本研究使用RF磁控濺鍍披覆CrNbSiTaZr高熵合金於碳化鎢底材上，實驗中以乙炔通量為變因(0、19、20、21、22、23sccm)，濺鍍6組鍍層。隨後將底材與6組鍍層進行750度一小時的熱處理，觀察底材熱處理前後與試片熱處理前後共14組試片之微結構、機械性質，並以往復式磨耗變化三種荷重(10N、20N、30N)與兩種對磨材(氮化矽與鉻鋼球)，同時也使用迴轉式磨耗荷重10N變化兩種對磨材(氮化矽與鉻鋼球)進行磨潤性質的探討；電化學實驗分析試片之抗腐蝕能力，最後再以沾黏試驗，評估鍍層於實際玻璃成形運用上，能提供模具與玻璃間之抗沾黏能力。
實驗結果中發現到未通入乙炔之組別有最高的硬度與附著性，但在磨潤方面表現不佳，隨著乙炔通量的上升，鍍層硬度呈現下降的趨勢，同時附著性也呈現下降的趨勢，但能大幅度提升磨潤性質，其中以通入最少乙炔的組別HC19為最佳。熱處理過後所有鍍層的硬度、附著性、磨潤性質均大幅度下降，導因於鍍層內之DLC結構在熱處理過後轉變成偏向石墨之結構。抗沾黏試驗方面，有鍍層之組別能有效改善模具之沾黏，其中以含碳之鍍層為最佳

The High entropy alloys (HEAs) were deposited on the WC disk by the RF magnetron sputter. Then the disk went under heat treatment at 750℃in order to compare the properties between the heated coatings and unheated coatings. The HEAs without carbon (HC0), has the highest hardness(23.45GPa) and highest critical load(100N), but show the worst tribologica properties. In the acetylene adding HEAs, HC19 has the highest hardness (17.09 GPa), highest critical load(60N), lowest C.O.F (0.05),wear depth(0.29μm) and wear rate(0.16*10-6mm3/N.m).In the anti-corrosion properties, only HC0, HC21,HC22 have lower corrosion current density than the WC. After heat treatment, most of the coatings perform even better than the unheated coatings.In the anti-sticking properties. WC substrate performed the worst in the test, has severe glass sticking on the surface, HC0 can improve the severe sticking on the surface and the coating with acetylene adding perform even better anti–sticking properties than the HC0.

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