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研究生: 郭燿綸
Guo, Yao-Lun
論文名稱: 一種利用半金屬形成MoTe2電晶體歐姆接觸的新穎方式
A novel formation of ohmic contact for MoTe2 Transistor with semi-metal
指導教授: 李文熙
Lee, Wen-Hsi
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2023
畢業學年度: 111
語文別: 中文
論文頁數: 82
中文關鍵詞: 二碲化鉬相位工程高壓退火歐姆接觸
外文關鍵詞: MoTe2, Phase engineering, High pressure anealing, Ohmic contact
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  • 摘要 I Abstract II 誌謝 XIII 表目錄 XVI 圖目錄 XVII 第一章 緒論 1 1-1研究背景 1 1-2研究動機 3 第二章 文獻回顧 4 2-1 二維材料介紹 4 2-1-1 二維材料簡介 4 2-1-2 過渡金屬氧族硫化物介紹 5 2-1-2-1 二硫化鉬 5 2-1-2-2 二碲化鎢 6 2-1-2-3 二碲化鉬 7 2-2二維材料的合成 8 2-3二維材料的挑戰 9 2-3-1歐姆接觸 9 2-4二維材料歐姆接觸工程 12 2-4-1能帶匹配 12 2-4-2摻雜 14 2-4-3相位工程 15 2-4-4異相同質接觸 17 第三章 製程以及量測設備 20 3-1 製程機台設備 20 3-1-1磁控濺鍍機 20 3-1-2高壓退火 22 3-1-3化學氣象沉積 23 3-2 量測設備 24 3-2-1光學顯微鏡 24 3-2-2拉曼微光光譜儀 25 3-2-3穿透式電子顯微鏡 26 3-2-3半導體電性量測系統 27 3-3 電性分析方式 28 3-3-1 電子電洞遷移率 28 3-3-2 接觸阻抗(Transfer length method) 29 第四章 實驗手法以及步驟 31 4-1實驗流程卡通圖 31 4-2 1T’ MoTe2 contact FET實驗細節與方法 35 第五章 結果討論與分析 38 5-1 MoTe2品質、相位控制與高壓退火前處理之分析 38 5-2 鎢薄膜高壓退火前處理之分析 49 5-3 高壓退火下MoTe2 鎢薄膜相位控制結果與討論 53 5-4 高壓退火持壓時間結果與討論 60 5-5 MoTe2共平面同質異相元件製作與相位分析 66 5-6 1T’ MoTe2 Contact元件與Pt contact元件電性分析 72 第六章 結論 78 第七章 未來展望 78 第八章 參考文獻 79

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