本論文描述利用快速升溫化學氣相沉積系統(RTCVD)於N型　(111) 矽基板或多孔矽基板上成長類鑽碳薄膜(Diamond-like Carbon, DLC)，並藉以完成類鑽碳薄膜金半金(Metal-Semiconductor-Metal)紫外光感測器之研究。類鑽碳為一種內含大量sp3鍵結的亞穩態非晶碳，它是一種泛用度極高的寬能隙半導體，含有許多優良的特性如高硬度、高化學安定性、抗反射性以及極佳的生物相容性，類鑽碳薄膜已被報導可應用於耐磨耗、電子、光學、生醫材料以及微機電(Micro-electromechanical, MEMs )元件等方面。
本研究中，吾人以丙烷(C3H8)為碳源，並添加氫氣作為載氣，於高溫下沈積類鑽碳膜，並藉由改變丙烷流量與RTCVD沉積溫度來調整薄膜的特性。吾人使用拉曼光譜(Raman Spectrum)、AFM以及FE-SEM來分析薄膜基本特性，再將各種所成長之類鑽碳薄膜製作為類鑽碳金半金紫外光感測器，進一步比較各元件特性差異。
此外，利用電化學陽極蝕刻法(electrochemical anodization method)製備多孔矽基板，並在多孔矽基板上生成類鑽碳薄膜及完成多孔矽類鑽碳金半金紫外光感測器。多孔矽基板具有多重反射之特性可強化類鑽碳薄膜對光線的捕捉以提升紫外光感測器之效能。實驗結果發現多孔矽基板所製作的紫外光感測器之光增益(202倍)比未蝕刻矽基板之紫外光感測器之光增益(22倍)約提升了10倍。如此證實，多孔狀結構的類鑽碳薄膜金半金元件的確可作為高性能紫外光感測器之用。

In this thesis, we report the fabrication of the optoelectronic devices with a metal-semiconductor-metal (MSM) structure based on Diamond-like carbon (DLC) films in details. The DLC films were deposited on Si and porous Si substrates by RTCVD. Both metals of Al and Au were used as electrode contacts. The DLC is a metastable form amorphous carbon with significant sp3 bonding and has the features of high mechanical hardness, chemical inertness, antireflection and high biocompatibility. It has been widely applied as protective coatings in area, such as optical windows, magnetic storage disks, biomedical coatings and as micro-electromechanical devices (MEMs).
In depositing the DLC films, we used C3H8 gas as carbon source and H2 gas as carrier. By adjusting the C3H8 gas density and depositing temperature, the optimized deposition parameters for UV light detection were found.
Specifically, DLC films were deposited on porous Si substrates prepared by electrochemical anodization method.
With the porous Si substrate, almost 10 times improvement in the photo/dark current ratio was found in the DLC MSM UV detecting device due to the feature of multi-reflection of light in the porous structure. Thus, the developed DLC device on porous Si substrates has a potential for high performance UV light detecting applications.

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