本研究目的為開發適合於3.5 GHz濾波器所使用的陶瓷基板材料，選用的陶瓷材料為Mg(Ti_0.95 Zr_0.05 ) O_3並加以改良使其有更高Q×f 值之表現，以降低製作濾波器時能量的損耗。在透過加入適當比例的補償器材料 (Ca_0.8 Sr_0.2)TiO_3 ，使其複合材料"τ" _f值在 ±5 ppm/°C之間，以了解不同"τ" _f值對自製濾波器特性造成的實質影響。
分別採用MgO與Mg(〖OH)〗_2兩種不同程序製作 Mg(Ti_0.95 Zr_0.05 ) O_(3 )，利用固態燒結法持溫4小時的條件下製作，經由實驗結果發現由MgO程序製作的 Mg(Ti_0.95 Zr_0.05 ) O_(3 )(MTZ)最佳燒結溫度為1430℃、由Mg(〖OH)〗_2程序製作的 Mg(Ti_0.95 Zr_0.05 ) O_(3 )(MHTZ)最佳燒結溫度為1420℃，MTZ的 Q×f 值為248,400 GHz、MHTZ的 Q×f 值為333,800 GHz，可以發現MHTZ的 Q×f 值相較於MTZ的上升34%，這是因為與MTZ相比MHTZ不會有MgTi_2 O_5、Mg_2 TiO_4 等二次相的產生，並透過XRD量測而證實，不過MHTZ的〖 ε〗_r降低為14.82，τ_f 值則和MTZ一樣，維持在約-50 ppm/℃。將MHTZ和(Ca_0.8 Sr_0.2 )TiO_3 摻雜，進行"τ" _f值調整，實驗結果顯示在燒結溫度為1420℃ 且MHTZ與(Ca_0.8 Sr_0.2 )TiO_3的莫耳比例為0.95:0.05時，將可以得到τ_f值為2.26 ppm/℃的結果，但 Q×f 值為118,000 GHz，而〖 ε〗_r 略升至16.84。最後以Al_2 O_3、MTZ、MHTZ、0.95MHTZ-0.05CST設計及製作中心頻率為3.5 GHz之基板帶通濾波器，經由量測結果發現MHTZ基板有最好的濾波器特性，而由在不同溫度量測結果發現，四種濾波器其τ_f值在-60 ppm/℃~2.26 ppm/℃之間，但是都不會造成濾波器訊號的飄移，所以在3.5 GHz 下製作帶通濾波器以MHTZ是一個最佳的微波陶瓷基板材料。

In this thesis, there are two purposes to be discussed. First purpose is improving the microwave dielectric ceramic material, Mg(Ti_095 Zr_0.05 ) O_3, to make a higher Q×f value performance and the second is adjusting "τ" _f to make 3.5GHz substrate filters. Mg(Ti_095 Zr_0.05 ) O_3 is made from Mg〖(OH)〗_2and MgO formation by solid method, respectively. The best microwave dielectric properties of MHTZ through Mg〖(OH)〗_2 formation are 〖 ε〗_r of 14.82, Q×fof333,800 GHz and"τ" _f of-50.73 ppm/℃, while which of MTZ through MgO formation are 〖 ε〗_r of 17.93, Q×f of 248,400 GHz and "τ" _f of-48.96 ppm/℃. The Q×f value of MHTZ is 34% higher than that of MTZ because no second phases in MHTZ, which was also verified by using XRD. However, Q×f values decreased as we lowered 〖 τ〗_f. For example, if 0.05(Ca_0.8 Sr_0.2 )TiO_3(CST) was added for the mixing, "τ" _f would be 2.26 ppm/℃ and Q×f value dropped from 333,800 GHz to 118,000 GHz. To examine whether〖 τ〗_f would affect filter operation, the characteristics of filters on substrates of Al2O3, MTZ, MHTZ and 0.95MHTZ-0.05CST were measuredat 20℃ and 80℃ . The results showed that no obvious change on the characteristics of filters even on the substrate with 〖" τ" 〗_f=-60 ppm/℃. Therefore, there is no need to trade-off between Q×f and "τ" _f. The ceramic substrate material with the highest Q×f value will be the favorable one for filter applications. From this study, it is MHTZ on which the filter had the characteristics of f0 at 3.49 GHz, S11 about 13.68 dB, S21 about 0.72 dB and the bandwidth ratio of 4.01%.

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