由於微機電製程技術穩定的發展，使得微流道晶片於近10年來快速的崛起。微流道晶片具有可微小型化、大量製造、與低成本等特性，相較於傳統的晶片裝置，可以運作的更有效率。
本論文提出微孔洞結構，用於微粒子捕捉以及阻抗量測。運用二氧化碳雷射及電鍍技術，實現可以捕捉直徑15 μm微粒子及阻抗量測的微孔洞量測結構。藉由電鍍的技術，在微孔洞兩側建構出雙層量測電極。此技術可以使下量測電極往孔洞處延伸沉積，除了用以提升量測的準確度之外，也可以縮小孔洞的下孔徑，有利於微粒子的捕捉。阻抗量測是一種可以用來區分且分析不同待測物電特性的技術。經實驗的結果，本研究研製出的微流道晶片，可區分出不同的溶液、成功地捕捉到微粒子，並量測出捕捉前後的阻抗差異。因此，本捕捉量測晶片未來可運用於生物醫學檢測上的應用。

With steady development of the processing techniques for Mi-cro-Electro-Mechanical System (MEMS), microfluidic chips have rapidly grown in the past 10 years. Microfluidic chips have the advantages of mass production, miniaturization, and low cost. Compared to conventional devices, these chips are more efficient to be operated.
This study presented the capability of particle trapping and impedance measurement with the microcavity configuration. Carbon dioxide (CO2) laser and electroplating techniques were used to fabricate the microcavity structure which can capture 15 μm particles and perform impedance measurement. Electroplating is used to fabricate two layers of measurement electrodes on the both sides of the microcavity. This method also can make bottom electrode spread into the microcavity to increase measurement accuracy and shrink the exit aperture to around 10 μm for particle trapping. Electrical impedance spectroscopy (EIS) technique was used to analyze the electrical properties of different objects under measurement. The experimental results show that this device can distinguish different solutions with different concentration, capture particles successfully, and tell apart the difference of impedance between particle and PBS solution. Therefore, this device might have the potential to be applied in biological detection in the future.

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