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研究生： 蔡家逢
Tasi, Chia-Feng
論文名稱： x(Mg0.95Zn0.05)TiO3-(1-x)Ca0.6Nd0.8/3TiO3陶瓷介電特性改善及微波元件之應用
Improved Dielectric Properties of xMg0.95Zn0.05TiO3-(1-x)Ca0.6Nd0.8/3TiO3 Ceramics and Application of Microwave Devices
指導教授： 黃正亮
Huang, Cheng-Liang
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年： 2006
畢業學年度： 94
語文別： 中文
論文頁數： 87
中文關鍵詞： 介電陶瓷 、微波介電
外文關鍵詞： dielectric creamic, micowave dielectric
相關次數： 點閱：75  下載：2 
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    • 本論文中將討論x(Mg0.95Zn0.05)TiO3-(1-x)Ca0.6Nd0.8/3TiO3系統以0.8Mg0.95Zn0.05TiO3-0.2Ca0.6Nd0.8/3TiO3摻雜不同含量V2O5、B2O3燒結促進劑之微波介電特性及微結構。由實驗發現，
    x(Mg0.95Zn0.05)TiO3-(1-x)Ca0.6Nd0.8/3TiO3系統調整適合的x值，可以使其頻率溫度漂移係數降至趨近於零，除此之外，燒結溫度也較(Mg0.95Zn0.05)TiO3為低；適量的燒結促進劑V2O5、B2O3，亦能有效的降低
    0.8(Mg0.95Zn0.05)TiO3-0.2Ca0.6Nd0.8/3TiO3的燒結溫度。

    The microwave dielectric properties and the microstructures of the x(Mg0.95Zn0.05)TiO3-(1-x)Ca0.6Nd0.8/3TiO3 system and 0.8(Mg0.95Zn0.05)TiO3-0.2Ca0.6Nd0.8/3TiO3 adding different amount of sintering aids V2O5,B2O3 have been discussed in this paper. The results show that　appropriately adjusting the x value ，zero τf value can be obtained in the x(Mg0.95Zn0.05)TiO3-(1-x)Ca0.6Nd0.8/3TiO3 system，and the sintering temperature would be lower than pure(Mg0.95Zn0.05)TiO3 ceramics.Adding sintering aids V2O5,B2O3 can also lower the sintering temperature of 0.8Mg0.95Zn0.05TiO3-0.2Ca0.6Nd0.8/3TiO3.
    A bandpass filter of center frequency at 4GHz have been designed in this paper,and based on a new type of slotted microstrip resonator, with FR4、Al2O3、and 0.8(Mg0.95Zn0.05)TiO3-0.2Ca0.6Nd0.8/3TiO3+1wt% V2O5 substrates. And we compared the result of the simulation with the result of the measurement of the performance.

    目錄 第一章　緒論..................................................................1 1-1 前言 .....................................................................1 1-2 研究目的.................................................................1 第二章　介電材料原理..........................................................2 2-1 介電材料的微波電性需求...........................................2 2-2 介電理論.........................................................2 　　　　2-3 介電共振器原理...................................................4 2-4 鈦鐵礦與鈣鈦礦之結構.............................................5 2-4-1 鈦鐵礦之結構...................................................5 2-4-2 鈣鈦礦之結構...................................................6 2-5 燒結理論.................................................................8 2-5-1 液相燒結...............................................................9 第三章　濾波器電路原理.......................................................10 3-1 集總元件濾波器簡介..............................................10 3-2 步階阻抗共振器(SIR)與均勻阻抗共振器(UIR)比較....................11 3-3 共振腔特性分析..................................................12 3-4 共振腔Qsi值計算.................................................13 3-5 微帶線各項公式與考量............................................16 3-5-1 微帶線各項參數公式計算........................................16 3-5-2 微帶線各項考量................................................19 第四章　實驗程序.............................................................23 4-1 微波介電材料的製備......................................................23 4-1-1 x(Mg0.95Zn0.05)TiO3-(1-x)Ca0.6Nd0.8/3TiO3之製程.......................23 4-1-2 0.8(Mg0.95Zn0.05)TiO3-0.2Ca0.6Nd0.8/3TiO3添加燒結促進劑之製程.........24 4-2 微波特性的量測與特性分析................................................24 4-2-1 微波特性之量測........................................................24 4-2-1-1 介電係數之量測......................................................25 4-2-1-2 Qd值之測量..........................................................26 4-2-1-3 頻率溫度係數之測量..................................................28 4-2-2 X-Ray分析.............................................................29 4-2-3 掃瞄式電子顯微鏡分析..................................................29 4-2-4 密度之量測............................................................30 4-3 濾波器的製作與量測......................................................30 4-3-1 濾波器的規格..........................................................30 4-3-2 濾波器的設計..........................................................31 4-3-3 濾波器的實作..........................................................32 4-3-4 濾波器特性量測........................................................32 第五章　實驗結果與討論.......................................................33 5-1 x(Mg0.95Zn0.05)TiO3-(1-x)Ca0.6Nd0.8/3TiO3陶瓷介電特性探討...............33 5-2 0.8(Mg0.95Zn0.05)TiO3-0.2Ca0.6Nd0.8/3TiO3添加燒結促進劑V2O5.............34 5-3 0.8(Mg0.95Zn0.05)TiO3-0.2Ca0.6Nd0.8/3TiO3添加燒結促進劑B2O3.............36 5-4 濾波器特性探討..........................................................37 第六章　結論.................................................................41 參考文獻.....................................................................43 圖目錄 圖2-1 四種極化機構之示意圖..................................................46 圖2-2 極化頻率分佈圖........................................................46 圖2-3 電磁波由介質1(ε1,μ1)入射到介質2(ε2,μ2)...............................47 圖2-4 電磁波入射介電陶瓷關係圖..............................................47 圖2-5 鈦鐵礦結構............................................................48 圖2-6 鈣鈦礦結構............................................................48 圖2-7 週期表上適合鈣鈦礦結構之元素..........................................49 圖3-1 三種濾波器的低通原型圖 (a) Butterworth Filter (b) Chebyshev Filter (c) Elliptic Function Filter............................50 圖3-2 SIR的基本結構.........................................................51 圖3-3 SIR阻抗比對電器長度影響...............................................51 圖3-4 UIR與SIR..............................................................51 圖3-5 溝槽式共振腔..........................................................52 圖3-6 計算共振頻的等效電路圖................................................52 圖3-7 奇模共振的等效電路圖..................................................52 圖3-8 偶模共振的等效電路圖..................................................53 圖3-9 溝槽式共振腔共振頻與結構參數的關係圖..................................53 圖3-10 饋入點在高阻抗區的共振腔電路圖.......................................54 圖3-11 饋入點在高阻抗區的共振腔等效示意圖...................................54 圖3-12 饋入點在高阻抗區的共振腔等效ABCD參數圖...............................55 圖3-13 溝槽式共振腔饋入點位置與品質常數關係圖...............................55 圖3-14 步階阻抗不連續處之示意圖（a）實際結構（b）等效電路...................56 圖3-15 微帶線開路端效應（a）微帶線開路端圖(b）等效邊緣電容之等效電路圖 　　　　（c）等效延伸傳輸線....................................................56 圖3-16 直角彎折效應之結構圖與等效電路圖.....................................56 圖4-1 實驗流程圖............................................................57 圖4-2 (a)測量介電常數系統圖(b)測量品質因數值系統圖..........................58 圖4-3 介質儀及同軸線耦合電路................................................59 圖4-4 濾波器佈局圖..........................................................59 圖5-1(a) 0.7MZT-0.3CNdT X-Ray圖.............................................60 圖5-1(b) 0.8MZT-0.2CNdT X-Ray圖.............................................60 圖5-1(c) 0.85MZT-0.15CNdT X-Ray圖...........................................61 圖5-1(d) 0.9MZT-0.1CNdT X-Ray圖.............................................61 圖5-2(a) 0.7MZT-0.3CNdT不同燒結溫度之SEM圖..................................62 圖5-2(b) 0.8MZT-0.2CNdT不同燒結溫度之SEM圖..................................63 圖5-2(c) 0.85MZT-0.15CNdT不同燒結溫度之SEM圖................................64 圖5-2(d) 0.9MZT-0.1CNdT不同燒結溫度之SEM圖..................................65 圖5-3 xMZT-(1-x)CNdT視密度與燒結溫度關係圖..................................66 圖5-4 xMZT-(1-x)CNdT介電常數與燒結溫度關係圖................................66 圖5-5 xMZT-(1-x)CNdT品質因數與與燒結溫度關係圖..............................67 圖5-6 xMZT-(1-x)CNdT共振頻率溫度飄移係數與燒結溫度關係圖....................67 圖5-7(a) 添加0.5 wt% V2O5 的X-Ray圖.........................................68 圖5-7(b) 添加1 wt% V2O5 的X-Ray圖...........................................68 圖5-7(c) 添加2 wt% V2O5 的X-Ray圖...........................................69 圖5-7(d) 添加4 wt% V2O5 的X-Ray圖...........................................69 圖5-8(a) 添加0.5 wt% V2O5不同燒結溫度之SEM圖................................70 圖5-8(b) 添加1 wt% V2O5不同燒結溫度之SEM圖..................................71 圖5-8(c) 添加2 wt% V2O5不同燒結溫度之SEM圖..................................72 圖5-8(d) 添加4 wt% V2O5不同燒結溫度之SEM圖..................................73 圖5-9 添加不同量V2O5之視密度與燒結溫度關係..................................74 圖5-10 添加不同量V2O5之介電常數與燒結溫度關係圖.............................74 圖5-11 添加不同量V2O5的之品質因數與燒結溫度關係圖...........................75 圖5-12 添加不同量V2O5之共振頻率溫度飄移係數與燒結溫度關係圖.................75 圖5-13(a) 添加0.5 wt% B2O3 的X-Ray圖........................................76 圖5-13(b) 添加1 wt% B2O3 的X-Ray圖..........................................76 圖5-13(c) 添加2 wt% B2O3 的X-Ray圖..........................................77 圖5-13(d) 添加4 wt% B2O3 的X-Ray圖..........................................77 圖5-14(a) 添加0.5 wt% B2O3不同燒結溫度之SEM圖...............................78 圖5-14(b) 添加1 wt% B2O3不同燒結溫度之SEM圖.................................79 圖5-14(c) 添加2 wt% B2O3不同燒結溫度之SEM圖.................................80 圖5-14(d) 添加4 wt% B2O3不同燒結溫度之SEM圖.................................81 圖5-15 添加不同量B2O3之視密度與燒結溫度關係.................................82 圖5-16 添加不同量B2O3之介電常數與燒結溫度關係圖.............................82 圖5-17 添加不同量B2O3的之品質因數與燒結溫度關係圖...........................83 圖5-18 添加不同量B2O3之共振頻率溫度飄移係數與燒結溫度關係圖.................83 圖5-19 FR4基板之模擬圖......................................................84 圖5-20 FR4基板之實際量測圖..................................................84 圖5-21 Al2O3基板之模擬圖....................................................85 圖5-22 Al2O3基板之實際量測圖................................................85 圖5-23 0.8MZT+0.2CNdT基板之模擬圖...........................................86 圖5-24 0.8MZT+0.2CNdT基板之實際量測圖.......................................86 圖5-25 實作基板照片(a)FR4(b) Al2O3 (c) 0.8MZT+0.2CNdT.......................87

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