本論文所分析與研製之3 kW射頻電漿電源主要分成三部分。第一部分為使系統之市電輸入電流具高功率因數維持電力品質，本系統前級使用功率因數修正器，其架構採用交錯式升壓型轉換器。第二部分為了控制射頻交流輸出功率，提供射頻換流器輸入端一大範圍穩定直流電壓源(30 V ~ 300 V)，因此使用全橋相移式直流/直流轉換器。第三部分為將直流電壓轉換為射頻交流輸出，本論文使用E類換流器架構。
本文先針對功率因數修正器之模式作分析，並選出最合適之功率因數修正器，再對全橋相移式直流/直流轉換器作分析，控制其相移角度使其有大範圍之輸出直流電壓，最後分析E類換流器之開關應力及輸出電流相移角之關係，使其能降低因高頻切換所造成之開關切換損。

In this thesis, a 3 kW RF plasma power supply is analyzed and implemented. This plasma power supply can be separated into three parts. The first part is a power factor correction circuit. The purpose of this circuit is to enhance the quality of the utility which is the input source. The structure of this power factor correction circuit is an interleave boost converter. The second part is a full-bridge phase shift DC/DC converter, this circuit can control the input power sent to the RF inverter by tunning the input voltage from a wide range of 0~300V. The third part is a Class-E inverter, this circuit transfers the DC input voltage into the AC output voltage.
In the beginning, this paper analyzes the working modes of the power factor correction circuit and chooses the suitable structure. Then the full-bridge phase shift DC/DC converter which can control the DC output voltage by adjusting the phase-angle is discussed. Finally, the switch pressure in the Class-E inverter and phase-angle of the output current is examined. Switching losses caused by high frequency switching is successfully reduced.

[1] 李孟儒，RF電漿源的功率匹配研究，東華大學電機工程學系碩士論文，2002。
[2] 沈國良，應用於交直流電漿之直流脈衝電源供應器，中原大學電機工程學系碩士論文， 2002。
[3] 張家豪、魏鴻文、翁政輝、柳克強、李安平、寇崇善、吳敏文、曾錦清、蔡文發、鄭國川，電漿源原理與應用之介紹，物理雙月刊， pp.440-451，2006。
[4] S. M. Rossnagel, J. J. Cuomo, and W. D. Westwood, Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions: William Andrew, 1990.
[5] D. Petreus, A Grama, S. Cadar, E. Plaian, and A. Rusu, “Design of a Plasma Generator based on E Power amlifier and impedance matching,” in Optimization of Electrical and Electronic Equipment, 2010 12th International conference on, 2010, pp. 1317-1322.
[6] 林芳毅，半無橋及無橋交流雙向開關式功率因數修正器之研製，臺灣科技大學電子工程系碩士論文， 2013。
[7] 蔡智偉，1-kW交錯式升壓型功率因數修正器研製，臺灣科技大學電子工程系碩士論文，2009。
[8] M. G. Kim, G. Y. Park, D. H. Yoo and G. Y. Jeong, “High power full-bridge DC-DC converter using a center-tapped transformer and a full-wave type rectifier,” Control of automation, IEEE Journal of, vol.7, pp. 267-278,2014.
[9] C. H. Lin, C. Y. Chen, M. H. Hung, C. M. Wang and L. C. Lee, “A MCU-Based Intelligent Charger with Multi-Charging Mode” in Industrial Electronic and Applications(ICIEA), 2014 IEEE 9th Conference on, 2014, pp. 286-291.
[10] N. O. Sokal, “Class-E RF power amplifiers,” QEX Commun. Quart, pp.9-20, 2001.
[11] N. O. Sokal and A. D. Sokal, “Class EA new class of high-efficiency tuned single-ended switching power amplifiers,” Solid-State Circuits, IEEE Journal of, vol. 10, pp. 168-176, 1975.
[12] Y. F. Li, “Auto-tuning controller design of class E inverter with resonant components varying,” in Industrial Electronics (ISIE), 2012 IEEE International Symposium on, 2012, pp. 217-221.
[13] 張明化,“阻抗匹配,”1982。
[14] 洪昭南,“電漿反應器與原理,”化工技術,vol.9, p.156,2001。
[15] 許藝菊，梁詠翔,“常壓電漿原理, 技術與應用.ppt,”2012。
[16] Y. R. Yang and W. Y. Lee, “A DC-pulse power supply designed for plasma applications,” in Power Electronics and Drive Systems, 2009. PEDS 2009.International Conference on, 2009, pp. 1086-1090.
[17] K. L. Shen, “DC-pulse power supply for AC/DC plasma application,” Electrical Engineering, 2001.
[18] H. Koizumi and S. Mori, “Analysis of Class D inverter with irregular driving patterns,” Circuits and systems, IEEE Transaction on, vol.53, NO.3, 2006 .
[19] M. K. Kazimierczuk, RF power amplifiers: Wiley, 2008.
[20] M. K. Kazimierczuk and D. Czarkowski, Resonant power converters: Wiley-IEEE Press, 2012.
[21] M. Kazimierczuk and K. Puczko, “Exact analysis of class E tuned power ampilier at any Q and switch duty cycle,” Circuits and Systems, IEEE Transactions on, vol. 34, pp.149-159,1987.
[22] A. Mediano P. Molina-Gaudo, and C. Bernal, “Design of class E amplifier with nonlinear and linear shunt capacitances for any duty cycle,” Microwave Theory and Techniques, IEEE Transactions on, vol.55, pp. 484-492, 2007.
[23] I. Boonyaroonate, T. Fukami, and S. Mori, “Class E isolated DC-DC converter using PWM synchronous rectifier,” in Circuits and Systems, 2000. Proceedings.ISCAS 2000 Geneva. The 2000 IEEE International Symposium on, 2000, pp. 252-255.
[24] D. G. Reed, The ARRL handbook for radio communications: Amer Radio Relay League, 2002.
[25] K. L. Jen, “Study and Implementation of Class-E Inverter for RF Plasma Power Supply,” Master thesis, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan.
[26] Texas Instruments, “UCC28070 300-W Interleaved PFC Pre-Regulator Design Review,”2008.
[27] 白富升、柯佩汝、黃慶連、李佳燕，以E類諧振換流器為基礎之LED 驅動電路設計，電力工程研討會，pp.1763-1767。
[28] D. Milosevic, J. Tsang, and A. Roermund, “Investigation on technological aspects of class E RF power amplifiers for UMTS applications,” Department of Electrical Engineering, 2002.