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研究生: 陳郁仁
Chen, Yu-Jen
論文名稱: 層狀聲波波傳理論之分析及其在液體感測器上之應用
An Analysis of Acoustic Wave Propagation in Layer Structure and its Application on Liquid Sensors
指導教授: 朱聖緣
Chu, Sheng-Yuan
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2004
畢業學年度: 92
語文別: 中文
論文頁數: 75
中文關鍵詞: 液體感測器拉福波
外文關鍵詞: liquid sensors, love wave
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  •   拉福波是在彈性體上成長一波導層,以水平剪向波的傳遞方式。其傳遞時大部分的能量皆集中在波導層附近,因此其波傳特性不僅和聲波所在介質有關,也受彈性體表面及波導層邊界條件影響。拉福波液體感測器即是利用此原理,藉由分析液體負載對波速、波傳衰減常數等波傳特性造成的變化來求得未知液體的各項特性參數。
      本論文針對石英(Quartz)、鈮酸鋰(LiNbO3)及鉭酸鋰(LiTaO3)等常用單晶壓電材料的拉福波波傳特性進行探討,將理論推導以數值分析方法配合電腦程式的撰寫求得各材料在不同波導層、不同傳播方向時聲波之波速、機電耦合常數;進一步並探討液體負載的導電度及黏滯度等參數對表面聲波波傳特性的影響。
      最後比對別人的實驗結果,以證明程式的可靠性,建立起簡單的拉福波理論基礎。

      Love wave with pure shear-horizontal(SH) waveguide mode, in the presence of a guiding layer, is a wave that propagates with its energy concentrated in the guiding layer. Therefore, the propagation characteristics of the acoustic wave depends not only on the transmission media but the boundary condition of elastic surface and guiding layer. By detecting the variations of phase velocity and propagation attenuation constant, a Love wave sensor can be realized. And further, we can obtain the acousto-electric parameters of the unknown liquid by analyzing the relationship between these parameters and Love wave propagation characteristics.
      In this dissertation, the propagation characteristics of Love wave in the piezoelectric single crystal substrates with different guiding layer and various propagation directions such as Quartz, LiNbO3 and LiTaO3 are completely discussed. First of all, wave propagation theory and numerical analysis techniques are applied to obtain the phase velocity, electromechanical coupling factor and attenuation constant. Then, the changes of wave propagation characteristics due to relative conductivity, and viscosity of the liquid loaded on the Love wave sensor are also discussed.
      Finally ,we compared our simulation results with the experimental results and successfully established a simple simulation system of Love wave sensor.

    目 錄 中文摘要…………………………………………………………………I 英文摘要…………………………………………………………………III 誌謝………………………………………………………………………V 圖表目錄…………………………………………………………………VI 符號說明..………………………………………………………………IX 第一章 緒論 ………………………………………………………………1 第二章 表面聲波波傳理論 ………………………………………………3 2.1 壓電特性………………………………………………………………3 2.1.1 正逆壓電效應……………………………………………3 2.1.2 壓電材料及其應用………………………………………4 2.2 叉指換能器(IDT) ……………………………………………………5 2.3 表面聲波波傳理論……………………………………………………6 2.3.1 Christoffel’s 波動方程式 …………………………6 2.3.2 座標系統及座標轉換……………………………………8 2.3.3 無負載下基板與波導層拉福波波動方程式之解及其邊界條件……………………………………………………………………………10 2.3.4 液體負載與波導層間之拉福波波動方程式之解及其邊界條件……………………………………………………………………………15 第三章 程式模擬結果與討論 ……………………………………………19 3.1 未加液體負載之拉福波波傳特性……………………………………19 3.2 液體負載之聲電係數對拉福波波傳特性的影響……………………22 第四章 結論 ………………………………………………………………23 參考文獻……………………………………………………………………25 附表與附圖…………………………………………………………………28

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