對於在收集機械能量和作為振動感測器方面具有多功能的摩擦電發電機（TENGs）引起了相當大的關注。本研究調查了具有N×N陣列表面結構的TENGs的性能，並探索了這些結構對TENGs作為振動感測器的影響。TENGs中的陣列模式是由相鄰單元之間的機械耦合引起的，導致複雜的振動模式和改變的輸出特性。了解和控制陣列模式對於優化TENGs作為振動感測器的性能至關重要。陣列模式的存在顯著影響關鍵性能指標，包括頻率響應範圍以及產生的電信號的幅度和波形。這些影響在設計和優化基於TENG的振動感測系統時需要仔細考慮。本研究通過兩個測試來研究TENGs在陣列模式下的行為。這些測試是自行開發的落地測試和氣動激勵測試。使用CO2雷射加工和聚二甲基矽氧烷（PDMS）注模技術製作了具有462.3微米形態的NxN陣列。此TENG的性能與六種不同的陣列結構進行了比較：1×1、2×2、3×3、4×4、5×5和6×6。在7 Hz時，這些陣列結構所達到的開路電壓值分別為25.6 V、20.9 V、27.9 V、19.8 V、16.95 V和23.1 V。此外，振動感測器的結果表明，陣列TENG能夠檢測高頻率（超過10 Hz）的振動。此外，最佳的NxN陣列TENG取決於特定的應用需求。例如，當施加較低的力時，較高的陣列TENG配置表現更好。這些研究結果為我們對TENGs的功能性提供了有價值的見解，並且揭示了其在真實情境中的潛在應用。總結來說，本研究強調了陣列表面結構對TENG作為振動感測器性能的影響，並展示了陣列模式對頻率響應範圍、電信號特性和感測能力的影響。這些研究結果有助於更好地理解TENG的運作原理，並指導TENG在各種真實應用中的設計和應用實施。

Triboelectric nanogenerators (TENGs) have garnered significant attention as versatile devices for harvesting mechanical energy and as vibration sensors due to their inherent sensitivity. This research investigates the performance of TENGs with an array surface structure of NxN and explores the effects of these structures on TENGs as vibration sensors. Array modes in TENGs arise from the mechanical coupling between neighboring units, resulting in complex vibrational patterns and altered output characteristics. Understanding and controlling array modes are crucial for optimizing TENG performance as vibration sensors. The presence of array modes significantly affects key performance metrics, including the frequency response range and the magnitude and waveform of generated electrical signals. These effects necessitate careful consideration in the design and optimization of TENG-based vibration sensing systems. This study examines the behavior of TENGs under an array mode through two tests: a self-developed drop test and a pneumatic actuation test. A laser processed NxN array with a morphology of 462.3 µm was fabricated using CO2 laser processing and Polydimethylsiloxane (PDMS) pour molding technology. The performance of this TENG was compared with six different array structures: 1x1, 2x2, 3x3, 4x4, 5x5, and 6x6. The open circuit voltage values achieved for these array structures were 25.6 V, 20.9 V, 27.9 V, 19.8 V, 16.95 V, and 23.1 V, respectively at 7 Hz. Furthermore, the results of the vibration sensors indicate that the array TENG was capable of detecting vibrations at high frequencies over 10 Hz. Moreover, the optimal NxN array TENG varied depending on the specific application requirements. For instance, when a low force is applied, a higher array TENG configuration performs better. These findings provide valuable insights into the functionality of TENGs and their potential application in real-world scenarios. In conclusion, this research highlights the influence of array surface structures on TENG performance as vibration sensors. It demonstrates the effects of array modes on frequency response range, electrical signal characteristics, and sensing capabilities. The findings contribute to a better understanding of TENG operation and inform the design and implementation of TENGs in diverse real-world applications.

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