| 研究生: |
劉庭豪 Liu, Tin-Hao |
|---|---|
| 論文名稱: |
以微機電電阻式感測器實現之新生兒呼吸感測系統單晶片 Design of an Infant Respiration Detection System on a Single Chip by Use of a Micro-Cantilever Flow Sensor |
| 指導教授: |
魏嘉玲
Wei, Chia-Ling |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 電機工程學系 Department of Electrical Engineering |
| 論文出版年: | 2011 |
| 畢業學年度: | 99 |
| 語文別: | 中文 |
| 論文頁數: | 77 |
| 中文關鍵詞: | 呼吸感測 、微積電 、電流式電橋 、切換式電容濾波器 |
| 外文關鍵詞: | flow sensor, MEMS, cantilever, current-mode bridge, switched-capacitor filter |
| 相關次數: | 點閱:92 下載:1 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本論文設計了一套低成本的呼吸量測系統,利用積體電路設計的方式將感測系統晶片化,進而降低系統所需要的成本,當成本降低後可以普及到一般家庭中,藉由感測器的普及減少家中嬰幼兒猝死案件的發生,降低嬰幼兒的死亡率。
此晶片選擇採用微機電結構之電阻式壓力感測器,採用TSMC 0.35um 2P4M 5V製程以及加上MEMS35後製程製作,並且使用了電流式電橋以及設計其後端訊號處理的CMOS積體電路,將感測器與其後端處理電路整合成一個完整的感測單晶片。
系統利用呼吸氣流為輸入訊號,感測器受到壓力產生形變後每有1歐姆的改變量輸出會約有120mV的變化,量測結果顯示本晶片內的反贗波濾波器截止頻率為0.55 kHz,切換式電容濾波器的截止頻率為5.2Hz,電路耗能為4.8mW。藉由此晶片的量測證實確實可把此呼吸量測系統晶片化,達到縮小面積以降低成本的目標。
A design of a low cost respiration detection chip is presented in this thesis. The whole system was integrated into a single chip, which could greatly reduce its cost. As a result, It is easier to popularize this breathing detection system, which can effectively prevent infants from the sudden infant death syndrome cases.
A MEMS resistive sensor is used in this work. The chip was fabricated by using TSMC 0.35um 2P4M 5V CMOS process and 0.35um MEMS post-process. A current-mode bridge circuit, its corresponding signal processing circuits, and filters were designed by using CMOS integrated circuits. Finally, the MEMS sensor and the CMOS sensing circuits were integrated into one single chip.
The input signal in this system is breathing air flow, and the sensor resistance changes with the breathing flow. In the proposed chip, each ohm change corresponds to 120-mV output signal variation. The measured cutoff frequency of the anti-aliasing filter is 0.55 kHz, the cutoff frequency of the switched-capacitor filter is 5.2 Hz, and the power consumption of this chip is 4.8mW.
[1] J. G. Webster,” Measurements of the Respiratory
System”, Medical instrumentation, application and
design, ch.9,1998
[2] I.T. Tseng, “Design of an Infant Respiration Detection
Instrument by Use of a MEMS Piezo-Resistive Sensor,”
M.S. thesis, Dept. Electronic Engineering., National
Cheng Kung Univ., Tainan, Taiwan, R.O.C., 2008
[3] C. L. Wei, C. F. Lin, and I.T. Tseng, “A Novel MEMS
Respiratory Flow Sensor,” IEEE Sensors journal, vol.
10, no. 1, Jan. 2010
[4] M. Vegfors, H Ugnell, B. Hok, P.A. Oberg, and C.
Lennmarken, “Experimental evaluation of two new
sensors for respiratory rate monitoring,“
Physiological Measurement., vol. 14, no. 2, pp.
171-181, 1993.
[5] P. U. Chen, “A Study of Applying MEMS Pressure Sensors
in Wind Tunnel Experiment,” M.S. thesis, Dept.
Aeronaut. Astronaut., NationalCheng Kung Univ., Tainan,
Taiwan, R.O.C., 2002.
[6] R. Raiteri, M. Grattarola, H.J. Butt, and P. Skladal,
“Micromechanical cantilever-based biosensors,”
Sensors and Actuators B-Chem., vol. 79, pp. 115-126,
2001.
[7] M. N. S. Swamy, C. Bhusan, and B. B. Bhattacharya,
“Generalized duals, generalized inverses and their
applications,” Radio Electron. Eng, vol. 44, no. 2,
pp. 95–99, Feb. 1974.
[8] S. J. Azhari, H. Kaabi “ Azka cell, the Current Mode
Alternative of Wheastone Bridge,” IEEE transation on
circuits and systems, vol. 47, no. 9, Sept. 2000.
[9] Y. H. Ghallab and W. Badawy , “A New Design of a
Current-mode Wheatstone Bridge Using Operational
Floating Current Conveyor,” The 2006 International
Conference on MEMS, NANO and Smart Systems
[10] Willy M. C. Sansen, Analog Design Essentials, Springer-
Verlag, 2006
[11] D. A. Johns, Analog Integrated Circuit Design, J Wiley
and Sons, 1997
[12] D. Python and C. C. Enz., “An Antialiasig Filter
Using Complementary Mos Transconductors biased
in the triode region,” Proc. IEEE Int. Symp. Circuits
Syst., vol. 2, pp. 184-187, June 1999.
[13] W. Machowski, J. Jasielski, and S. Kuta, “Low Voltage
Low Frequency Continuous Time CMOS Antialiasing
Filters” Mixed Design of Integrated Circuits and
Systems, 2007. page(s): 641 - 644
[14] D. J. Comer, D. T. Comer, B. K. CASPER and J.
R.Gonzalez, “ An integrable ingle-pole lowpass filter
for low-frequency operation,” International Journal
of Electronics, 1997, vol.83, no.1, 49-54
[15] J. M. Stewart, M. S. Medow, L. D. Montgomery, June L.
Glover, and Mark M. Millonas, “Splanchnic hyperemia
and hypervolemia during Valsalva maneuver in postural
tachycardia syndrome ,” American Journal of
Physiology - Heart and Circulatory Physiology, vol.
289, no. 5, H1951-H1959, Nov. 2005
[16] Wikipedia:“Flow measurement” http://en.wikipedia.org
/wiki/Flow_measurement
[17] Wikipedia:“Sudden infant death syndrome”
http://en.wikipedia.org
/wiki/Sudden_infant_death_syndrome
[18] http://120.39.net/0710/9/134270.html 39健康網
[19]http://140.138.40.190/OptimalWeb/articlesystem/article
/compressedfile/(2000-05-05)% 20流量感測元件簡
介.aspx?ArchID=1120 流量感測元件簡介
[20] http://www.tbt2u.com.tw/uploadpic/files
/201103160817362.pdf 超音波流量計
校內:2016-08-22公開