本論文採用非對稱脈寬調變方式進行系統輸出定功率控制，不僅維持電漿系統穩定工作，同時延長負載壽命，且整體控制電路以微控制器完成，並加入系統保護機制，以實現系統數位控制之目的。又本文於常壓式電漿驅動系統中，整體設計適用於放電負載之電能轉換架構，並以半橋型換流器為主電路及融入混合式諧振電路，以達成柔性切換功能，裨以有效減少開關損失，進而提昇系統運轉效能。本文同時推導電路模型與分析，並由電腦模擬與雛形系統進行系統特性測試驗證本文所提方法所具有之可行性，論文研製成果並可提供高頻工業驅動系統設計研製參考之需。

This thesis has applied an asymmetrical pulse width modulation circuit for the constant-power design of plasma drive system, in which a half-bridge inverter is served as the main structure with the capability of voltage filtering and soft-switching such that the system operation efficiency can be improved as well as the power density can be upgraded. In order to solidify the practicality of the circuit design, mathematical simulations and experimental validations have been thoroughly performed. Test results confirm the effectiveness of the method, thereby demonstrating that the method is beneficial for high-frequency drive industry applications.

[1]R. J. E. Hueting, B. Rajasekharan, C. Salm and J. Schmitz, “The Charge Plasma P-N Diode,” IEEE Transactions on Semiconductor Manufacturing, Vol. 19, No. 12, pp. 1367-1369, Dec. 2008.

[2]S. Lee, Y. C. Tien, “In Situ and Real-Time Monitoring of Plasma Process Chamber Component Qualities and Predictive Controlling of Wafer Yields” IEEE Transactions on Semiconductor Manufacturing, Vol. 19, No. 4, pp. 432-436, Nov. 2006.

[3]B. W. Koo; Z. Fang and S. Felch, “Plasma characterization of a plasma doping system for semiconductor device fabrication,” Ion Implantation Technology Conference, Alpbach, pp. 504-507, Sep. 2000.

[4]J. W. Coburn, “Surface Processing With Partially Ionized Plasmas,” IEEE Transactions on Plasma Science, Vol. 19, No. 6, pp. 1048-1062, Dec. 1991.

[5]T. Oda, T. Takahashi, and R. Yamashita, “Non Thermal Plasma Processing for VOCs Decomposition and NOx Removal in Flue Gas,” Journal of Advanced Oxidation Technology, Vol. 2, No. 2, pp. 337-345, 1997.

[6]B. Eliasson and U. Kogelschatz, “Nonequilibrium Volume Plasma Chemical Processing,” IEEE Transactions on Plasma Science, Vol. 19, No. 6, pp. 1063-1077, Dec. 1991.

[7]M. I. Boulos, “Thermal Plasma Processing,” IEEE Transactions on Plasma Science, Vol. 19, No. 6, pp. 1078-1089, Dec. 1991.

[8]C. H. Lin, Y. Lu, H. J. Chiu and C. L. Ou, “Eliminating the Temperature Effect of Piezoelectric Transformer in Backlight Electronic Ballast by Applying the Digital Phase-Locked-Loop Technique,” IEEE Transactions on Industrial Electronics, Vol. 54, No. 2, pp. 1024-1031, April 2007.

[9]M. Jordan and J. A. O’Connor, “Resonant fluorescent lamp converter provides efficient and compact solution,“ IEEE APEC’93 proceedings, pp. 424-431, 1993.

[10]E. E. Hammer, “High Frequency Characteristics of Fluorescent Lamps up to 500kHz,” Journal of the Illuminating Engineering Society, pp. 52-31, Winter 1987.

[11]F. J. Azcondo, F. J. Diaz, C. Branas and R. Casanueva, “Microcontroller Power Mode Stabilized Power Factor Correction Stage for High Intensity Discharge Lamp Electronic Ballast,” IEEE Transactions on Power Electronics, Vol. 22, No. 3, pp. 845-853, May 2007.

[12]R. Orletti, M. A. Co, D. S. L. Simonetti and J. L. de Freitas Vieira, “HID Lamp Electronic Ballast With Reduced Component Number,” IEEE Transactions on Industrial Electronics, Vol. 56, No. 3, pp. 718-725, March 2009.

[13]T. F. Wu, Y. C. Liu and Y. J. Wu, “High-efficiency low-stress electronic dimming ballast for multiple fluorescent lamps,” IEEE Transactions on Power Electronics, Vol. 14, No. 1, pp. 160-166, Jan. 1999.

[14]R. de Oliveira Brioschi and J. L. F. Vieira, “High-Power-Factor Electronic Ballast with Constant DC-Link Voltage,” IEEE Transactions on Power Electronics, Vol. 13, No. 6, pp. 1030-1037, Nov. 1998.

[15]J. Adams, T. J. Ribarich and J. Ribarich, “A new control IC for dimmable high-frequency electronic ballasts,” IEEE APEC’99 proceedings, pp. 713-719, 1999.

[16]C. S. Moo, H. L. Cheng, H. N. Chen, and H. C. Yen, “Designing dimmable electronic ballast with frequency control,” IEEE APEC’99 proceedings, pp. 727-733, 1999.

[17]M. I. Boulos, “Thermal Plasma Processing,” IEEE Transactions on Plasma Science, Vol. 19, No. 6, pp. 1078-1089, Dec. 1991.

[18]賴耿陽 編譯， “電漿工學的基礎” 復文書局，民國75年。

[19]A. Schutze, J. Y. Jeong, S. E. Babayan, P. Jaeyoung, G. S. Selwyn, and R. F. Hicks, “The Atmospheric-pressure Plasma Jet: a Review and Comparison to Other Plasma Sources,” IEEE Transactions on Plasma Science, Vol. 26, No. 6, pp. 1685-1694, Dec. 1998.

[20]O. P. Solonenko, Thermal Plasma Torches and Technologies-Volume I: Plasma Torches: Basic Studies and Design, Cambridge International Science Publishing, London, 2004

[21]S. Rauf, “Dual Radio Frequency Sources in a Magnetized Capacitively Coupled Plasma Discharge,” IEEE Transactions on Plasma Science, Vol. 31, No. 4, pp. 471-478, April 2000.

[22]S. P. Kuo, M. Rubinraut, S. Popovic and D. Bivolaru, “Characteristic Study of a Portable Arc Microwave Plasma Torch,” IEEE Transactions on Plasma Science, Vol. 34, No. 6, pp. 2537-2544, Dec. 2006.

[23]J. S. Chang, P. A. Lawless, and T. Yamamoto, “Corona Discharge Processes,” IEEE Transactions on Plasma Science, Vol. 19, No. 6, pp. 1152-1166, Dec. 1991.

[24]Z. Falkenstein, “Applications of Dielectric Barrier Discharges,” 12th International Conference on High-Energy Particle Beams, pp. 117-120, June 1998.

[25]Z. Chen, “Impedance Matching for One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) Reactors,” IEEE Transactions on Plasma Science, Vol.30, No. 5, pp. 1922-1930, Oct. 2002.

[26]Z. Chen, “Pspice Simulation of One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) Reactor Systems,” IEEE Transactions on Plasma Science, Vol.31, No. 4, pp. 511-520, Aug. 2003.

[27]J. M. Alonso, J. Garcia, A. J. Calleja, J. Rivbas, and J. Cardesin, “Analysis, Design, and Experimentation of a High-Voltage Power Supply for Ozone Generation Based on Current-Fed Parallel-Resonant Push-Pull Inverter,” IEEE Transactions on Industrial Applications, Vol. 41, No. 5, pp. 1364-1372, Sep. 2005.

[28]J. R. Roth, “Industrial Plasme Engineering-Volume 1: Principles,” Institute of Physics Publishing, London, 1995.

[29]E. E. Kunhardt and L. H. Luessen, “Electrical Breakdown and Discharges in Gases-Part A: Fundamental Processes and Breakdown,” NATO Advanced Science Institutes Series, New York and London, 1981.

[30]R. L. Boxman, P. J. Martin ,and D.M. Sanders, “Handbook of Vacuum Arc Science and Technology-Fundamentals and Applications,” Noyes Publications, New Jersey, USA, 1995.

[31]梁適安 著， “交換式電源供給器之理論與實務設計” 全華科技圖書股份有限公司，民國90年。

[32]N. Mohan, T. M. Undeland, and W. P. Robbins著， 江炫樟 編譯， “電力電子學Power Electronics” 全華科技圖書股份有限公司，民國94年。

[33]GERORGE C. CHRYSSIS著, 梁適安譯, “高頻交換式電源供應器原理與設計第二版” 全華科技圖書股份有限公司,1995年5月。

[34]吳財福,吳永駿,余德鴻, “調光電子安定器” 全華科技圖書股份有限公司，中華民國87年5月。

[35]M. Ponce, R. Vázquze, j. Arau, D. Abud, “Class E Amplifiers Used a High Power Factor Electronic Ballasts for Fluorescent Lamps in a Single Stage,” IEEE PESC’98, 29th, Vol.2, pp. 2005-2015, May 1998.

[36]M. C. Cosby and R. M. Nelms, “A Resonant Inverter for Electronic Ballast Applications,” IEEE Transactions on Industrial Electronics, Vol. 41, No. 4, pp. 418-425, Aug. 1994.

[37]R. L. Steigerwald, “A Comparison of Half-Bridge Resonant Converter Topologies,” IEEE Transactions on Power Electronics, Vol.3, pp. 174-182, Apr. 1988.

[38]M. K. Kazimerczuck and W. Szaraniec, “Electronic Ballast for Fluorescent Lamps,” IEEE Transactions on Power Electronics, Vol.8, pp. 386-395, Oct. 1993.

[39]W. J. B. Heffernan, P. D. Evans, M. Thompson, and P. Robert, “Three Phase Parallel Loaded Resonant Converter with Fixed Frequency Operation,” 1991 Fourth International Conference on Power Electronics and Variable-Speed Drives, London, England, pp. 115 - 120, 17-19 July 1990.

[40]D. Zhang, W. Zhang, Y. Liu, and X. Zhao, “Design of LCC Resonant Inverter for Metal Halide Lamp Ballast,” in Conf. Rec. IPEMC 2004, Vol.3, pp. 1558-1562, 2004

[41]J. M. Alonso, C. Blanco, E. Lopes, A. J. Calleja and M. Rico, “Analysis, Design, and Optimization of the LCC Resonant Inverter as a High-Intensity Discharge Lamp Ballast,” IEEE Transactions on Power Electronics, Vol. 13, No. 3, pp. 573-585, May 1998.

[42]R. Casanueva, F. J. Azcondo, and C. Branas, “Output Current Sensitivity Analysis of the LCpCs Resonant Inverter: Current-Source Design Criteria,” IEEE Transactions on Industrial Electronics, Vol. 54, No. 3, pp. 1560-1568, June 2007.

[43]M. Qiu and P. K. Jain, “System Performance of a High Frequency AC Power Distribution System,” 24th Annual International Telecommunications Energy Conference, pp. 491-496, Sep. 2002.

[44]M. Qiu, P. K. Jain, and H. Zhang, “A Half-Bridge Hybrid Resonant Inverter with Novel Pulse Phase Modulation Control,” IEEE Transactions on Power Electronics, Vol. 19, No. 1, pp. 121-129, Jan. 2004.

[45]Z.Ye, P. K. Jain, and S. Paresh, “A High Efficiency High Frequency Resonant Inverter for High Frequency AC Power Distribution Architectures,” 37th IEEE Power Electronics Specialists Conference, Jeju, China, pp. 1-7, 18-22 June 2006.

[46]Elegant Power Application Research Center， “電力電子學綜論”全華科技圖書股份有限公司，民國96年。

[47]C. Branas, F. J. Azcondo, and S. Bracho, “Electronic Ballast for 150 W HPS Lamps with Compensated Output Power,” IEE Electronics Letters., vol.35, pp. 1041-1043, 24 June 1999.

[48]C. M. Wang; and G. C. Hsieh; “A Series-Resonant DC/AC Inverter for Impedance-Load Drives,” IEEE Transactions on Power Electronics, Vol. 16, No. 3, pp. 325-335, May 2001.

[49]K. Zhang; Y. Kang; J. Xiong; and J. Chen “Direct repetitive control of SPWM inverter for UPS purpose,” IEEE Transactions on Power Electronics, Vol. 18, No. 3, pp. 784-792, May 2003.

[50]P. K. Jain and M. C. Tanju, “A 20 KHz Hybrid Resonant Power Source for the Space Station,” IEEE Transactions on Aerospace and Electronic Systems, Vol. 25, No. 4, pp. 491-496, July 1989.

[51]M. Qiu, P. K. Jain, and H. Zhang, “Dynamic Performance of an APWM Resonant Inverter for High Frequency AC Power Distribution System,” IEEE Transactions on Industrial Electronics, Vol. 49, No. 1, pp. 256-263, Feb. 2002.

[52]M. Qiu, P. K. Jain, and H. Zhang, “Dynamic Performance of an APWM Resonant Inverter for High Frequency AC Power Distribution System,” IEEE Transactions on Power Electronics, Vol. 21, No. 6, pp. 1556-1563, Nov. 2006.

[53]Z. Ye, P. K. Jain, and P. C. Sen,, “A Two-Stage Resonant Inverter With Control of the Phase Angle and Magnitude of the Output Voltage,” IEEE Transactions on Industrial Electronics, Vol. 54, No. 5, pp. 2797-2812, Oct. 2007.

[54]PIC18F4520 Data Sheet, Microchip Technology Inc., 2008.

[55]Low Power Quad Differential Comparators LM339 Data Sheet, STMicroelectronic Corporation, March 2003.

[56]曾百由 著, “微處理器原理與應用” 五南圖書出版公司， 中華民國95年10月初版。

[57]Photo-Coupler TLP-250 Data Sheet, TOSHIBA Corporation, June 2004.

[58]Insulated Gate Bipolar Transistor Silicon N Channel IGBT GT60M303 Data Sheet, TOSHIBA Corporation, August 1997.

[59]JFET-Input Operational Amplifiers TL084 Data Sheet, Texas Instruments Inc., Nov. 1992.

[60]鄭培璿 著， “IsSpice在電力電子與電源轉換器上的應用” 全華科技圖書股份有限公司，民國88年。