平面顯示器產業是一種無論在技術、資本與知識力皆為高密度的高科技產業，因此如何使設備利用率、產品良率以及材料控制等成本效率最佳化，期許在最短生產時間內以最高良率最低成本將設備成本攤平，降低產品單位成本、創造公司競爭優勢，乃成為此業界不斷追求的目標。

全球電視顯示器需求持續成長，將帶動次世代面板（G8.5）廠商持續投資。而次世代面板生產所需關鍵真空鍍膜設備，因世代尺寸引發許多真空製程穩定控制技術，ex 均勻性問題、載台水氣管控、殘留氣體與膜質管控等...，持續改善其製程穩定控制技術，即為值得研究探討的議題。

本研究運用失效模式分析找出個案中製程風險領先指數最高者，並將其列為優先預防改善項目，之後以萃思理論的矛盾矩陣，定義出個案公司改善参數與惡化參數，之後再以40創新原則求解，而得之以殘留氣體分析儀做為製程改善應用，並於個案公司中取得相關改善成果以應證本研究之論證。

本研究提供了平面顯示器產業之真空鍍膜設備，於生產過程中實際運用萃思理論，推論找出殘留氣體分析儀應用於製程改善成功的範例，期望能藉此個案推論過程，協助工程人員透過萃思理論相關理論與方法，有效率的縮短生產過程中求解時間，提高工程師獨立求解的能力。由於台灣平面顯示器廠商缺乏品牌支援，僅能處於產業鏈的底端。未來，則須持續以開發新產品技術、降低成本以及彈性的經營模式，才能贏得市場最佳商機。

Demand of TV LCD display panel continues to grow and leads to further investment in next generation (G8.5) LCD panel manufacturing. Vacuum sputtering equipment is critical in G8.5 LCD panel production. Due to panel size difference between generations, there are issues in technique of controlling and stabilizing vacuum process, e.g uniformity, carrier moisture control, residual gas and thin film quality control, etc. Therefore, continuous improvement in technique of the production process control and stabilization is worthwhile for study and research.

In this study, we applied FMEA theory in cases to identify the riskiest production process and prioritized these processes as the top improvement item. Then, we used contradiction matrix of TRIZ theory to define parameters of improvement and deterioration in cases. Afterwards, we applied 40 inventive principles to find a conclusion. The conclusion is application of RGA (residual gas analyzer) for process improvement, and results of improvement in cases were collected to support the hypothesis of this study.

This study provides a practical application of TRIZ theory to vacuum sputtering equipment control in FPD industry. By demonstrating its application to identify RGA as a successful solution for process improvement, we expect to assist engineers to exercise related theory and methods of TRIZ to shorten problem solving process in production. In addition, engineers’ ability of independent problem solving will also improve.

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