本論文主要是應用渦電流檢測技術設計一套軟性銅箔基板(Flexible Copper Clad Laminate, FCCL)厚度檢測系統，並使用田口法與有限元素法模擬搭配基因演算法建立一套最佳化線圈探頭感測器的優化設計技術，此技術最大的優點是能以田口法快速篩選出變動參數，並藉由ANFIS模型，用較少量的變數去提高運算感抗變化量ΔL，最後透過基因演算法快速找到最佳化線圈探頭繞製參數。當應用於檢測微米等級之金屬薄膜厚度時，由於厚度非常的薄，系統對厚度之鑑別度尤其重要，而鑑別度的提升與感抗變化量ΔL有密切的關係。因此本論文除了設計一套檢測系統，並提出一種較簡易且低成本的線圈探頭感測器優化設計技術來提高檢測鑑別度，實際繞製感測線圈並裝置於開發之厚度檢測系統上，同時設計人機介面讓使用者能及時觀察量測結果。最後，以實驗測試各種不同材質薄膜，證明能準確檢測，並對結果作分析與討論。

This study aims to design a flexible copper clad laminate (FCCL) thickness testing system with eddy current testing technology and match Taguchi Method and Finite Element Method with Genetic Algorithm to establish an optimization design of optimal coil probe sensors. The technology could rapidly screen variable parameters with Taguchi Method, enhance the computation of inductive reactance ΔL with few variables, through ANFIS model, and rapidly find out optimal coil probe winding parameters with Genetic Algorithm. When being applied to test micro-size metallic film thickness, the thickness discrimination of the system is especially important because of the extremely thin thickness. The promotion of discrimination is closely related to inductive reactance ΔL. In addition to the design of the testing system, the optimization design of an easy and low-cost coil probe sensor is proposed in this study to enhance the testing discrimination. The sensing coil is wound up and equipped on the developed thickness testing system, and the human-machine interface is designed for the users timely observing the measuring results. Finally, films with different materials are tested with experiments to prove the accuracy as well as analyze and discuss the results.

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