相變型光碟以紀錄材料的結晶態與非結晶態間的轉換來做為紀錄資訊的方法，而讀取訊號是利用紀錄材料的結晶態與非結晶態之間的反射率差異。因化學計量比(Stoichiometric compound）合金系統，其擦拭（結晶）時間只有30 ns。而碲基的共晶合金（Te-based alloy）有極易非晶化、合適的光學特性及適當的熔點。因此，我們選擇具有潛力的InTe合金系作為研究材料。

本研究利用真空共蒸鍍之方式製備In2Te3合金記錄薄膜。接著分別在不同操作條件下進行N2氣氛熱處理實驗以及半導體雷射掃描實驗，藉以探討熱處理溫度與時間對薄膜結晶情形的影響以及雷射參數（掃描速度與功率）對薄膜溶解情形及結構的影響。以及量測反射率隨波長變化情形及複合折射率n、 k值。此外，也利用微分熱差掃瞄分析（DSC）來瞭解此材料的結晶溫度。實驗結果及電子顯微鏡表面觀察顯示經熱處理後，薄膜均會產生相變化（從非晶態轉為結晶態），不同熱處理溫度造成不同的結晶面。由光學顯微鏡及電子顯微鏡的照片顯示，薄膜在經雷射掃描後可產生熔解流動，並因表面張力作用而有液滴凝集現象。愈大的功率與愈低的掃描速度速造成熔解寬度與深度也愈大。另外，由DSC所量測之薄膜結晶溫度約為225℃，因此，材料在一般使用溫度下非晶態有足夠的熱穩定性。

在光碟熱傳模擬方面則是利用有限元素法來解碟片的溫度分佈。模擬結果顯示，此碟片在CD(λ=780nm)及DVD(λ=650nm)系統下，具有高紀錄速度的潛力。同時記錄層最高溫度與熔解寬度對雷射功率呈現接近線性增加的關係，而對掃描速度則為線性減小關係；加熱、冷卻速率與掃描速度呈現線性關係，雷射功率對加熱、冷卻速率影響不大。記錄層熔解寬度與雷射參數群（P1Vx-0.25）呈現線性關係。

In rewritable phase-change optical recording media, the data are recorded based on amorphization and crystallization of the phase change material. Information can be read out as change in reflectance. Stoichiometric compound alloy materials, which have fast crystallization rate, were the most popular phase-change recording medium to date. Another chalcogenide material, InTe eutectic alloy, was considered to have a great potential to be a better phase-change optical recording media because that Te-based alloy has easy amorphization, suitable optical characteristics and the sufficiently low melting point.

In the present study, In2Te3 alloy film was prepared by vacuum co-deposition, following by a heat-treatment at N2 atmosphere and the scanning of a diode laser. The XRD results show that the phase of In2Te3 alloy film changes from amorphous state to crystalline state after heat-treatment. Furthermore, different crystalline orientations were observed after heat-treatment at different temperature, and SEM images prove the presence of crystalline morphology of In2Te3 film after heat-treatment. From the OM images and SEM images, one observed that after the In2Te3 film scanned by a diode laser, there are morphology changes, surface melting or/and flow of the molten film. A wilder and deeper melt zone of film is observed when the film was scanned by a laser at higher power or lower speed .The complex refractive indices and reflectivity of amorphous and crystalline recording films were measured. The crystallization temperature of In2Te3 alloy material is measured by DSC, and is determined to be about 225℃. The crystallization temperature is sufficiently high for thermal stablility.

The finite element method was applied to solve for the 3 dimensional temperature profile of the disc. The results indicate that data can be recorded on the disc at very high scanning speed either in CD system(λ=780nm)or DVD system(λ=640nm). The recorded-mark size as well as peak temperature of recording film were proportional to laser power, but inversely proportional to scanning speed, the heating rate and the cooling rate was proportional to scanning speed. The recorded-mark size was proportional to the parameter group (P1Vx-0.25).

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