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研究生：	江仲得 Chiang, Chung-Te
論文名稱：	混合式碳源之含鎢類鑽碳膜磨潤性質及應用 Tribological properties and applications of W-C:H coatings deposited with mixed-carbon source
指導教授：	蘇演良 Su, Yean-Liang
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
論文出版年：	2005
畢業學年度：	93
語文別：	中文
論文頁數：	70
中文關鍵詞：	非平衡磁控濺鍍、類鑽碳、磨耗性質
外文關鍵詞：	tribological properties, UBM, DLC
相關次數：	點閱：108 下載：2
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　　本實驗採用封閉式非平衡磁控濺鍍設備，被覆混和碳源之含鎢類鑽碳。使用底材為高速鋼、碳化鎢、微鑽針；第一階段討論偏壓及頻率兩參數對鍍膜性質的影響。第二階段添加甲烷氣體以製造性質更佳之鍍膜。

　　實驗之初，我們進行附著性、硬度、磨耗等基本實驗，並以結構、成份，探究其性質差異的原因。最後進行車刀與微鑽針實驗，以了解實際之應用情形。

　　結果顯示:偏壓上升，有助於硬度；底材脈衝頻率上升也有同樣的效果，但太高的偏壓，會降低鍍膜之附著性。添加甲烷氣體確實可改善鍍膜之磨耗性質，尤以添加3sccm最佳。碳化鎢底材相較於高速鋼底材有更優異的附著性。在PCB鑽孔實驗以及車削實驗中，添加3sccm之鍍膜依然有最佳的抗磨耗性，微鑽針的使用壽命大概是原材的3倍。

　This study is about tungsten-doped DLC deposited by Unbalanced Magnetron sputtering (UBM). In the first step, we changed the bias voltages and frequencies and observed the effect on tribological and mechanical properties.

　In the second step, the aim of experiment is to mix gaseous hydrocarbon source (CH4) with solid graphite target as carbon sources of DLC. Beside the basic mechanical properties and tribological properties tests, The second step coatings also did the main board drilling test for check the practical wear-resisting ability.

　The first step results are shown that enhancing bias voltage and frequency can both enhancing coating hardness. But if bias voltage is over enhanced, the coating adhesion will become poor. The best parameter on this experiment is 40V bias voltage and 100Hz frequency. We can get best wear-resisting and lowest friction coefficient by this parameter.

　The second step experiment represent that using mix carbon source can produce tiny hydrogen W-DLC, and affect microstructures of W-DLC coatings. W-DLC with 1.3at% hydrogen content shows excellent tribological properties. Low friction coefficient and good wear resistant. In the main board drilling test, the W-DLC with 1.3at% hydrogen content also show the best protecting. Beside that we unexpectedly found that WC substrate is perfectly matched with W-DLC coating, it can save the adhesive problems and keep good wear resistant.

授權書………………………………………………………………………………Ⅰ
考試合格證明………………………………………………………………………Ⅱ
摘要…………………………………………………………………………………Ⅲ
Abstract……………………………………………………………………………Ⅳ
誌謝…………………………………………………………………………………Ⅴ
總目錄………………………………………………………………………………Ⅵ  
表目錄………………………………………………………………………………Ⅷ
圖目錄………………………………………………………………………………Ⅸ
第一章 緒論…………………………………………………………………………1
1-1  前言……………………………………………………………………………1
1-2  研究動機………………………………………………………………………1
第二章 理論基礎與文獻回顧………………………………………………………3
2-1類鑽碳……………………………………………………………………………3
2-1-1    類鑽碳的由來……………………………………………………………3
2-1-2    類鑽碳的特性……………………………………………………………3
2-1-3    類鑽碳的絕緣性…………………………………………………………4
2-1-4    類鑽碳的分類……………………………………………………………5
2-1-5    類鑽碳的摩擦係數………………………………………………………5
2-2磁控濺鍍原理……………………………………………………………………6
2-2-1    濺鍍原理…………………………………………………………………6
2-2-2    磁控濺鍍的目的. ………………………………………………………7
2-3鍍膜微觀模型……………………………………………………………………7
2-4 PCB鑽孔機………………………………………………………………………8
2-4-1    鑽針的解介………………………………………………………………9
2-4-2    微鑽針磨耗破壞…………………………………………………………9
2-4-3    印刷電路板………………………….…………………………………10
第三章實驗方法與步驟……………………………………………………………11
3-1 實驗目的………………………………………………………………………11
3-2 實驗流程………………………………………………………………………11
3-3 鍍膜濺鍍參數配置……………………………………………………………11
3-4 實驗內容………………………………………………………………………12
3-4-1     鍍膜成份與元素分……………………………………………………12
3-4-2     鍍膜微結構分析………………………………………………………12
3-4-3     硬度實驗………………………………………………………………13
3-4-4     附著性實驗……………………………………………………………14
3-4-5     磨耗實驗………………………………………………………………14
3-4-6     車削實驗………………………………………………………………15
3-4-7     微鑽針實驗……………………………………………………………15
3-5 實驗所需設備…………………………………………………………………16
第四章  實驗結果與討論…………………………………………………………17
4-1 第一階段-頻率和偏壓討論……………………….…………………………17
4-2 頻率的影響……………………………………………………………………17
4-2-1   頻率改變對膜厚、元素含量的影響……………………………………17
4-2-2     頻率對鍍膜硬度的影響………………………………………………17
4-2-3     頻率對附著性的影響…………………………………………………17
4-2-4     頻率對磨耗性質的影響………………………………………………18
4-3 偏壓的影響……………………………………………………………………19
4-3-1     偏壓改變對膜厚、元素含量的影響…………………………………19
4-3-2     偏壓對硬度的影響……………………………………………………19
4-3-3     偏壓對附著性的影響…………………………………………………19
4-3-4     頻率對磨耗性質的影響………………………………………………20
4-4 第一階段鍍膜總評估…………………………………………………………20
4-5 第二階段-改變甲烷流量…………………………………………………….21
4-5-1     甲烷流量與鍍膜厚度、元素含量的影響……………………………21
4-5-2     甲烷流量與鍍膜微結構的關係………………………………………21
4-5-3     甲烷流量與鍍膜附著性的關係………………………………………22
4-5-4     甲烷流量與鍍膜硬度的關係…………………………………………23
4-5-5     第二階段之磨耗性質…………………………………………………23
4-6 第二階段之車削實驗…………………………………………………………25
4-7 第二階段之鑽削實驗…………………………………………………………26
4-8 第二階段鍍膜總評估…………………………………………………………27
4-9 高速鋼底材和碳化鎢底材之比較……………………………………………28
4-10添加氣體與純固體靶之含鎢類鑽碳比較……………………………………29
第五章結論…………………………………………………………………………30
5-1 結論……………………………………………………………………………30
5-2 刮痕測試用於磨耗性質評估之討論…………………………………………31
第六章參考文獻……………………………………………………………………33


                                    

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