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研究生： 江佩恩
Chiang, Pei-En
論文名稱： 超低溫共燒陶瓷材料Sr1-xMgxV2O6及LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之微波介電特性與應用
Microwave Dielectric Properties and Applications of Ultra-Low Temperature Co-fired Ceramics Using Sr1-xMgxV2O6 and LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)
指導教授： 黃正亮
Huang, Cheng-Liang
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年： 2021
畢業學年度： 109
語文別： 中文
論文頁數： 124
中文關鍵詞： 微波介電特性 、超低溫共燒陶瓷 、低損耗 、高品質因子
外文關鍵詞： Microwave dielectric properties, ULTCC, low-loss, High-Q
相關次數： 點閱：168  下載：0 
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    • 本篇論文主要分為二大部分，第一部分將介紹新型微波介電材料應用於ULTCC技術；第二部分將使用FR4、Al2O3及LiCo0.99Zn0.01VO4三種不同基板設計微帶線濾波器，進而分析其模擬與實驗結果。
    第一部分介紹Sr1-xMgxV2O6 (x= 0.01–0.09)陶瓷之微波介電特性，在燒結溫度為620oC (x=0.07)持溫4小時下，Sr0.93Mg0.07V2O6可得最佳微波介電特性er ~ 9.76、Qxf ~ 32,700 GHz、tf ~ -180 ppm/oC；LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)陶瓷之微波介電特性，在燒結溫度為650oC (x=0.01)持溫4小時下，LiCo0.99Mg0.01VO4與LiCo0.99Zn0.01VO4可得最佳微波介電特性分別為er ~ 13.05、Qxf ~ 49,800 GHz、tf ~ -74.9 ppm/oC與er ~ 13.06、Qxf ~ 51,600 GHz、tf ~ -58.2 ppm/oC。
    第二部分使用HFSS模擬微帶線濾波器電路，並將模擬電路實作於FR4、Al2O3及LiCo0.99Zn0.01VO4三種不同的基板上，由結果比較可以發現低介電損耗的陶瓷材料能增加濾波器的表現，而較高的Qxf值則可以提高濾波器在頻率選擇上的表現。

    An ultra-low sintering temperature microwave dielectric material Sr1-xMgxV2O6 (x= 0.01–0.09) and LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09) were prepared by conventional solid-state route. Influence of intrinsic and extrinsic factors on the microwave dielectric properties of the ceramics were also studied. Sr0.93Mg0.07V2O6 sintered at 620oC for 4 h exhibited excellent microwave dielectric properties with er ~ 9.76, Qxf ~ 32,700 GHz and tf ~ -180 ppm/oC; LiCo0.99A0.01VO4 (A= Mg, Zn) sintered at 650oC for 4 h revealed excellent microwave dielectric properties: er ~ 13.05, Qxf ~ 49,800 GHz, tf ~ -74.9 ppm/oC, and er ~ 13.06, Qxf ~ 51,600 GHz, tf ~ -58.2 ppm/oC, respectively. Moreover, both ceramics show good chemical compatibility with Al electrodes, which indicate all specimens might be potential candidates for ULTCC applications in particular at high frequency regions.
    Besides, the miniature stubs-loaded square open-loop bandpass filters with diagonal symmetrical feeders and open-stubs were discussed in this paper. According to the results, the performance of filters is improved by using low-loss dielectric ceramics as the substrate, the wave propagation delay of devices for high frequency regions are decreased by using low dielectric constant ceramics and the frequency selection of the filter can be improved by using high Qxf values ceramics.

    摘 要 i 致謝 ix 目錄 x 圖目錄 xiii 表目錄 xix 第一章 緒論 1 1-1前言 1 1-2研究目的 4 第二章 文獻回顧 7 2-1微波介電材料 7 2-1-1微波技術與共振器發展 7 2-1-2陶瓷材料的燒結 10 2-1-3介電共振器原理 15 2-1-4微波介電材料之特性 19 2-1-5拉曼光譜與分子振動模態簡介 28 2-1-6低溫共燒陶瓷(LTCC)技術簡介 29 2-1-7超低溫共燒陶瓷(ULTCC)技術簡介 30 2-2微帶線及濾波器原理 32 2-2-1濾波器原理 32 2-2-2微帶線原理 36 2-2-3微帶線共振器的種類 47 2-2-4共振器間的耦合型式 50 2-2-5濾波器設計 58 第三章 實驗程序與量測儀器 64 3-1微波介電材料之製備 64 3-1-1粉末的製備與球磨 65 3-1-2粉末的煆燒 65 3-1-3加入黏著劑、過篩 65 3-1-4壓模成形、去黏著劑及燒結 65 3-2微波介電材料的量測與分析 67 3-2-1密度測量 67 3-2-2 X-ray分析 67 3-2-3 SEM分析 68 3-2-4拉曼光譜儀分析 68 3-2-5微波介電特性量測方法 69 3-3濾波器的製作過程 76 第四章 實驗結果與討論 78 4-1 Sr1-xMgxV2O6 (x= 0.01–0.09)之微波介電特性 80 4-1-1 Sr1-xMgxV2O6 (x= 0.01–0.09)之XRD相組成分析 80 4-1-2 Sr1-xMgxV2O6 (x= 0.01–0.09)之晶格常數 83 4-1-3 Sr1-xMgxV2O6 (x= 0.01–0.09)之SEM與EDS分析 86 4-1-4 Sr1-xMgxV2O6 (x= 0.01–0.09)之相對密度分析 88 4-1-5 Sr1-xMgxV2O6 (x= 0.01–0.09)之介電係數(er)分析 89 4-1-7 Sr1-xMgxV2O6 (x= 0.01–0.09)之品質因數與共振頻率乘積(Qxf)分析 91 4-1-7 Sr1-xMgxV2O6 (x= 0.01–0.09)之共振頻率溫度飄移係數(tf)分析 94 4-1-8 Sr0.93Mg0.07V2O6與Al共燒 97 4-2 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之微波介電特性 99 4-2-1 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之拉曼光譜分佈 99 4-2-2 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之XRD相組成分析 101 4-2-3 LiCo1-xAxVO4 (A= Mg, Zn)( x= 0–0.09)之晶格常數 91 4-2-4 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之SEM與EDS分析 95 4-2-5 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之相對密度分析 98 4-2-6 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之介電係數(er)分析 99 4-2-7 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之品質因數與共振頻率乘積(Qxf)分析 101 4-2-8 LiCo1-xAxVO4 (A= Mg, Zn) (x= 0–0.09)之共振頻率溫度飄移係數(tf )分析 104 4-2-9 LiCo0.99Zn0.01VO4與Al共燒 107 4-3濾波器的模擬實作 109 4-3-1玻璃纖維基板(FR4)之模擬與實作結果 110 4-3-2氧化鋁基板(Al2O3)之濾波器模擬與實作結果 112 4-3-3 LiCo0.99Zn0.01VO4自製基板之濾波器模擬與實作結果 114 第五章 結論 117 參考文獻 119

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