本文旨在提出整合感應供電技術之電漿激發系統，並融入感應電能傳輸
作為系統電力來源。本文考量現有電漿激發系統若能加入彈性調整諧振電壓增益，將有助於擴展應用領域，因此提出基於諧振槽、諧振迴授電路以及電漿負載之統整，進而建構新型的諧振驅動電路，並且輔以諧振變壓器端之回授補償電容調整，具有彈性調整系統電壓轉換增益之能力。此外，本論文加入感應線圈之電能傳輸機制，實現雙迴路線圈傳遞電力，可同時俾於提昇電漿電源之供電可靠度。而為了證實本系統之可行性，本文經由電路模擬與系統諧振增益分析佐證，並藉由硬體雛型加以電漿實測，測試結果顯示此電漿激發系統及非接觸電力傳輸機制有助於提昇電漿電源應用便利性，研究心得可提供電漿產業設計及應用參考。

This thesis aims to propose a plasma ignition system with the integrated inductively coupled power transfer technique, by which the inductive power transfer is served as the power source. Considering the extension of plasma applications following the inclusion of the resonant voltage gain adjustment, the proposed system is constructed based on the integration of resonant tank, resonant feedback circuit and a plasma load. Furthermore, by adding the feedback compensation capacitors at resonant transformer side, the circuit is enhanced with a higher flexibility of the tuning of voltage transfer gain. Subsequently, the study also realizes the inductively coupled power transfer, by which the dual-loop power transfer supplies the plasma ignition with a higher reliability. In order to confirm the practicality of the proposed system, this study has been verified by circuit simulation and resonant-gain analysis. The hardware prototype is also made with measurements. The results gained from these tests and measurements reveal the increased convenience of plasma power source through the plasma ignition system and contactless power transfer mechanism, presenting a beneficial reference for plasma industry design and applications.

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