本論文提出使用高靈敏度變微帶線五環互補式開口共振環(Tapped Impedance Microstrip Line – Penta Complementary Split Ring Resonator, TIM-PCSRR)非破壞性的檢測微流體之流速與介電系數。設計上利用變微帶線去匹配微帶線與環之間阻抗匹配，減小能量的反射進而提高共振腔的能量建立較強的電場區間。透過此感測器建立的電磁場空間分布受到等效介電系數改變造成的頻帶變化，可有效精確地定位出流體在感測器上的空間位置並量測其切線流速。藉由設計共振環的尺寸與環之間的距離去調整耦合電容的大小及造成的影響，提高量測的精準度與解析度。在製程上也引入先進的玻璃基板及流道製程，降低基板的損耗提高Q值也與未來的生物應用做連接。
在實際量測上首先利用單環的結構簡單的驗證出此方法可有效區分大範圍之介電系數的待測流體，且其流體位置仍能精準定位。而在量測流速方面，比起Rogers板製作的單環感測器，使用提出的玻璃基板變微帶線五環互補式開口共振環能有效的將誤差從6%降至3.35%。此論文也進階的以單流道量測異質流體混和的流速並得到可信賴的效能，平均誤差為4.7%。此技術結合了共振腔精準的共振特性和其近場輻射對空間感測的靈敏性，設計出具非侵入性檢測微流體流速及介電系數之技術。

This thesis presents a high sensitive microfluidics flowmeter based on a multi-ring complementary split-ring resonator (CSRR) sensor. The proposed tapped impedance microstrip lines (TIM) penta-CSRR (PCSRR) sensor inducing five resonance frequencies can determine the flow rate of liquids through microfluidics. The position variation can be measured from the change of resonance frequencies depending on the permittivity of flowing liquids and the coupling between the adjacent rings. A multi-ring with tapped feeding is designed to improve the sensitivity and to enhance high spatial resolution. Microfluidics sensor was fabricated using a glass substrate to achieve a high quality factor. The proposed method is able to measure a wide range of permittivity of LUT. The measured results of the flow rate of liquids yielded an average measurement error of 6% using Rogers substrate-based sensor and can be further improved to 3.35 % by using the glass-based sensor. The CSRR also measures the flow rate of the heterogeneous droplet through the microfluidics and achieved a 4.7% error by using multi-ring sensor.

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