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研究生: 劉庭豪
Liu, Tin-Hao
論文名稱: 以微機電電阻式感測器實現之新生兒呼吸感測系統單晶片
Design of an Infant Respiration Detection System on a Single Chip by Use of a Micro-Cantilever Flow Sensor
指導教授: 魏嘉玲
Wei, Chia-Ling
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2011
畢業學年度: 99
語文別: 中文
論文頁數: 77
中文關鍵詞: 呼吸感測微積電電流式電橋切換式電容濾波器
外文關鍵詞: flow sensor, MEMS, cantilever, current-mode bridge, switched-capacitor filter
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  • 本論文設計了一套低成本的呼吸量測系統,利用積體電路設計的方式將感測系統晶片化,進而降低系統所需要的成本,當成本降低後可以普及到一般家庭中,藉由感測器的普及減少家中嬰幼兒猝死案件的發生,降低嬰幼兒的死亡率。
    此晶片選擇採用微機電結構之電阻式壓力感測器,採用TSMC 0.35um 2P4M 5V製程以及加上MEMS35後製程製作,並且使用了電流式電橋以及設計其後端訊號處理的CMOS積體電路,將感測器與其後端處理電路整合成一個完整的感測單晶片。
    系統利用呼吸氣流為輸入訊號,感測器受到壓力產生形變後每有1歐姆的改變量輸出會約有120mV的變化,量測結果顯示本晶片內的反贗波濾波器截止頻率為0.55 kHz,切換式電容濾波器的截止頻率為5.2Hz,電路耗能為4.8mW。藉由此晶片的量測證實確實可把此呼吸量測系統晶片化,達到縮小面積以降低成本的目標。

    A design of a low cost respiration detection chip is presented in this thesis. The whole system was integrated into a single chip, which could greatly reduce its cost. As a result, It is easier to popularize this breathing detection system, which can effectively prevent infants from the sudden infant death syndrome cases.
    A MEMS resistive sensor is used in this work. The chip was fabricated by using TSMC 0.35um 2P4M 5V CMOS process and 0.35um MEMS post-process. A current-mode bridge circuit, its corresponding signal processing circuits, and filters were designed by using CMOS integrated circuits. Finally, the MEMS sensor and the CMOS sensing circuits were integrated into one single chip.
    The input signal in this system is breathing air flow, and the sensor resistance changes with the breathing flow. In the proposed chip, each ohm change corresponds to 120-mV output signal variation. The measured cutoff frequency of the anti-aliasing filter is 0.55 kHz, the cutoff frequency of the switched-capacitor filter is 5.2 Hz, and the power consumption of this chip is 4.8mW.

    第一章 簡介 1 1.1 研究動機 1 1.2 論文架構 3 第二章 呼吸偵測相關介紹 4 2.1呼吸偵測的重要性及其應用 4 2.2常見的呼吸偵測儀器介紹 5 2.2.1 容積式檢測儀 5 2.2.2 胸阻抗法 7 2.2.3 壓力式流速儀 8 2.2.4 輪轉式流速儀 10 2.2.5 熱傳導式流速儀 11 2.2.6 超音波量測法 12 2.2.7 微機電壓力感測 13 第三章 電路設計 18 3.1主電路架構簡介 18 3.2微機電電阻式懸臂梁感測器 19 3.3電流式電橋 20 3.4 訊號處理電路 30 3.4.1 電流轉電壓轉換電路 30 3.4.2準位校正電路 31 3.4.3 二次放大電路 32 3.4.4 反贗波濾波器 33 3.4.5切換式電容低通濾波器 34 3.5整體系統規格介紹 37 第四章 模擬與佈局 39 4.1模擬結果 39 4.1.1電流式電橋 39 4.1.2電流轉電壓轉換電路 43 4.1.3準位校正電路 45 4.1.4 二次放大電路 47 4.1.5反贗波濾波器 48 4.1.5切換式電容濾波器 51 4.1.7預計規格列表 56 4.2 佈局 57 第五章 量測結果 59 5.1 量測考量 59 5.1.1電路板規劃 59 5.1.2所需儀器以及其架設方式 60 5.2 量測結果 61 5.2.1 反贗波濾波器 61 5.2.2 切換式電容濾波器 64 5.2.3 電橋電路 66 5.2.4 微機電電阻式懸臂梁感測器 69 5.2.5 全系統量測 72 5.2.6 量測總結 74 第六章 結論與未來展望 75 參考文獻 76

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