本文研究奈米壓印製程中，省略旋轉塗佈程序，在同一機台上利用石英板及玻璃基板位移將高分子材料壓印成薄膜的方法。以ABAQUS軟體建立有限元素數值模型探討此薄膜壓印成形過程中，石英板及玻璃基板位移控制對彈性模具變形的影響，及與高分子材料接觸產生之壓力和變形結果。分析模型分為軸對稱拉格朗日(Lagrangian)模型及三維耦合尤拉-拉格朗日(CEL)模型。前者探討在無高分子材料的狀態下，石英板與玻璃基板之位移控制對彈性模具變形及接觸壓力的影響。後者探討薄膜壓印成形過程，同時討論由石英板位移調整之彈性模具初始曲率，高分子材料初始厚度與分布半徑及材料性質，對結果的影響。數值結果顯示，當石英板與玻璃基板所在位置固定時，模具接觸壓力與位移方式無關。在石英板位置相同的情況下，高分子材料的介入將使其載重降低，但隨著高分子材料厚度變薄使模具接觸壓力增加，越接近無高分子材料之軸對稱模型數值結果。

This thesis studies a method of directly imprinting the polymeric material into a film by using the movement of the quartz and the glass substrate, and omitting the spin-coating process. The finite element analyses were carried out in ABAQUS to investigate the displacement control of the quartz and the glass substrate during the process of film formation, and the influence on the deformation of elastic mold, the resulting contact pressure and the deformation of polymeric material. The analyses were done by the axisymmetric model using the Lagrangian method, and the three-dimensional model utilizing the Coupled-Eulerian-Lagrangian (CEL) method respectively. The former mainly investigates the contact of the elastic mold controlled by the quartz and the substrate, neglecting the existence of polymeric materials. The latter probes the film formation of polymeric materials. The influence of the initial curvature of elastic mold controlled by the quartz, and the effects of the initial thickness, the radius and the properties of polymeric materials are also discussed. Referring the same positions of the quartz and glass substrate, the contact pressure of the elastic mold is independent of the moving method. The contact pressure of the elastic mold increases as the thickness of the polymeric material decreases. When the positions of the quartz are identical in the two models, the existence of polymeric materials would reduce the loads of the quartz. When the thickness of the polymeric material decreases, the discrepancies of the loads would reduce.

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