| 研究生: |
何中雄 Ho, Chung-Hsiung |
|---|---|
| 論文名稱: |
具備生產履歷的凸塊研究 The traceability study of wafer bumping |
| 指導教授: |
邵揮洲
Shaw, H.J. |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 工程管理碩士在職專班 Engineering Management Graduate Program(on-the-job class) |
| 論文出版年: | 2009 |
| 畢業學年度: | 97 |
| 語文別: | 中文 |
| 論文頁數: | 81 |
| 中文關鍵詞: | 晶圓等級封裝 、生產履歷 、凸塊 、覆晶 |
| 外文關鍵詞: | WLCSP, Flip Chip, Traceability, Bump |
| 相關次數: | 點閱:103 下載:4 |
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可追溯性的生產履歷已被國際標準組織訂定為標準,甚至於國際衛生組織也將食品生產的處理與運送的可追溯性做出定義。
半導體製程當然也有可追溯性,但是傳統半導體封裝的產品,因最終紀錄在產品上的記號,已經經過晶圓切割,只能向前追溯到產品批號及封裝時間,無法再回溯到其在晶圓上的位置,因此在某些時候,無法正確回溯。封裝製程從先前的「打金線」加上「封黑膠」進步到不再使用金線以節省成本,沒有長導線使得訊號距離最短,不需封膠保護金線可直接散熱的錫鉛凸塊製程,再由錫鉛凸塊製程進展到高可靠度高鉛凸塊及綠色產品的無鉛凸塊製程,而凸塊沈積製程也由原先傳統電鍍液的電鍍製程,發展到錫膏印刷製程。如此種種,讓凸塊製程似乎領先傳統封裝許多。
本研究就生產履歷追溯部分,對應用在凸塊製程的紀錄方式,做各階段的比較,同時做整合可能性的探討。最後配合強化型雷射背印,將各個晶片賦予獨一無二的辨識碼。藉由此辨識碼來比對整合過的製程記錄,便可以知道該晶片是否為「偽造品」或「瑕疵品」。最後對於執行該生產履歷的方式及執行方法,做現階段的探討。其限制與可能發展,則在最後一章節做闡述。
The traceability system be defined in ISO (International Organization for Standardization) SPEC, It can be review in ISO9000:2005 and ISO22000:2005 and, ISO/TS16949:2002. Even the WHO/Codes defined it for the food production and processing and distribution.
In semiconductor field, it also follows the definition of ISO for traceability in all devices. But the traditional assembly device, the mark was made after wafer sawing. That is this device only can be traced for the lot number and assembly date. It will not be traced back to the exactly positopn on wafer. It is important for wafer process and engineering judgement. Sometimes the chip cannot be traced back correctly. Assembly process improved the gold wire bonding and molding compound into no more gold wire for cost saving and no long lead to shorten signal transmission distance and no compound to improve heat spreading, that is bumping. Then high lead bump for reliability concern and lead free bump for green envirement requirement be raised. The solder disposition method also improved from plating of high power requirement to printing of lower power wasting. Such advantage showed out bumping is better than tranditional assembly.
In this research, it shows the different recording in each step of semiconductor device and to investigate the integration of semiconductor front end and backend.In the other hands, to enhance the backside laser marking (an individual ID for each chip die), compare with the integrated mapping file, we can easy to check if this chip die is “Fake” or “Fault”. In the last section, it also mentions the feasibility of implement and methodology limitation.
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