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研究生：	莊凱富 Chuang, Kai-Fu
論文名稱：	以 ANSYS FLUENT 進行氣體渦流於離子植入機真空系統排氣管路清潔的模擬與最佳化 Simulation and Optimization of Gas Swirl for Cleaning the Exhaust Pipeline in a Vacuum System of an Ion Implantation by ANSYS FLUENT
指導教授：	吳毓庭 Wu, Yu-Ting
學位類別：	碩士 Master
系所名稱：	工學院 - 工程科學系碩士在職專班 Department of Engineering Science (on the job class)
論文出版年：	2024
畢業學年度：	112
語文別：	英文
論文頁數：	63
中文關鍵詞：	離子、渦流、真空、清潔、排氣
外文關鍵詞：	ion, vortex, vacuum, clean, exhaust
相關次數：	點閱：101 下載：5
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本研究旨在使用ANSYS FLUENT進行離子植入機真空系統的排氣管清潔模擬和優化。在研究中首先建構真空管道的真實幾何形狀，然後經由計算流體動力學（CFD）模組模擬在不同壓力和角度的條件下所引發管道內的氣體流動，最後獲得的模擬結果表明，若通過在管道內部利用引入合適角度和速度的渦流，可增加氣體分子之間碰撞的概率，促進氣體分子和顆粒從管道表面的分離，實現管道的清潔並恢復排氣管的通暢性，提高離子注入器的性能和可靠性。

The purpose of this study was to simulate and optimize the exhaust pipe cleaning of an ion implanter vacuum system using ANSYS FLUENT. In this study, the real geometry of the vacuum pipe is constructed, and then the computational fluid dynamics (CFD) module is used to simulate the gas flow in the pipe under different pressure and angle conditions, and the simulation results show that if the vortex with appropriate angle and speed is introduced into the pipeline, the probability of collision between gas molecules can be increased, the separation of gas molecules and particles from the surface of the pipe can be promoted, the cleaning of the pipeline and the patency of the exhaust pipe can be restored, and the performance and reliability of the ion implanter can be improved.

Abstract I
Content II
List of Figure IV
List of Table VI
Symbol Description VII
CHAPTER 1 Introduction 1
1-1 Background 1
1-2 Introduction to ANSYS FLUENT 4
1-3 Introduction to the implanter vacuum system 6
1-4 Literature Review 9
1-5 Exploration Methodology 15
1-6 Structure of this Study 15
CHAPTER 2 Theory and Numerical Methods 17
2-1 Establishing the Theoretical Model 17
2-1-1 Basic Assumptions 17
2-1-2 Governing Equations of the Flow Field 18
2-2 Numerical Methods 19
2-2-1 Navier-Stokes Equations 19
2-2-2 The Bernoulli equation 20
2-2-3 The Momentum Equations 21
2-2-4 The Continuity Equations 22
CHAPTER 3 Model Construction 23
3-1 Simulation Tools 23
3-2 Model Introduction 24
3-2-1 The Pumping Pipe Parameters 24
3-2-2 Geometric Model 26
3-3 Boundary Conditions and Physical Model Settings 27
3-3-1 Boundary Type 27
3-3-2 Boundary Condition Settings 28
3-4 Mesh Generation 29
3-4-1 Surface Feature 29
CHAPTER 4 Results and Discussion 32
4-1 Flow field and the particle moving path lines 32
4-2 Wake Analysis 34
4-2-1 Schematic diagram of the wake with different pressure and angle 34
4-2-2 Streamwise velocity 47
4-2-3 Gas flow backstream 49
4-2-4 Vortex intensity 50
CHAPTER 5 Conclusion 52
Reference 54
                                    

[1] A. A. Author and B. B. Author, "CFD numerical simulation of tornado wind field characteristics," *Kongqi Donglixue Xuebao/Acta Aerodynamica Sinica*, vol. 31, no. 3, pp. 350-356, 370, June 2013.
[2] Clancy, L.J. Aerodynamics. London: Pitman Publishing Limited. 1975
[3] Chorin, A. J., & Marsden, J. E. (1993). A Mathematical Introduction to Fluid Mechanics (3rd ed.). Springer-Verlag.
[4] Kundu, P. K., & Cohen, I. M. (2008). “Fluid Mechanics." Academic Press.
[5] Batchelor, G.K. An Introduction to Fluid Dynamics. Cambridge Univ. Press. 1967.
[6] Jeong, J., & Hussain, F. (1995). “On the identification of a vortex.” Journal of Fluid Mechanics, 285, 69-94.
[7] Aref, H., & Flinchem, E. P. (1984). “Dynamics of a Vortex Filament in a Shear Flow.” Journal of Fluid Mechanics, 148, 477-497.
[8] Chong, M. S., Perry, A. E., & Cantwell, B. J. (1990).“A general classification of three-dimensional flow fields." Physics of Fluids A: Fluid Dynamics, 2(5), 765-777.

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