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研究生: 許宏賓
Hsu, Hung-Pin
論文名稱: 半導體創新生態系建構之探討 - 以ASML公司為例
A Study on Framing a Semiconductor Innovation Ecosystem - Case of ASML Holding N.V.
指導教授: 陳澤生
Chen, Tse-Sheng
學位類別: 碩士
Master
系所名稱: 工學院 - 工程管理碩士在職專班
Engineering Management Graduate Program(on-the-job class)
論文出版年: 2023
畢業學年度: 111
語文別: 中文
論文頁數: 78
中文關鍵詞: 創新生態系ASML曝光機價值創造
外文關鍵詞: Innovation Ecosystem, ASML, Lithography, Value Creation
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  • 隨著科技發展的激進式創新和產品開發的快速更迭,知識密集型產業面臨新的挑戰。尤其相關新知識產生與傳播更加活躍,並且常有異業密集合作的特色。對於主導創新生態系統的公司,研發新技術和開發新產品常需要與大學、研究機構或其他公司的外部機構密切合作,通過外部合作來進行技術開發和商業創新。
    數位化及網路化正在創造新形態的資訊交換方式和創新過程,由此產生的挑戰和機會影響著所有的知識密集型企業。創新生態系統的出現,為研究、開發和創新活動提供了策略合作和互補生產的空間,其特點是相異產業組織及其創新開發行動者之間的高度依賴與共生。
    本個案研究對象是ASML ,近年來個案公司於年報及對外公開報告上,不斷強調已經成形的創新生態系是推動漸進式創新及激進式創新的強大基礎。我們可從ASML公開發佈及外界的媒體資訊中,設法探討整理出ASML 是如何利用創新生態系,創造出新的價值,甚至是推動整個IC 業的前進,繼續創造出新的藍海。
    關鍵詞:創新生態系、ASML、曝光機、價值創造

    Accompanied with radical innovation of technology and rapid change in product development, knowledge-intensive enterprises face new type of challenges. Particularly the generation and dissemination of relevant new knowledge are more dynamic and characterized by intensive collaboration between heterogeneous industries. For those that dominate innovation, research and development of new technologies require close collaboration with external universities, research institutes or other companies for technology development and business innovation.
    Digitalization and networking are genereating new types of information exchange and innovation processes, and the resulting challenges and opportunities affect all knowledge-intensive enterprises. The emergence of innovation ecosystems theory provides strategic cooperation and complementary production space for research, development and innovation activities.
    ASML has been selected as a case study on framing an IC innovation ecosystem in this research work. In recent years, ASML has usually and publicly posted notice or announcements with emphasizing the emerging innovation ecosystem as a strong foundation for incremental and radical innovation. From the posted information and some external media focus open information on ecosystem created a big data set. It can be sorted and explored to find out how ASML creates the new values, pulls the entire IC industry forward and continue to create a new blue ocean.
    Keywords: Innovation Ecosystem, ASML, Lithography, Value Creation

    摘要 I 誌謝 IX 目錄 X 表目錄 XIII 圖目錄 XIV 中英文縮寫對照表 XV 第1 章 緒論 1 1-1 研究背景 1 1-2 研究目的與範圍 3 1-3 研究內容與流程 4 第2 章 文獻探討 6 2-1 創新系統的演進 6 2-1-1 產業聚落 (Industry cluster) 7 2-1-2 創新網路 (Network) 8 2-1-3 創新三螺旋模式 (Tripple Helix Model) 9 2-1-4 創新四螺旋模式 (Quadruple Helix Model) 9 2-1-5 創新生態系 (Innovation Ecosystem) 11 2-2 影響創新生態系的理論與性質 13 2-2-1 商業生態系 (Business ecosystem) 16 2-2-2 開放性創新 (Open Innovation) 18 2-2-3 模組化 (Modularity) 19 2-2-4 複雜性 (Complexity) /複雜化系統 (Complex system) 21 2-2-5 互補性 (complementarity) 23 2-2-6 相依性 (Interdependence) 25 2-3 IC 製造微影曝光機的演進 26 2-3-1 步進機 (Stepper/ Step and Repeat) 26 2-3-2 掃描機 (Scanner/ Step and Scan) 27 2-3-3 DUV 曝光機氪氟雷射光源 (KrF 248nm) 30 2-3-4 DUV 曝光機氬氟雷射光源 (ArF 193nm) 30 2-3-5 DUV 曝光機浸潤式(ArF Laser + Immersion) 31 2-3-6 EUV 極紫外光曝光機 (EUV 13.5 nm) 33 第3 章 以 ASML 為基石 (keystone) 的創新生態系 35 3-1 創新生態系建構風險 35 3-1-1 區域創新生態系基地慎選 35 3-1-2 深度科技風險投資極具挑戰性 37 3-2 ASML 創新生態系內主要行動者組成類型 37 3-2-1 客戶 38 3-2-2 供應商 39 3-2-3 整體IC 製造主要夥伴 44 3-2-4 技術夥伴 (Technology partners) 46 3-2-5 學術界 48 3-2-6 ARCNL: Advanced Research Center for Nanolithography 50 3-3 整體規劃過程 (ASML Holistic Lithography approach) 51 3-3-1 依據「路線圖(roadmap)」作為創新目標 51 3-3-2 通過收購、合併鞏固供應來源及加強創新合作 52 3-4 本章小結 54 第4 章 ASML 創新生態系的價值創造過程 55 4-1 模組化系統工程,縮短系統複雜化適應期 56 4-2 雙晶圓載台(Dual wafer stage) 58 4-3 浸潤式微影 60 4-4 EUV 光源曝光機 61 4-5 本章小結 63 第5 章 結論與建議 64 5-1 結論 64 5-1-1 ASML 的創新生態系起點 64 5-1-2 完整生態系後的發展趨勢 66 5-2 建議-尚可擴展的創新生態系的理論範圍 67 參考文獻 69

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    網站部份
    1. ASML annual report 2014, 網站 https://www.asml.com/en/investors/annual-report/2014 瀏覽日期 2023/2/24
    2. ASML’s view on collaborative projects 網站(2019) https://efecs.eu/publication/download/presentation-frans-list.pdf 瀏覽日期 2023/2/6
    3. ASML Investor Day Company Strategy 網站(2021)
    https://www.asml.com/en/investors/investor-days/2021 瀏覽日期 2023/2/15
    4. ASML Joins EUV-LLC Team https://www.photonicsonline.com/doc/asml-joins-euv-llc-team-0001 瀏覽日期 2023/5/10
    5. ASML 不只加碼投資台灣,將把歐洲供應鏈帶到台灣落地!
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