於進行細胞阻抗量測時，若使用的頻率範圍屬低頻段，電流只會沿細胞外圍流動，如此造成無法有效得知細胞器內是否發生異常、甚至是細胞核的病變。然而為了改善低頻量測的缺點，本論文結合了微流道單一細胞捕捉結構與利用共平面波導技術所設計之微電極，並於射頻下的網路分析進行單一子宮頸癌細胞阻抗量測；且為了提高量測的準確度,本論文利用了去嵌入式校正技術將量測平面移至待測細胞。本研究結合了雙面電路板與玻璃玻片兩種不同基底之結構來完成單一細胞的分析，其中雙面電路板做為外框並藉由SMA接頭與網路分析儀進行連接，玻璃玻片則利用微機電製程技術製作一雙埠微電極做為單一細胞之量測。至今，本研究所提出之結構經證實已可分辨不同濃度之氯化鈉與各種不同之溶液，更能於等張溶液內分辨出細胞之有無。

When an electrical current with a low frequency is applied to a single cell, the pathological change of a cellular organelle that takes place inside the cell cannot be determined. To overcome the shortcomings of low frequency measurement, this paper combines a microfluidic device to capture single cells and a coplanar waveguide electrode inside a channel to measure the impedance of a single HeLa cell (human cervical epithelioid carcinoma) over the frequency range of 1 MHz to 1 GHz. The on-chip calibration technique is used to characterize the compound device. The technique improves the calibration accuracy by shifting the calibration reference plane to the de-embedding reference plane. This work presents a compound conductor backed coplanar waveguide (CBCPW) device which integrates two substrates for impedance analysis at the single-cell level. The outside part of the compound CBCPW is the FR4 substrate as the connection interface of a vector network analyzer (VNA) using a SubMiniature-A (SMA) connector. The inside part of the CBCPW is a glass substrate with electrodes to measure the impedance of a single cell. Various applications are demonstrated, including sodium chloride solutions with various concentrations, de-ionized (DI) water, alcohol, PBS, and a single HeLa cell. Equivalent circuit models of PBS and a single cell are used to explain the experimental impedance data.

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