目前微型幫浦已廣泛應用在生醫研究上。其中以壓電材料(PZT)為致動器的微型幫浦最適合發展高精準度控制的藥物輸送系統。在微幫浦製造過程中容易出現一些不良因素而使得微型幫浦在組裝上或操作上出現故障情形，而使得微型幫浦的效能降低。而在大量的微型幫浦中去找出有瑕疵的微型幫浦是很困難且耗時的，所以本研究提供一個方便且快速的方法來做檢測。在致動器組裝成微型幫浦前，透過電性分析的量測方式做快速檢測，將有問題的致動器排除掉，減少製作出有瑕疵的微型幫浦之機率。藉著錯誤分析這種方法我們不只可以很快地判斷出有瑕疵的微型幫浦而且還可以判斷故障的類型。

The research and development of microelectromechanical systems (MEMS) have been growth dramatically in the last 20 years. Interest in Micropump miniaturization has led to the development of bulk lead zirconate titanate (PZT) for actuators and MEMS. The PZT actuators are most likely to be applied in implementations for a portable micropump for medical drug delivery. A typical micropump is a MEMS device, which provides the actuation source to transfer the fluid from the drug reservoir to the body with precision, accuracy and reliability. Failure detection is a key ingredient in successful micropump process development, attainment of high production yields and assurance of long-term reliability. In this paper, we present the electrical analysis by using the modified Butterworth-Van Dyke (BVD) model for valveless peristaltic PZT micropump fabricating analysis. By observing the elements value of the characteristics such as Rx and C0 can detect the faults and classify the failure type easily. The failure analysis (FA) of micropump assembling process is focus on the common failures: (a) PZT cracked (b) Unevenly silver epoxy (c) PZT inversion. The analysis approach combining experiment with the circuit model is helpful to understand and PZT micropump fabricating reliability. It can help to detect the defect of the peristaltic PZT micropump and classify the failure type.

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