全球景氣受新冠肺炎疫情衝擊，半導體晶圓代工產業呈現爆發性成長，因應需求，各家晶圓製造廠商紛紛進行擴廠因應。此趨勢導致晶圓生產設備供不應求，在新機台供給時程延誤下，各晶圓廠只能以現有產能因應客戶所需，現有產能的提升即成為各晶圓廠重要的課題。其中瓶頸機台的生產效率更關乎工廠實際可出貨片數能力，如何以現有設備優化提升生產能力，滿足客戶訂單需求，更是各工廠重中之重的目標。
本研究提出運用萃智理論創新問題解決模式，以歷經多次製程及生產效率改善的舊有生產機台為案例。先以特性要因分析法找出影響機台產能的關鍵因素，包含產品缺陷異常率高、調整薄膜特性時間長、機台監測時間長、機台腔體清潔時間長及晶圓傳送時間長五大問題。運用萃智理論的39項工程參數轉換建立矛盾矩陣及40項發明原則進行關鍵因素的問題改善，在不影響生產品質及增加成本的情況下，找出解決機台產能不足的有效解決方案。
本研究透過工廠實例驗證，發現優化生產程式含氮步驟，能有效降低產品晶格缺陷異常率99%。在氣體噴射盤預鍍膜步驟加入SiO2，可改善薄膜附著力不佳問題，達到降低清潔頻率目的。找出腔體清潔新的配方，有效減少整體腔體清潔時間。透過監測機械振動頻率進而找出機台傳送動件速度極限能力，達到傳送動件時間最佳化設定。開發虛擬量測及智慧調機系統，取代機台厚度實質監測及人工調機作業，改善因厚度實質監測及人工調機影響生產時間問題。總結上述改善成效，機台可生產時間百分比提升8.21%、每小時產出能力提升8.59%，解決因需求導致的機台產能不足問題，滿足客戶訂單需求，提升工廠市場競爭力。

The global economy has been impacted by the COVID-19 pandemic, leading to explosive growth in the semiconductor foundry industry. To meet the demand, various wafer manufacturers have expanded their production capacity. However, the supply of semiconductor production equipment cannot keep up with the demand, resulting in delayed delivery schedules for new machines. As a result, manufacturers can only rely on their existing production capacity to meet customer orders, making it crucial to optimize existing equipment to increase production capacity. The bottleneck machine's production efficiency is especially important, as it affects the factory's actual shipping capacity. The goal of each factory is to find effective solutions to increase production capacity while maintaining product quality and without increasing costs.
This study proposes an innovative problem-solving model using the TRIZ theory, which analyzes the key factors affecting machine production capacity of the old production machines that have undergone several process and production efficiency improvements. The analysis found five main issues affecting machine production capacity: high product defect abnormality rate, long adjustment time for thin film characteristics, long machine monitoring time, long chamber cleaning time, and long wafer transfer time. Using the 39 engineering parameters in the TRIZ theory, a contradiction matrix was established, and 40 invention principles were applied to improve these key factors' problems, resulting in an effective solution to the machine's insufficient production capacity.
The study confirmed the effectiveness of optimizing the production program's nitrogen-containing step, reducing the product's crystal defect abnormality rate by 99%. Adding SiO2 to the gas jet pre-coating step can improve the poor film adhesion problem and achieve the goal of reducing the cleaning frequency. By finding a new formula for cleaning the chamber, the overall chamber cleaning time can be effectively reduced. Through monitoring the mechanical vibration frequency, the machine's transfer component speed limit capacity was found, achieving the optimal setting of the transfer component time. Developing a virtual measurement and intelligent adjustment system to replace machine thickness real-time monitoring and manual adjustment operations can improve production time issues caused by thickness monitoring and manual adjustment. Overall, the machine's production time percentage increased by 8.21%, and the hourly output capacity increased by 8.59%, solving the problem of insufficient machine production capacity due to demand and meeting customer order requirements, enhancing the factory's market competitiveness.

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