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研究生：	趙偉翔 Chao, Wei-Hsiang
論文名稱：	(Ba,Ca)(Ti,Sn,Hf)O3摻雜MnO2無鉛壓電陶瓷與應用於壓電超音波馬達之研究 The Study of MnO2-Doped (Ba,Ca)(Ti,Sn,Hf)O3 Lead-Free Ceramics and Their Applications on the Piezoelectric Ultrasonic Motors
指導教授：	朱聖緣 Chu, Sheng-Yuan
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 電機工程學系 Department of Electrical Engineering
論文出版年：	2017
畢業學年度：	105
語文別：	中文
論文頁數：	140
中文關鍵詞：	無鉛壓電陶瓷、助燒劑、氧空缺、超音波馬達、胰島素針筒
外文關鍵詞：	lead-free piezoelectric ceramics, sintering aid, ultrasonic motor, insulin syringes
相關次數：	點閱：128 下載：6
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本研究主要在開發無鉛壓電陶瓷(Ba,Ca)(Ti,Sn)O3 (BCTS)，首先先進行(Ba1-xCax)(Ti1-ySny)O3 (x = 0.02-0.04, y = 0.04-0.06)最佳化邊界的尋找，結果發現，(Ba0.97Ca0.03)(Ti0.96Sn0.04)O3會比BCTS的文獻有著非常高的TC = 97 oC和優異的壓電特性d33 = 415 pC/N與共振阻抗值Z = 17Ω。緊接著針對材料的改制分為兩階段，第一階段為B-site化合物置換改制(Ba0.97Ca0.03)(Ti0.96Sn0.04-zHfz)O3 (BCTS0.04-zHz)，結果發現當z = 0.035會有相對較高的Tc = 112 oC和不錯的壓電特性分別為kp = 49 %、kt = 45.7%、Qm = 122.4與d33 = 313 pC/N，更重要的是有相對穩定的變溫共振頻率變化率。第二階段為添加助燒劑改制(Ba0.97Ca0.03)(Ti0.96Sn0.005Hf0.035)O3 + a mole% MnO2 (BCTSH–a Mn)，結果發現當a = 2會有不低的TC = 113 oC，與不差的壓電特性分別為kp = 36.4%、kt = 36.0%與d33 = 230 pC/N，更重要的是有效的細化晶粒約22.59 μm與明顯提升氧空缺(Ea = 1.4460 eV)和Qm = 340.8。
在一系列的研究中找出最佳特性之陶瓷體後，將具有高d33與Qm的BCTSH+2Mn陶瓷應用於製作超音波馬達並探討壓電參數對馬達輸出性能的影響，其無鉛壓電馬達相關輸出性能:左推速=3.21 mm/s,、右推速=3.39 mm/s、上推速=2.56 mm/s與推力>2 N。最後成功地去推動已商業化醫療規格0.5 ml的胰島素針筒。

In this study, the development of lead-free (Ba,Ca)(Ti,Sn)O3 (BCTS) piezoelectric ceramics are carried out by conventional solid state reaction method. Firstly, we search the optimum boundary for (Ba1-xCax)(Ti1-ySny)O3 (x = 0.02-0.04, y = 0.04-0.06), we obtain (Ba0.97Ca0.03)(Ti0.96Sn0.04) has the greater TC = 97 oC, superior d33 = 415 pC/N and then using double-stages to modify our material. First stage, substituting Hf for Sn in the (Ba0.97Ca0.03)(Ti0.96Sn0.04-zHfz)O3 (BCTS0.04-zHz), revealing relatively higher TC = 113 oC and excellent piezoelectric properties kp = 49 %、kt = 45.7 %, Qm = 122.4 and d33 = 313 pC/N with z = 0.035, the most important thing is to improve the change rate of resonant frequency with increasing temperature. Second stage, dopig sintering aid a mole% MnO2 in the (Ba0.97Ca0.03)(Ti0.96Sn0.005Hf0.035)O3 (BCTSH–a Mn), revealing TC = 113 oC and kp = 36.4 %, kt = 36.0% and d33 = 230 pC/N with a = 2, the most noticeable thing is to refine grain size 22.59 μm efficiently and increase Qm = 340.8 obviously.
Based on the material properties of ceramics above, the lead-free ceramics BCTSH+2Mn piezoelectric ceramics with high d33 and Qm values are choosen for fabrication of ultrasonic motor and investigate mechanism between d33, Qm and motor’s output characteristics, the output characteristics of lead-free piezoelectric motor : left-pull velocity = 3.21 mm/s、right-pull velocity = 3.39 mm/s、up-pull velocity = 2.56 mm/s and force > 2N. Eventually, our lead-free piezoelectric motor can pull 0.5 ml commercial insulin syringes successfully.

摘要	II
Captions	XII
CONCLUSIONS	XXII
誌謝	XXIII
目錄	XXIV
表目錄	XXIX
圖目錄	XXXII
第1章	緒論	1
1	研究背景與動機	1
2	論文架構	5
第2章	基礎理論與文獻回顧	6
1	壓電材料	6
1.1	正壓電效應	7
1.2	逆壓電效應	8
1.3	壓電諧振體	8
1.4	壓電多晶體	10
2	壓電晶域結構	11
2.1	晶體壓電之根源	11
2.2	容忍因子	14
2.3	晶格與晶系	16
3	介電理論	17
3.1	介電原理	17
3.2	介電損耗	18
4	鐵電效應	19
4.1	電滯曲線	20
5	無鉛壓電材料	21
6	BCTS文獻回顧	24
6.1	BCTS之相轉變	24
6.2	在BCTZ/S的A-site和B-site使用置換物做取代進而提升壓電特性	25
6.3	加入燒結促進劑降低BCTS的燒結溫度	26
7	依驅動電壓波形不同分類馬達	28
8	超音波馬達	30
8.1	超音波馬達發展歷史	30
8.2	超音波馬達振動模態	31
8.3	超音波馬達驅動種類	33
8.4	螺桿式超音波馬達	34
第3章	實驗製程與量測	38
1	壓電陶瓷體的製作	38
1.1	陶瓷粉末的製備	38
1.2	陶瓷體的製造	38
2	陶瓷體特性分析與量測	40
2.1	密度	40
2.2	XRD	40
2.3	SEM	41
2.4	電性量測	42
2.5	相轉變點量測	49
2.6	壓電溫度穩定性	50
3	超音波馬達的設計	50
3.1	螺桿式超音波馬達	50
3.2	線性超音波馬達性能量測系統	53
4	計算超音波馬達相關輸出性能參數之公式介紹	54
4.1	超音波馬達的驅動頻率	55
4.2	超音波馬達輸出速度的計算	55
4.3	超音波馬達輸出推力與輸出功率的量測	55
第4章	材料部份實驗結果與討論	57
1	尋找低邊界BCTS最佳壓電特性	57
2	(Ba1-xCax)(Ti1-ySny)O3	59
2.1	實驗分析流程介紹	59
2.2	XRD、SEM與密度分析	60
2.3	壓電特性與變溫介電常數分析	74
2.4	溫度穩定性分析	83
2.5	小結	84
3	(Ba0.97Ca0.03)(Ti0.96Sn0.04-zHfz)O3	86
3.1	XRD、SEM與變溫介電常數分析	86
3.2	壓電特性和鐵電量測分析	94
3.3	溫度穩定性分析	98
3.4	小結	101
4	(Ba0.97Ca0.03)(Ti0.96Sn0.005Hf0.035)O3 + a mol% MnO2	103
4.1	XRD與SEM分析	103
4.2	變溫介電常數、阻抗頻譜與鐵電量測分析	110
4.3	溫度穩定性分析	115
4.4	小結	117
第5章	元件部份實驗結果與討論	119
1	含鉛壓電材料PZT-4製作超音波馬達	119
1.1	含鉛壓電馬達的驅動頻率	119
1.2	PZT-4超音波馬達輸出速度、推力與輸出功率	120
2	無鉛壓電材料製作超音波馬達	124
2.1	無鉛壓電馬達的驅動頻率	124
2.2	無鉛壓電馬達輸出速度、推力與輸出功率	125
2.3	無鉛壓電馬達推動醫療規格胰島素針筒	130
第6章	結論與未來展望	132
1	結論	132
2	未來展望	134
參考文獻	135


                                    

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