在本論文主要研究利用有機金屬氣相沉積法成長III-V 族太陽能電池，所使用的結構有p-n 與p-i-n 接面，並探討砷化鎵本質層的成長溫度對效率的影響，我們發現溫度大約在675度時，有最佳的轉換效率.並且研究成長在砷化鎵太陽能池上的capping層與window層對吸收太陽光與效率的影響。接著我們在製作太陽能電池過程中，我們使用不同圖形的正電極，討論電極的金屬面積與光轉換效率的關係，以及改變不同指狀電極相隔的間距，探討其與效率的關係。我們發現間距的影響不大，主要為遮光面機會降低大部分的效率，本篇研究最佳的金屬面積為12.7%。接著在製程中，我們使用兩種材料當抗反射層，材料分別為SiO2與Ta2O5。研究結果，抗反射層確實增加了光電流，卻降低了開路電壓，使得效率下降。而且所鍍的材料皆為不可逆的製程，在商業上製程失敗會使得成本提高。
故本研究利用材料為polystyrene的奈米球其週期性排列，應用在砷化鎵的抗反射層上，奈米球的週期性排列形成粗糙表面的抗反射層，它的優點包含降低抗反射並且增加光路徑、製程快速與成本低廉。我們利用旋轉塗佈機使得奈米球週期性排列，探討奈米球溶液、塗佈的轉速與時間造成奈米球鋪排的結果，最後我們得到單層大面積的奈米球鋪排，量其反射率發現它有光子晶體現象，光子晶體使得反射率上升。我們將單層不同大小的奈米球應用在砷化鎵太陽能電池上，探討奈米球尺寸對轉換效率的影響，利用尺寸500nm的奈米球可以相對增加18%的轉換效率。最後利用spin-on glass(SOG)的技術，解決奈米球之間有空隙的問題。結果可以相對增加27%的轉換效率。

In this thesis, we have successfully fabricated and investigated GaAs-based solar cells using p-n and p-i-n structure. We further optimize growth temperature of i-GaAs absorption layer. The window layer and capping layer of GaAs solar cell structure are discussed. And we used different front contact pattern to discuss the effect of shadow area on conversion efficiency. Then we used two materials to deposit anti-reflection coating, the material included SiO2 and Ta2O5. We varied the thickness of anti-reflection coating to find the best result.
In this study, we also used a period nano-sphere to be an anti-reflection coating. The nano-sphere coating layer is coated by spin coat and the material of nano-sphere is polystyrene. We discussed the parameters of spin including the consistency, spin speed and spin time to get mono-layer nano-sphere on GaAs substrate. And we investigated the optical characteristic of nano-sphere on GaAs surface. Finally, we applied the nano-sphere to be anti-reflection coating on GaAs solar cell. The effect and result for GaAs solar cell with nano-sphere coating are discussed. Then we used SOG to spin on nano-sphere. The SOG is a spin-on glass technique to coating a thin layer. It improved the problem of space between the spheres. And we succeed to apply the polystyrene with SOG for GaAs solar cell. The relative conversion efficiency can improved to about 27%.

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