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研究生: 林湘婷
Lin, Hsiang-Ting
論文名稱: 基於空間光調變器之雷射多點聚焦設計與優化
Laser Multi-focus Design and Optimization with Spatial Light Modulator
指導教授: 張家源
Chang, Chia-Yuan
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2024
畢業學年度: 112
語文別: 中文
論文頁數: 111
中文關鍵詞: 空間光調變器多點聚焦陣列圓形扇形相位切割法多點聚焦閉迴路均勻強度調變演算法
外文關鍵詞: spatial light modulator, multi-focus arrays, circular-sectorial phase segmentation, multi-focus intensity equalizing feedback-control algorithm
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  • 藉由多道雷射實現快速重複加工同樣圖樣的應用,以大幅增加系統的製造效率,固定式的繞射光元件(diffraction optical element,DOE)可以產生多聚焦點進行設計但無法動態調變入射雷射相位,而空間光調變器(spatial light modulator,SLM)擁有動態可調變入射雷射相位的能力,已被廣泛驗證適合用來實現雷射整形應用。在系統中可藉由產生不同的相位圖樣來改變雷射於最終樣品端的多點聚焦陣列(multi-focus arrays)的分佈,並可依據應用需求,來動態調整相位圖樣的變化。SLM在光學應用中用於調控和控制雷射光束的空間分布。SLM能夠精確地改變光波前的相位、振幅和偏振,因此在各種光學應用中具有廣泛的應用前景。例如,在多光子激發螢光顯微術(multiphoton excitation fluorescence microscopy,MPEFM)中,SLM可以用於光束整形,以提高樣品的激發效率和成像品質。此外,SLM 在電腦生成全像術(computer-generated holography,CGH)、光學通信和適應性光學等領域也具有重要應用。本研究重點在於利用多點聚焦相位切割法之圓形扇形相位切割法(circular-sectorial phase segmentation,CSPS)成功將雷射分割成多點聚焦陣列,進行任意位置的激發設計,透過操控切割精度、相位切割法、任意聚焦點數、任意聚焦位置來達成目的預期成像。並且分析CGH與相位切割法的成像優劣。並且利用改變相位圖的方式進行迭代設計,發展多點聚焦閉迴路均勻強度調變演算法(multi-focus intensity equalizing feedback-control algorithm,MIEFA)。

    Using fixed diffraction optical elements (DOEs) to generate multiple focal points cannot dynamically modulate the incident laser phase. However, spatial light modulators (SLMs) have the ability to dynamically adjust the incident laser phase and have been widely validated for laser shaping applications. In the system, different phase patterns can be generated to alter the distribution of the multi-point focusing array at the final sample end, allowing for dynamic adjustment of phase patterns according to application requirements. SLMs are used in optical applications to manipulate and control the spatial distribution of laser beams. SLMs can precisely alter the phase, amplitude, and polarization of the wavefront, providing extensive potential for various optical applications. For example, in multiphoton excitation fluorescence microscopy (MPEFM), SLMs can be employed for beam shaping to improve sample excitation efficiency and imaging quality. Additionally, SLMs have significant applications in computer-generated holography (CGH), optical communications, and adaptive optics. This study focuses on successfully employing a circular-sectorial phase segmentation (CSPS) method to divide the laser into a matrix of focal points for arbitrary position excitation. The desired imaging is achieved by controlling segmentation precision, phase segmentation methods, the number of focal points, and their positions. Moreover, the comparison between CGH and phase segmentation methods are discussed. By iteratively designing and modifying phase maps, a multi-focus intensity equalizing feedback-control algorithm (MIEFA) has been developed.

    摘要i Extending Abstractii 致謝ix 目錄x 圖目錄xii 表目錄xviii 第一章 緒論1 1-1 前言1 1-2 文獻回顧3 1-3 研究動機7 1-4 論文架構8 第二章 空間相位調變9 2-1 SLM 原理介紹9 2-2 SLM規格簡介15 2-3 SLM校正17 2-3-1 SLM校正光路系統17 2-3-2 SLM校正公式推導19 2-3-3 SLM校正結果21 2-4 相位調變於光束整形22 2-4-1 CGH原理公式22 2-4-2 平頂光光束整形26 2-4-3 實驗結果33 第三章 雷射多點聚焦設計35 3-1 圓形扇形切割演算法36 3-2 雷射多點聚焦39 3-2-1 背景雜散光優化41 3-2-2 系統能量效率42 3-3 多點聚焦調控能力46 3-3-1 聚焦點位置矩陣S46 3-3-2 聚焦點數量M48 3-4 成像光型優化48 3-5 雷射波長差異54 第四章 多點聚焦品質優化55 4-1 光強均勻迭代流程56 4-1-1 影像切割57 4-1-2 聚焦點光強均勻度分析58 4-2 多點聚焦閉迴路均強調變演算法59 4-3 實驗結果60 4-4 多聚焦線強度圖樣設計65 4-4-1 單一聚焦線強度圖樣設計65 4-4-2 單一聚焦線搭配條狀切割法71 4-4-3 扇形相位切割法多點聚焦搭配柱狀透鏡72 4-4-4 條狀相位切割法多點聚焦搭配柱狀透鏡73 第五章 結果與討論77 5-1 結果與討論77 5-2未來展望78 參考文獻81

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