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研究生： 陳聖筆
Tantawi, Steven
論文名稱： 低溫共燒陶瓷CoMoO4及Li1.6Mn2.2Mo3O12之微波介電特性
Microwave Dielectric Properties of Low Firable CoMoO4 and Li1.6Mn2.2Mo3O12 Ceramics
指導教授： 黃正亮
Huang, Cheng Liang
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年： 2018
畢業學年度： 106
語文別： 中文
論文頁數： 97
中文關鍵詞： 微波介電 、低溫共燒陶瓷 、共燒
外文關鍵詞： Microwave Dielectric, LTCC, Co-firable
相關次數： 點閱：57  下載：0 
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    • 本篇論文主要分別介紹兩大部分，第一部分將介紹新開發的低溫燒結微波介電材料；第二部分將在不同基板上分別爲FR4、Al2O3以及Li1.6Mn2.2Mo3O12設計一濾波器，分析其模擬與實作結果。
    首先介紹CoMoO4 及Li1.6Mn2.2Mo3O12陶瓷材料之微波介電特性與材料微結構。由實驗得知，CoMoO4陶瓷材料在燒結690oC持溫4小時下，可得最佳介電特性ε_r~8.4, Q×f~55,000 Ghz, τ_f~-112 ppm⁄℃； Li1.6Mn2.2Mo3O12陶瓷材料在燒結810oC持溫4小時下，可得最佳介電特性ε_r~9.1, Q×f~43,000 Ghz, τ_f~-91 ppm⁄℃。兩者燒結溫度都小於950oC，都有作爲LTCC材料的潛力。
    最後，我們以利用HFSS模擬運作在2.4GHz之濾波器電路，並將電路實作於FR4、Al2O3以及Li1.6Mn2.2Mo3O12基板上，由結果比較可發現，高品質因數能使損耗減少。

    Low-firing microwave dielectric ceramics CoMoO4 and Li1.6Mn2.2Mo3O12 were investigated as potential materials for Low- Temperature Co-fired Ceramics (LTCC). Both ceramics were synthesized using the conventional solid state reaction. The ceramic CoMoO4 has a dielectric constant ε_r~8.4, quality factor Q×f~55,000 Ghz and temperature coefficient of resonant frequency τ_f~-112 ppm⁄℃ when sintered at 690oC for 4 hours; the ceramics Li1.6Mn2.2Mo3O12 has a dielectric constant ε_r~9.1, quality factor Q×f~43,000 Ghzand temperature coefficient of resonant frequency τ_f~-91 ppm⁄℃ when sintered at 810oC for 4 hours.
    Moreover, a hairpin structure with additional open stub micro-strip filter was made into the substrate in practice. Results show that a low loss dielectric ceramic can improve the performance of the filter.

    摘要 I 目錄 VIII 表目錄 XII 圖目錄 XIII 第一章 緒論 1 1-1 前言 1 1-2 研究目的 2 第二章 文獻回顧 3 2-1 微波技術與共振器發展 3 2-2 材料的燒結 5 2-2-1 材料燒結之擴散方式 5 2-2-2 材料燒結之過程 7 2-2-3 燒結的種類 7 2-3 介電共振器之原理 9 2-4 微波介電材料之特性 13 2-4-1 介電常數（εr） 13 2-4-2 品質因數(Q×f) 17 2-4-3 共振頻率溫度飄移係數(τf) 20 2-5 拉曼光譜與分子振動模態簡介 20 2-5-1 拉曼光譜（Raman Spectra） 20 2-5-2 分子的振動模態(Vibrational modes) 21 2-6 低溫共燒陶瓷(LTCC)技術簡介 22 第三章 微帶線及濾波器原理 23 3-1 濾波器 23 3-1-1 濾波器的簡介 23 3-1-2 濾波器的種類 24 3-2 微帶線 27 3-2-1 微帶線簡述 27 3-2-2 微帶線傳輸模態 28 3-2-3 微帶線各項參數公式計算與考量 29 3-2-4 微帶線的不連續效應 32 3-2-5 微帶線的損失 38 3-3 微帶線諧振器的種類 39 3-3-1 λ4短路微帶線共振器 40 3-3-2 λ2開路微帶線共振器 41 3-4 共振器間的耦合形式 42 3-4-1 電場耦合(Electric Coupling) 43 3-4-2 磁場耦合(Magnetic Coupling) 46 3-4-3 混和耦合(Mixed coupling) 50 3-5 濾波器設計 53 3-5-1 Hairpin微帶線共振器 53 3-5-2 輸入輸出饋入端 54 3-5-3 四分之一波長的阻抗轉換器與開路殘端（Open Stub） 55 3-5-4 Hairpin微帶線共振器及開路殘端 56 第四章 實驗程序與量測儀器 59 4-1 微波介電材料的製備 59 4-1-1 粉末的製備與球磨 60 4-1-2 粉末的煆燒 60 4-1-3 加入黏劑、過篩 60 4-1-4 壓模成形、去黏劑及燒結 60 4-2 微波介電材料的量測與分析 61 4-2-1 密度測量 61 4-2-2 X-Ray分析 61 4-2-3 SEM分析 62 4-2-4 拉曼光譜儀分析 62 4-2-5 介電特性量測方法 62 4-3 濾波器的製作過程 70 第五章 實驗結果與討論 72 5-1 CoMoO4之微波介電特性 72 5-1-1 CoMoO4的XRD相組成分析 72 5-1-2 CoMoO4的拉曼光譜分佈 74 5-1-3 CoMoO4的SEM分析 75 5-1-4 CoMoO4的相對密度分析 76 5-1-5 CoMoO4的εr值分析結果 76 5-1-6 CoMoO4的Q×f值分析結果 77 5-1-7 CoMoO4的τf值分析結果 78 5-2 Li1.6Mn2.2Mo3O12之微波介電特性 78 5-2-1 Li1.6Mn2.2Mo3O12的XRD相組成分析 78 5-2-2 Li1.6Mn2.2Mo3O12的拉曼光譜分佈 79 5-2-3 Li1.6Mn2.2Mo3O12的SEM及EDS分析 80 5-2-4 Li1.6Mn2.2Mo3O12的相對密度分析 82 5-2-5 Li1.6Mn2.2Mo3O12的εr值分析結果 83 5-2-6 Li1.6Mn2.2Mo3O12的Q×f值分析結果 83 5-2-7 Li1.6Mn2.2Mo3O12的τf值分析結果 84 5-2-8 Li1.6Mn2.2Mo3O12的晶格常數 84 5-3 濾波器的模擬與實作 86 5-3-1 玻璃纖維基板（FR4）之濾波器模擬與實作結果 87 5-3-2 氧化鋁基板之濾波器模擬與實作結果 89 5-3-3 Li1.6Mn2.2Mo3O12基板之濾波器模擬與實作結果 91 第六章 結論 94 參考文獻 95

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