2 壓電材料選擇 6 2.3 加速規的結構 7 2.3.1 懸臂樑結構 7 2.3.2 圓盤型結構 7 2.4 加速規讀取方式簡介 9 2.4.1 壓電式加速規等效模型 9 2.4.2 壓電式加速規讀取方式 10 第3章 系統架構與電路設計 14 3.1 系統架構簡介 14 3.2 偏壓轉換電路 15 3.2.1 偽電阻架構 17 3.3 切換式電容低通濾波器 19 3.4 切換式電容帶阻濾波器 27 3.4.1 超大時間常數切換式電容積分器 33 3.5 放大級 35 3.6 時脈產生器 38 第4章 模擬結果 40 4.1 偏壓轉換電路 40 4.2 切換式電容低通濾波器 42 4.3 切換式電容帶阻濾波器 47 4.4 放大級 49 4.5 時脈產生器 51 4.6 全電路模擬 53 4.7 打線圖 55 第5章 量測結果 57 5.1 晶片量測結果 57 5.1.1 量測環境與設置 57 5.1.2 偏壓轉換電路 60 5.1.3 切換式電容低通濾波器 61 5.1.4 切換式電容帶阻濾波器 65 5.1.5 時脈產生器 67 5.1.6 量測結果整理 67 5.2 含加速規量測結果 68 5.2.1 量測環境與設置 68 5.2.2 加速規系統量測結果 70 第6章 結論與未來展望 74 參考文獻 75

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