精密定位在精密機械領域中扮演重要角色，精密定位平台在自動化機台中能夠提供抑振和精密定位提升機台性能，過去許多研究以撓性機構設計精密定位平台搭配閉迴路控制系統達到精密定位性能，撓性平台剛性來自於撓性平板和絞鍊結構的尺寸設計導致平台體積龐大，為改善撓性機構的此問題，過去有學者引入橡膠軸承於精密機械設計，以橡膠軸承取代撓性機構設計精密定位平台，能夠有效降低平台體積且同時兼具高速高定位精度之性能，但無法有效建立含有橡膠黏彈特性之模型，鑒於此問題，本論文設計一音圈馬達驅動橡膠軸承定位平台，以此為基礎建立一套能夠針對橡膠軸承黏彈特性的建模方法，以實驗觀察黏彈特性並以黏彈模型描述此現象進行建模，以此更符合真實狀況的平台模型設計控制系統，PID和積分式滑動模態控制器(ISMC)在本文中被採用控制此非線性時變系統，以控制器之強健性壓制平台剛性變化，步階響應、弦波軌跡追蹤和負載實驗了解系統性能，在PID和ISMC分別能達到頻寬27Hz和350Hz，定位精度13 nm和203 nm。從結果觀察，本研究設計並實現一橡膠軸承精密定位平台，以此為基礎建立一套以黏彈特性建立橡膠軸承平台模型之方法，並以此模型建立相對應控制器設計方法，驗證橡膠軸承平台可以以較小體積達到與撓性平台相當之精密定位性能。

Abstract
As products are required with higher precision, vibration control becomes more important for precision machining and inspection. A stage with both fast positioning and relative vibration eliminated can improve product quality. Elastomeric bearings are widely used in the seismic engineering and precision machining fields. By utilizing their stiffness anisotropy, miniaturized bearings can be made of rubbers and have the same function as much larger compliant mechanism–based designs. This provides possible advantages in precision positioning. In this paper, for modeling the system dynamics of the stage, the mechanical properties of elastomeric bearings are determined through essential material tests of the load cells in this system. The results show that the bearing stiffness is both frequency- and time-dependent. A single-degree-of-freedom precision stage containing four elastomeric bearings is then designed and realized. The stiffness of the elastomeric bearings is modeled as a generalized Maxwell model by system dynamics testing of controller design. A closed-loop control system comprising an AVM40-20 voice coil motor, an ASP-10-CTR capacitance probe, and an Integral Sliding Mode controller is proposed for the precision stage. Signal processing for the entire system is performed under an NI cRIO-9014 LabVIEW FPGA real-time controller. In comparison with a previous compliant mechanism–based design, the stage volume is reduced from 130×40×15 mm to 30×33×33 mm, the positioning stroke is increased from 101 μm to 139 μm, and the bandwidth is increased from 29 Hz to 350 Hz.

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