為了減少老年人及嬰幼兒因為呼吸終止而造成的死亡，本論文將微機電氣流感測器及訊號處理電路整合成一個呼吸感測系統晶片，實現一個可靠且功能良好的呼吸監測系統。感測器部分採用微懸臂樑架構，其會隨著溫度或壓力的改變而產生電阻值的改變，電路部分則包含放大及濾波的效果。本系統內建三組感測器，並對其溫度效應和感測器性能做比較，另外亦針對感測器、電路以及全系統的模擬和量測結果，分別作詳細說明，包含感測器的溫度效應以及偏壓效應等，並與模擬結果相對照，可用以修正模擬軟體的數據。全晶片大小為1.8x 2.4 mm2，系統總耗功為5.5mW，其中感測器架構消耗4.4mW，此外，全晶片採用TSMC 0.35 μm 2P4M CMOS 製程加上MEMS後製程製作。

To lower the death rate of infants and elders due to respiration-related diseases, a respiration detection chip, which integrates both MEMS flow sensor and signal processing circuits into one single chip, has been implemented. A microcantilever is employed as the airflow sensor. The resistance of the microcantilever changes when the pressure applying on the cantilever or temperature changes. The changes in resistance is converted to voltage signals, which is then amplified and filtered by the signal processing circuits. Three MEMS sensors with slightly different designs are implemented in this chip, and their temperature sensitivities are compared. Both simulation and measurement results are presented in this thesis, including the temperature effect of the MEMS-sensors and the performance of the signal processing circuits. The accuracy of simulation tools can be greatly improved by calibrating the simulation results with the measured results, which means a lot for the future design. The full system dissipates 5.5mW, including 4.4mW dissipated in MEMS sensors. Besides, the chip was fabricated by using TSMC 0.35μm 2P4M mixed-signal process and MEMS post-process. The chip area is 1.8x 2.4 mm2.

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