題目：導線架受不同吸力面積熱板之三維有限元素分析
學生：王怡盛
指導教授：吳毓庭
半導體為現代生活中不可或缺的一部分。本研究使用有限元素分析軟體ANSYS模擬leadframe在熱板上被真空吸住時的影響，材料的選用為在QFN封裝常使用的C7025銅合金，並設計熱板具有不同形狀真空孔或微流道吸力面積時對leadframe的變形影響，首先針對會使leadframe在抽真空時產生變型的X型微流道熱板吸力面積進行模擬，接下來便以X型微流道吸力面積作為基準評斷新設計的微流道或真空孔是否有為比較優良的設計，以熱板具有直徑1mm單孔真空孔開始，以每0.2mm開始增加至2mm，共六種直徑變化，下一步考慮熱板具有相同直徑但不同數量的真空孔對leadframe造成的變形，分別有4孔、5孔、6孔與9孔這4種變化，最後以熱板具有棋盤形微流道，以不同微流道寬度做為區別，從寬度0.2mm開始，以每0.1mm開始增加至0.8mm，共7種微流道寬度變化。從模擬結果來說單真空孔是比較差的設計，不僅吸力面積不大，無因次變形量也比X型微流道還要大，多孔真空孔雖然可以改善單孔真空孔吸力面積太小，無因次變形量太大的問題，但是需要考慮加工費用的問題，而棋盤形微流道吸力面積的熱板對leadframe造成的無因次變形量是本論文所討論案例中相對小的，而微流道寬度0.3mm與0.4mm的結果更是所有棋盤形微流道裡最好的，因為能夠保有吸力面積與X型微流道差不多時，有效降低leadframe的無因次變形量。

Subject: Three-Dimensional Finite Element Analysis of Leadframe Subjected to Heater Block with Different Suction Areas
Student: Yi-Sheng Wang
Advisor: Yu-Ting Wu
Semiconductors are an essential part of modern life. This study utilized the finite element analysis software ANSYS to simulate the effect of vacuum suction on a leadframe placed on a heater block. The chosen material for the leadframe was C7025 copper alloy, commonly used in Quad Flat No-Lead (QFN) packaging. The objective was to investigate the deformation of the leadframe caused by different shapes of vacuum holes or microchannels on the heater block.
Initially, the simulation focused on the X-shaped microchannel heater block, known to induce deformation in the leadframe during vacuum suction. This X-shaped microchannel suction area served as a benchmark for evaluating the performance of newly designed microchannels or vacuum holes.
By using the X-shaped microchannel suction area as a reference, the study aimed to assess whether the newly designed microchannels or vacuum holes exhibited superior performance in terms of leadframe deformation.
The study began by considering a heater block with a single vacuum hole of 1mm in diameter. The diameter was then increased by 0.2mm increments up to 2mm, resulting in six different diameter variations. The next step involved examining the deformation of the leadframe caused by a heater block with the same diameter but varying numbers of vacuum holes: 4, 5, 6, and 9 holes. Finally, the study explored the heater block with a checkerboard pattern of microchannels, distinguishing them by different widths. The microchannel widths ranged from 0.2mm to 0.8mm, with increments of 0.1mm, resulting in a total of seven variations in microchannel width.
From the simulation results, it can be concluded that a heater block with a single vacuum hole is a less favorable design. Not only does it have a smaller suction area, but it also exhibits a larger dimensionless deformation compared to the X-shaped microchannel heater block. Although a multi-hole vacuum configuration can improve the issue of insufficient suction area and excessive dimensionless deformation observed with a single-hole vacuum, the cost of manufacturing needs to be considered. On the other hand, the heater block with a checkerboard pattern of microchannels exhibits relatively lower dimensionless deformation on the leadframe among the discussed cases in this study. Specifically, the heater blocks with microchannel widths of 0.3mm and 0.4mm perform the best among all the checkerboard microchannel designs. This is because they maintain a suction area similar to that of the X-shaped microchannel while effectively reducing the dimensionless deformation of the leadframe.

[1] D. B. Perng, S. M. Lee and Cheng-Chuan Chou, “Automated bonding position inspection on multi-layered wire IC using machine vision,” International Journal of Production Research, 11 March 2009.
[2] J. Archer, “Consistent matrix formulations for structural analysis using finite-element techniques,” AIAA Journal, 1 October 1965.
[3] Farhat, Charbel, "A simple and efficient automatic fem domain decomposer," Computers & Structures, vol. 28, no. 5, pp. Pages 579-602, 1998.
[4] J. Blacklock, R. Richard, “Finite element analysis of inelastic structures.,” AIAA Journal, 1 April 1968.
[5] Johansson, T., Meier, P.. and Blickhan, R., "A Finite-Element Model for the Mechanical Analysis of Skeletal Muscles," Journal of Theoretical Biology, vol. 206, p. 131, 2000.
[6] Lam, G.R. Liu，T. Nguyen-Thoi，K.Y., "An edge-based smoothed finite element method (ES-FEM) for static, free and forced vibration analyses of solids," Journal of Sound and Vibration, vol. 320, no. 4–5, pp. Pages 1100-1130, 6 March 2009.
[7] Mezzomo, L.A., Corso, L., Marczak, R.J., "Three-dimensional FEA of effects of two dowel-and-core approaches and effects of canal flaring on stress distribution in endodontically treated teeth," Journal of Prosthodontics-Implant Esthetic and Reconstructive Dentistry, vol. 20, p. 120, 2011.
[8] Przemieniecki, J. S., “Matrix Structural Analysis of Substructures,” AIAA Journal, 1963.
[9] S. K. Sen, P. Gould, “Criteria for finite element discretization of shells of revolution,” International Journal of Production Research, 1973.
[10] A. P. Ambily, Shailesh R. Gandhi, "Behavior of Stone Columns Based on Experimental and FEM Analysis," Journal of Geotechnical and Geoenvironmental Engineering, vol. 133, 2007.
[11] Stéphane P.A. Bordas a, Timon Rabczuk b, Nguyen-Xuan Hung c, Vinh Phu Nguyen d, Sundararajan Natarajan e, Tino Bog b, Do Minh Quan c, Nguyen Vinh Hiep c, "Strain smoothing in FEM and XFEM," Computers & Structures, vol. 88, pp. 1419-1443, 2010.
[12] Ajinkya Karpe, Sainath Karpe, Ajaykumar Chawrai, "VALIDATION OF USE OF FEM (ANSYS) FOR STRUCTURAL ANALYSIS OF TOWER CRANE JIB AND STATIC AND DYNAMIC ANALYSIS OF TOWER CRANE JIB USING ANSYS," International Journal of Innovative Research in Advanced Engineering, vol. 1, 2014.
[13] Garg Rinkle, Baghla Sunil, "Finite Element Analysis and Optimization of Crankshaft Design," International Journal of Engineering and Management Research, vol. 2, pp. 26-31, 2012.