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研究生: 游皓翔
You, Hau-Shiang
論文名稱: 鋁基四元高熵合金薄膜材料特性及其於紫外光波段光學特性之研究
Research of characteristics of aluminum-based quaternary high entropy alloy thin films and its optical properties in UV wavelengths
指導教授: 施權峰
Shih, Chuan-Feng
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2022
畢業學年度: 110
語文別: 中文
論文頁數: 91
中文關鍵詞: 高熵合金腐蝕行為反射率硬度
外文關鍵詞: High-Entropy Alloy, corrosion behavior, reflectance, hardness
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  • AlCoZnNi 與Al透過共濺鍍去分析其機械特性、腐蝕特性以及其光學特性,並應用於LED 外封裝反射層的可行性。研究的材料包括Al25Co25Zn25Ni25、Al36Co22Zn21Ni21、Al45Co18Zn17Ni20、Al50Co16Zn17Ni17、Al60Co13Zn13Ni14、Al65Co12Zn12Ni11、Al81Co6Zn6Ni7薄膜,以及熱退火對Al50Co16Zn17Ni17、Al60Co13Zn13Ni14、Al65Co12Zn12Ni11光學特性的影響。
    由於Al-Zn 本身存在相分離的特性,使得此材料有富鋁以及富鋅的雙層特性。透過機械特性以及耐腐蝕測試研究此材料,可以觀察到相分離的雙層結構以及高熵效應可以使硬度增加,在3.5 wt.%的NaCl溶液中,隨著Al含量的減少以及Co、Zn、Ni 鈍化金屬比例的增加會讓整體的腐蝕電位以及孔蝕電位有所上升,Al25Co25Zn25Ni25 的腐蝕電位以及孔蝕電位分別為 -0.77376 V和0.7 V,代表著高熵合金本身的高抗腐蝕特性。
    研究Al50Co16Zn17Ni17、Al60Co13Zn13Ni14、Al65Co12Zn12Ni11反射率高於Au的光學特性以及其反射率的熱穩定性,可以發現經過RTA 200℃、300℃、400℃後,特別是Al60Co13Zn13Ni14、Al65Co12Zn12Ni11 在UVC波段的反射率甚至高於Al,也可以有效取代Al本身容易氧化以及退火過後的晶粒成長讓粗糙度上升進而讓反射率降低的因素。

    The aim of this research makes a thorough inquiry into the mechanical properties, thermal stability, and corrosion behavior of AlCoZnNi (HEA1) and Al that were made from co-sputtering. Finding out the correlation between HEA1 characteristics and optical properties would be the main axis of this research.
    The reflectance of Al65Co12Zn12Ni11 increased due to reduction of roughness by Sluggish diffusion effect from room temperature to 200 ℃, 300 ℃and 400 ℃ annealing about 60.02%, 69.31%, 67.87% and 66.54% at 280 nm in UV band respectively. Corrosion potential and pitting potential of HEA1 within -0.77376 V and 0.7 V respectively from the corrosion test after packaging in 3.5wt. % NaCl. Represent the high corrosion resistance of the high-entropy alloy.
    Another breakthrough discovery of the spinodal decomposition caused by Al-Zn. The characteristic of this material was aluminum-rich and zinc-rich bilayer, that the period of the bilayer will increase also happened on the sputtering rate. The bilayer of spinodal decomposition and solid solution can enhance the mechanical properties. The hardness of Al45Co19Zn16Ni20 was largest about 12.86 GPa.

    摘要 I Extended Abstract II 致謝 XVIII 目錄 XIX 表目錄 XXIII 圖目錄 XXIV 第一章 緒論 1 1-1 前言 1 1-2研究動機 3 第二章 文獻回顧與理論基礎 5 2-1高熵合金材料 5 2-1-1 高熵效應(High-entropy effect) 5 2-1-2 嚴重晶格畸變效應(Severe lattice-distortion effect) 6 2-1-3 緩慢擴散效應(Sluggish diffusion effect) 7 2-1-4 雞尾酒效應(Cocktail effect) 8 2-2奈米壓痕(Nanoindentation) 9 2-3腐蝕的介紹與型態 12 2-3-1腐蝕的種類 13 2-3-2線性極化法 (Linear Polarization) 14 2-3-3 鈍化與鈍態膜 16 2-4金屬光學薄膜 17 2-4-1元素反射率 20 2-4-2熱處理對反射率的影響 21 2-4-3 LED封裝反射層 23 2-5鋁鋅合金 24 2-5-1旋節分解(Spinodal decomposition) 24 2-5-2鋁鋅合金腐蝕特性 26 第三章 實驗方法 28 3-1-1矽基板之準備 29 3-1-2 矽基板表面清洗 29 3-1-3藍寶石基板之準備 31 3-1-4藍寶石基板表面清洗 31 3-1-5薄膜製程 32 3-1-6熱處理 32 3-2電化學實驗準備 33 3-2-1 極化測試 34 3-3 LED支架反射層 35 3-4金屬材料之量測分析 35 3-4-1 掃描式電子顯微鏡(SEM) 35 3-4-2 X光繞射儀(XRD) 36 3-4-3場發射穿透式電子顯微鏡(TEM) 37 3-4-4橢圓偏光儀(Ellipsometer) 37 3-4-5紫外光-可見光-近紅外光分光光譜儀 (UV/Visible/NIR Spectrophotometer) 38 3-4-6 AFM 39 3-4-7奈米壓痕 40 第四章 結果與討論 41 4-1 AlxCoZnNi(x=1-0.25)薄膜特性 41 4-1-1 AlxCoZnNi(x=1-0.25)結晶性分析 41 4-1-2 AlxCoZnNi(x=1-0.25)表面分析 46 4-1-3 AlxCoZnNi(x=1-0.25)微結構分析 48 4-2 AlxCoZnNi(x=1-0.25)材料特性 61 4-2-1 AlxCoZnNi(x=1-0.25)機械特性分析 61 4-2-2 AlxCoZnNi(x=1-0.25)腐蝕特性分析 63 4-3 AlxCoZnNi(x=1-0.25)於封裝反射層以及熱穩定性 71 4-3-1 AlxCoZnNi(x=1-0.5)薄膜的熱分析 71 4-3-2 AlxCoZnNi(x=1-0.5)光學特性分析 74 4-3-3 Al65Co12Zn12Ni11作為LED封裝反射層分析 84 第五章 結論與未來規劃 85 5-1結論 85 5-2未來規劃與發展 86 第六章 參考文獻 87

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