雙相流散熱技術常見於均溫基板內以解決高熱密度的熱點問題，此作動機制是透過工作流體之相變化進行均熱與散熱行為，當此技術受到重力影響而使熱源無法接觸工作流體時，其效能便會大幅降低，甚至造成均熱基板的失效。故為減輕重力對均溫基板內工作流體的影響，本文整合溝槽式(Rectangular groove)結構與微細網狀(Micro-mesh)結構設計一高毛細力的複合式結構，並透過改變網狀結構的層數觀察均溫基板在不同傾斜角度下的熱性能變化；首先本研究藉由模擬軟體之計算，找出層數的變化與溫度分佈及熱阻間的關係，並透過實驗制定本複合式結構之最佳填充量，最後透過完整的實驗數據探討在同一尺寸的微溝槽下，不同的網狀層數在不同之傾斜角下對於熱阻與最大熱傳量之影響。由本論文實驗結果顯示，不論複合式結構的網格層數多寡，均溫基板皆會受到重力的影響，差別在於熱性能遞減的程度，當給予一傾斜角-15~-45度時，層數越多的均溫基板在蒸發端的熱對流係數越高(三層複合式結構在傾斜-15~-45度時約在390W/m2K~3600間W/m2K)，說明網格所提供的毛細力確實可輔助工作流體的輸送，減低重力的影響。

In order to solve the hot spot problem, many new dispersing heat approaches is applied; the heat spreader is one of them. Due to the uniform temperature substrate is through the change of working fluid to make disperse heat. If the heat source can’t contact the working fluid, the heat spreader couldn’t use efficiently. Hence, the point of project is to design the micro heat spreader using hybrid structure by combing rectangular groove and mesh screen. The hybrid structure can take out the heat equally and solve the hot spot problem which leads to the spreader thermal, and offer the best dispersing heat approach that locate the heat source and decrease the effect that the gravitation is to the uniform temperature substrate. First of all, the temperature distribution and thermal resistance is calculated by IcePak, a CFD software. Than the best fill amount of the hybrid structure can be found by some experiment. According to the experiment result, thermal response of the heat spreader can be discussed. It is evident that no matter how many the mesh layer of hybrid structure is, the heat spreader would be affected by gravity. When the heat spreader is slanted between -15 to -45 degrees, the heat transfer coefficient of heat spreader which comprises more mesh layer is larger. And the experiment result shows that the mesh layer can assist transport of working fluid such that the influence of gravity could be reduced.

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