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研究生: 鄒乙弘
Zou, Yi-Hong
論文名稱: 高機電耦合係數之鋰摻雜鈮酸鈉鉀壓電陶瓷開發及其在單一元件超音波換能器之應用
Development of the Li-Doped Potassium Sodium Niobate Piezoelectric Ceramics with High Electromechanical Coupling Coefficient and Applied to Single-Element Ultrasound Transducers
指導教授: 朱聖緣
Chu, Sheng-Yuan
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 82
中文關鍵詞: 相轉換燒結溫度極化條件超音波換能器
外文關鍵詞: phase transition, sintering temperature, poling condition, ultrasound transducer
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  • 本研究主要在開發無鉛壓電陶瓷(1-x)(Na0.535K0.48)NbO3-xLiNbO3(NKLN),針對材料的相轉換、燒結溫度以及極化條件作一系列的探討。以鋰添加鈮酸鈉鉀陶瓷中發現斜方相-正方相(orthorhombic-tetragonal)轉換的MPB其實還含有單斜方相的存在。在x=0.05時,NKLN陶瓷可獲得最佳的壓電特性:kp = 42%、kt = 52%。0.95(Na0.535K0.48)NbO3-0.05LiNbO3陶瓷在不同的燒結溫度下,其燒結溫度最低可降至900oC,但燒結溫度仍以950oC為佳,並在此燒結溫度下進行不同燒結時間的研究,在950oC燒結4小時,可獲得最佳機電耦合係數kp = 48%、kt = 52%。此研究中還探討了壓電陶瓷在不同之極化條件下對電特性之影響,由結果中發現,極化溫度會大幅影響電特性,當極化溫度在90oC、極化電場為3kV/mm時將獲得最佳極化效果。
      在一系列的研究中找出最佳特性之陶瓷體後,將此陶瓷應用於製作超音波換能器,並計算陶瓷體和背向層(backing layer)的聲阻值,分別以0.95(Na0.535K0.48)NbO3-0.05LiNbO3和(Na0.5K0.5)NbO3進行pulse/echo脈衝回聲響應的檢測,比較其輸出信號的差異,探討壓電陶瓷之壓電特性在超音波換能器上的影響。

    In this study, the development of lead-free (1-x)(Na0.535K0.48)NbO3-xLiNbO3 (NKLN) ceramics were investigated and the phase transition behavior of material, sintering temperature and poling condition were discussed. In NKLN ceramics, it was observed that the morphotropic phase boundary (MPB) not only contented the orthorhombic and tetragonal phases, but also had the formation of monoclinic phase. The best piezoelectric properties of NKLN ceramics with kp = 42%、kt = 52% were obtained at x = 0.05. In 0.95NKN-0.05LN ceramics, the sintering temperature was reduced from 1050oC to 900oC and the excellent piezoelectric properties were obtained under sintering at 950oC. Moreover, the 0.95NKN-0.05LN ceramics sintered at 950oC for different soak times was also investigated. The maximum values of kp (48%) and kt (52 %) were obtained at the optimum soak time of 4 h. In the present study, the electric properties of ceramics were significantly by the poling conditions, including poling temperature and poling electric field. The optimum poling conditions obtained were under the poling temperature of 90oC and poling electric field of 3 kV/mm.
      Based on the properties of ceramics above, the ceramics with high kp and kt values were chose for fabrication of single-element ultrasound transducers. The acoustic impedances of the ceramics and backing layer were calculated. The pulse/echo response of the ultrasound transducers fabricated using the (Na0.5K0.5)NbO3 and 0.95(Na0.535K0.48)NbO3- 0.05LiNbO3 ceramics were examined and the performances of these two ultrasound transducers were compared. Effects of piezoelectric properties of ceramics on the performances of ultrasound transducer were also investigated.

    摘要 I ABSTRACT II 誌謝 IV 目錄 V 表目錄 VIII 圖目錄 IX 第一章 緒論 1 1.1 研究背景與動機 1 1.2 論文架構 3 第二章 基礎理論與文獻回顧 4 2.1 壓電材料 4 2.1.1 正壓電效應(Direct piezoelectric effect) 4 2.1.2 逆壓電效應(Converse piezoelectric effect) 5 2.1.3 壓電單晶體 6 2.1.4 壓電多晶體 7 2.1.5 壓電複合材料 8 2.2 壓電特性參數 8 2.2.1 機電耦合係數 8 2.2.2 機械品質因數 10 2.3 壓電晶域結構 11 2.3.1 晶體壓電之根源 11 2.3.2 容忍因子 13 2.3.3 晶格與晶系 14 2.4 介電理論 16 2.4.1 介電原理 16 2.4.2 介電損耗 18 2.5 鐵電效應 19 2.5.1 鐵電遲滯曲線 19 2.6 NKLN文獻回顧 21 2.6.1 相轉換 22 2.6.2 低溫燒結 24 2.6.3 極化效果對晶域結構的影響 25 2.7 超音波換能器 26 2.7.1 超音波的基本特性 26 2.7.2 超音波的發射與接收電路 29 2.7.3 換能器 30 2.7.4 單一換能器量測原理 31 第三章 實驗製程與量測 32 3.1壓電陶瓷體的製作 32 3.1.1 陶瓷粉末的製備 32 3.1.2 陶瓷體的製造 33 3.2壓電陶瓷體的量測與分析儀器 34 3.2.1 收縮率的計算 34 3.2.2 SEM 35 3.2.3 XRD 36 3.2.4 電性量測 37 3.3超音波換能器的設計 38 3.3.1 single element換能器的組裝 38 3.3.2 超音波訊號檢測 40 第四章 實驗結果與討論 42 4.1 Li摻雜非當量NKN陶瓷的特性 43 4.1.1 SEM微結構分析 43 4.1.2 XRD繞射峰分析 46 4.1.3 介電量測 49 4.1.4 鐵電分析 51 4.1.5 電特性 52 4.2 Li摻雜非當量NKN陶瓷的低溫燒結 56 4.2.1 SEM微結構分析 56 4.2.2 XRD繞射峰分析 60 4.2.3 介電量測 61 4.2.4 鐵電分析 63 4.2.5 電特性 64 4.3 Li摻雜非當量NKN陶瓷的極化條件 68 4.3.1 介電量測 68 4.3.2 鐵電分析 70 4.3.3 電特性 71 4.4 以NKLN壓電晶體製作SINGLE ELEMENT超音波換能器 73 4.4.1 聲阻值的計算 73 4.4.2 pulse/echo脈波反射檢測 74 第五章 結論 78 5.1 結論 78 5.2 未來研究方向 79 參考文獻 80

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