簡易檢索 / 詳目顯示

研究生: 宋國豪
Sung, Kuo-Hao
論文名稱: 添加不同乙炔流量於PVD蒸鍍鈮鋁及鈮鋁氮鍍層對機械、抗腐蝕與磨潤性質之影響
Mechanical, anti-corrosion and tribological properties of NbAl and NbAlN coatings by PVD with different acetylene flux rate
指導教授: 蘇演良
Su, Yean-Liang
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 71
中文關鍵詞: 磨潤科技鈮鋁鍍層氮化鈮氮化鋁
外文關鍵詞: Tribology, NbAlN, Niobium, Aluminium
相關次數: 點閱:213下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 本研究以射頻偏壓直流非平衡磁控濺鍍系統鍍製Nb、NbXAl、NbXAlN與Nb2AlN-CHX系列鍍層於SKH51高速鋼底材上,其中‘X’代表鈮靶電流或乙炔通量,於本實驗的第一階段,使用3A鈮靶電流鍍製的純Nb鍍層與使用變化1到3A鈮靶電流鍍製的NbXAl與NbXAlN鍍層皆互相比較,以找出最佳機械與磨耗性質之鍍層。
    本研究發現,添加Al與N皆減少了晶粒尺寸,也促成了固溶強化效應,使得硬度、硬度與彈性模數(H/E)比值、附著性與磨潤性質皆有所改善。而當鈮靶電流施加至2A後,一個較佳的Nb含量促使鍍層結晶化而使得峰值強度更強,並產生許多結晶結構包含立方的NbN (111)、NbN (220)與NbN (200)和六方的AlN (002) 與 NbN (114),這些不同的結晶相能提供各種不同的好處(雞尾酒效應),譬如NbN(220)能提供高硬度值,而AlN(002)提供好的機械性質與熱穩定性,因此Nb2AlN鍍層有第一階段所有鍍層當中最高的硬度(34.5 GPa)、附著性(>100N)與最佳磨潤性質。
    綜合以上,於第二階段,Nb2AlN鍍層被選擇添入一系列變化之乙炔流量(6、12與18 sccm),以進一步改善鍍層的磨潤性質,而添加乙炔後,乙炔使得鍍層結晶結構從金屬氮化物轉變為類鑽碳結構(DLC),且平均摩擦係數由於乙炔的影響而大幅下降。於Nb2AlN-CHX系列鍍層當中,Nb2AlN-CH12鍍層具有最高的H/E值(0.094)且於對磨球上還有充足的富碳轉移層(固體潤滑層),表示磨耗試驗時鍍層與對磨球的接觸面產生固體潤滑效應,因此,Nb2AlN-CH12鍍層表現出所有鍍層中最佳的磨潤性質包括最低的磨深(0.29 µm)與磨耗率(0.37 x10-6mm3/Nm)。

    In this study, addition of Al and N decreased the grain size which cause refinement and prompts a solid solution effects make the hardness/elastic modulus ratio value, hardness, adhesion property and tribological performance improved. Following the addition of acetylene, which made the coating structure transfer from a metal nitride crystalline structure to a DLC structure. Among the Nb2AlN-CHx coatings, Nb2AlN-CH12 coating has the highest H/E value and the rich-carbon transferred layer formed on counterbody induced the contact surfaces were solid lubricant effect. Consequently, Nb2AlN-CH12 coating behaves the best tribological performance among all coatings.

    考試合格證明 I 中文摘要 II Extended Abstract III 誌謝 X 總目錄 XI 表目錄 XIII 圖目錄 XIV 第一章 緒論 1 第二章 理論探討與文獻回顧 4 2-1 鍍層研究 4 2-1-1 二元金屬與氮化物-NbAl、NbN&AlN 4 2-1-2 三元金屬氮化物-NbAlN 5 2-1-3 含氫碳氮化物鍍層 6 2-1-4 國外關於金屬氮化物(NbN、AlN)鍍層之研究 7 2-1-5 國內關於金屬氮化物(NbN、AlN)鍍層之研究 8 2-2 濺鍍方法研究 8 第三章 研究方法與步驟 10 3-1 研究目的與目標 10 3-2 研究流程 11 3-3 鍍層製備 14 3-3-1試片準備 14 3-3-2鍍層製程 14 3-4 實驗方法 16 3-4-1 顯微影像與成分分析 16 3-4-2 結構分析 16 3-4-3 機械性質與附著性分析 17 3-4-4 磨耗試驗 18 3-4-5 表面粗糙度分析 18 3-4-6 電化學分析實驗 18 3-4-7 氧化實驗 19 3-4-8 鍍層導電率分析 19 3-4-9 接觸阻抗(ICR)分析 19 3-5 實驗設備與廠商資訊 20 第四章 實驗結果與討論 22 4-1 鍍層成分與結構分析 22 4-1-1 EDS鍍層元素成分 22 4-1-2 XRD鍍層結構分析 24 4-1-3 Raman光譜鍍層分析 27 4-2 鍍層微觀結構觀察以及厚度、粗糙度、機械與附著性等性質分析 29 4-2-1 鍍層厚度與斷面微觀結構分析 29 4-2-2 鍍層表面形貌與粗糙度分析 32 4-2-3 鍍層機械性質與附著性分析 34 4-3 鍍層磨潤性質討論 37 4-3-1 摩擦係數曲線圖分析討論 37 4-3-2 平均摩擦係數、磨耗深度與磨耗率分析討論 39 4-3-3 鍍層磨耗表面之磨耗機制分析與討論 42 4-3-4 對磨球磨耗痕跡分析與討論 45 4-4 鍍層電化學抗腐蝕實驗 48 4-5 鍍層氧化實驗 51 4-6 鍍層導電率與接觸阻抗 53 第五章 討論 54 5-1 NbN與NbAlN鍍層之結果比較與討論 54 5-2 NbTiN與NbAlN鍍層之結果比較與討論 56 5-3 CN鍍層與DLC結果比較與討論 59 第六章 結論 60 第七章 未來展望 61 參考文獻 62 自述 71

    1. S.H. Yao, Y.L. Su, Y.C Lai, and H.M. Wu, Effects of Interlayer on Mechanical Properties of Diamond-Like Carbon Coatings, Applied Mechanics and Materials, 2018, 883, p 43–47
    2. B. Deng, Y. Tao, H. Liu, and P. Liu, Influence of niobium ion implantation on the microstructure and tribological properties of TiAlN coatings, Surf. Coat. Technol, 2013, 228, p 554–557
    3. 楊雲凱,物理氣相沉積(PVD)介紹。
    4. 邱松茂、吳政道、林天財、羅萬中,表面處理技術在模具之應用及發展。
    5. Y. Homma and S. Tsunekawa, Planar Deposition of Aluminum by RF/DC Sputtering with RF Bias, Journal of The Electrochemical Society, 1985, 132, p 1466–1472
    6. Z. Zhang, O. Rapaud, N. Bonasso, D. Mercs, C. Dong and C. Coddet, Influence of RF Bias on the Deposition of CrN Studied by OES, Advanced Engineering Materials, 2008, 10, p 628–633
    7. Z. Han, X. Hu, J. Tian, G. Li, and G. Mingyuan, Magnetron sputtered NbN thin films and mechanical properties, Surf. Coat. Technol, 2004, 179, p 188–192
    8. V.N. Zhitomirsky, I. Grimberg, L. Rapoport, N.A. Travitzky, R.L. Boxman, S. Goldsmith, A. Raihel, I. Lapsker, and B.Z. Weiss, Structure and mechanical properties of vacuum arc-deposited NbN coatings, Thin Solid Films, 1998, 326, p 134–142
    9. J. Wadsworth and F.H. Froes, Developments in metallic materials for aerospace applications, JOM, 1989, 41, p 12–19
    10. https://elements.vanderkrogt.net/element.php?sym=Al
    11. G.F. Menegotto and A.S.C.M. d'Oliveira, The influence of Si on NbAl coatings, Surf. Coat. Technol, 2017, 325, p 338–345
    12. Z. Jiao, Q.J. Liu, F.S. Liu, and B. Tang, First-principles investigation of mechanical and electronic properties of tetragonal NbAl3 under tension, Physica B: Condensed Matter, 2018, 538, p 47–53
    13. L.X. Chen, H. Liu, S. Liu, C.M. Li, Y.C. Wang, K. An, C.Y. Hua, J.L. Liu, J.J Wei, L.F Hei, and F. X. Lv, Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering, Applied Surface Science, 2018, 431, p 152–159
    14. S.K. Jain, M. Mishra, N. Aggarwal, S. Krishna, B. Gahtori, A. Pandey, and G. Gupta, Influence of temperature and Al/N ratio on structural, chemical & electronic properties of epitaxial AlN films grown via PAMBE, Applied Surface Science, 2018, 455, p 919–923
    15. V.N. Zhitomirsky, Structure and properties of cathodic vacuum arc deposited NbN and NbN-based multi-component and multi-layer coatings, Surf. Coat. Technol, 2007, 201, p 6122–6130
    16. R. Franz, M. Lechthaler, C. Polzer, and C. Mitterer, Structure, mechanical properties and oxidation behaviour of arc-evaporated NbAlN hard coatings, Surf. Coat. Technol, 2010, 204, p 2447–2453
    17. K.S. Havey, J.S. Zabinski, and S.D. Walck, The chemistry, structure, and resulting wear properties of magnetron-sputtered NbN thin films, Thin Solid Films, 1997, 303, p 238–245
    18. G.A. Fontalvo, V. Terziyska, and C. Mitterer, High-temperature tribological behaviour of sputtered NbNx thin films, Surf. Coat. Technol, 2007, 202, p 1017–1022
    19. S.K. Kim, B.C. Cha, and J.S. Yoo, Deposition of NbN thin films by DC magnetron sputtering process, Surf. Coat. Technol, 2004, 177–178, p 434–440
    20. N. Cansever, M. Danışman, and K. Kazmanlı, The effect of nitrogen pressure on cathodic arc deposited NbN thin films, Surf. Coat. Technol, 2008, 202, p 5919–5923
    21. M. Benkahoul, E. Martinez, A. Karimi, R. Sanjinés, and F. Lévy, Structural and mechanical properties of sputtered cubic and hexagonal NbN thin films, Surf. Coat. Technol, 2004, 180–181, p 178–183
    22. R. Sanjinés, M. Benkahoul, C.S. Sandu, P.E. Schmid, and F. Lévy, Electronic states and physical properties of hexagonal β-Nb2N and δ`-NbN nitrides, Thin Solid Films, 2006, 494, p 190–195
    23. M. Benkahoul, M.K. Zayed, C.S. Sandu, L. Martinud, and J.E. Klemberg-Sapieha, Structural, tribo-mechanical, and thermal properties of NbAlN coatings with various Al contents deposited by DC reactive magnetron sputtering, Surf. Coat. Technol, 2017, 331, p 172–178
    24. Y.L. Su, W.H. Kao, and Y.H. Mao, Mechanical and Tribological Properties of NbTi-NX and NbTi-N12-CH Coatings Prepared Using Radio Frequency Magnetron Sputtering and Their Application for Micro-drills, Journal of Materials Engineering and Performance, 2020, 29, p 259–277
    25. R. Ray and R. Ayer, Microstructures and mechanical properties of rapidly solidified niobium aluminide (NbAl3), Journal of Material Science, 1992, 27, p 1642–1650
    26. M.G. Hebsur, I.E. Locci, S.V. Raj, and M.V. Nathal, Influence of processing on the microstructure and mechanical properties of a NbAl3-base alloy, Journal of Materials Research, 1992, 7, p 1696–1706
    27. V. Gauthier, F. Bernard, E. Gaffet, C. Josse, and J.P. Larpin, In-situ time resolved X-ray diffraction study of the formation of the nanocrystalline NbAl3 phase by mechanically activated self-propagating high-temperature synthesis reaction, Materials Science and Engineering, 1999, 272, p 334–341
    28. V. Gauthier, F. Bernard, E. Gaffet, Z.A. Munir, and J.P. Larpin, Synthesis of nanocrystalline NbAl3 by mechanical and field activation, Intermetallics, 2001, 9, p 571–580
    29. N. Wang, C. Du, J. Hou, Y. Zhang, K. Huang, S. Jiao, and H. Zhu, Direct synthesis of Nb-Al intermetallic nanoparticles by sodiothermic homogeneous reduction in molten salts, Intermetallics, 2013, 43, p 45–52
    30. C.L. Jiang, Z. Jiao, W. Zeng, F.S. Liu, B. Tang, and Q.J. Liu, Effects of different phases, compositional change, and doping on ductility improvement of NbAl3 phases, Journal of Alloys and Compounds, 2019, 788, p 172–182
    31. C.S. Sandu, M. Benkahoul, M. Parlinska-Wojtan, R. Sanjinés, and F. Lévy, Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering, Surf. Coat. Technol, 2006, 200, p 6544–6548
    32. M. Fenker, M. Balzer, R.V. Buchi, H.A. Jehn, H. Kappl, and J.J. Lee, Deposition of NbN thin films onto high-speed steel using reactive magnetron sputtering for corrosion protective applications, Surf. Coat. Technol, 2003, 163–164, p 169–175
    33. I.L. Singer, R.N. Bolster, S.A. Wolf, E.F. Skelton, and R.A. Jeffries, Abrasion Resistance, Microhardness and Microstructures of Single-Phase Niobium Nitride Films, Metallurgical and Protective Coatings, 1983, 107, p 207–215
    34. R. Molian, P. Shrotriya, and P. Molian, Thermal stress fracture mode of CO2 laser cutting of aluminum nitride, The International Journal of Advanced Manufacturing Technology, 2007, 39, p 725–733
    35. L.D. Wang and H.S. Kwok, Cubic aluminum nitride and gallium nitride thin films prepared by pulsed laser deposition, Applied Surface Science, 2000, 154–155, p 439–443
    36. H.L. Chan, A. Kumar, L. Sanderson and J.J. Weimer, Atomic Force Microscopy Study of Hard Coating Films Prepared by Pulsed Laser Deposition Method, Mat Res Soc Symp, 1997, 487, p 441–487
    37. http://accuratus.com/alumni.html
    38. S. Bloom, Band Structures of GaN and AlN, J. Phys. Chem. Solids, 1971, 32, p. 2027–2032
    39. G.A. Slack and T.F. Mcnelly, Growth of High Purity AlN Crystals, Journal of Crystal Growth, 1976, 34, p 263–279
    40. M. Setoyama, A. Nakayama, M. Tanaka, N. Kitagawa, and T. Nomura, Formation of cubic-AIN in TiN/AIN superlattice, Surf. Coat. Technol, 1996, 86–87, p 225–230
    41. A. Pogrebnjak, V. Rogoz, V. Ivashchenko, O. Bondar, V. Shevchenko, S. Jurga, and E. Coy, Nanocomposite Nb-Al-N coatings: Experimental and theoretical principles of phase transformations, Journal of Alloys and Compounds, 2017, 718, p 260–269
    42. M. Wen, H. Huang, K. Zhang, Q. Meng, X. Li, X. Zhang, L. Kong, W. Zheng, Effects of modulation periodicity on microstructure, mechanical and tribological properties of NbN/AlN nanostructured multilayer films, Applied Surface Science, 2013, 284, p 331–339
    43. K.V. Ezirmik and S. Rouhi, Influence of Cu additions on the mechanical and wear properties of NbN coatings, Surf. Coat. Technol, 2014, 260, p 179–185
    44. H. Ju and J. Xu, Microstructure and tribological properties of NbN-Ag composite films by reactive magnetron sputtering, Applied Surface Science, 2015, 355, p 878–883
    45. H.C. Barshilia, N. Selvakumar, K.S. Rajam, A. Biswas, Spectrally selective NbAlN/NbAlON/Si3N4 tandem absorber for high-temperature solar applications, Solar Energy Materials & Solar Cells, 2008, 92, p 495–504
    46. J.W. Yeh, S.K. Chen, S.J. Lin, J.Y. Gan, T.S. Chin, T.T. Shun, C.H. Tsau, and S.Y. Chang, Nanostructured High‐Entropy Alloys with Multiple Principal Elements: Novel Alloy Design Concepts and Outcomes, Advanced Engineering Materials, 2004, 6, p 299–303
    47. J.W. Yeh, Recent progress in high-entropy alloys, European Journal of Control, 2006, 31, p 633–648
    48. H. Asanuma, P. Polcik, S. Kolozsvari, F.F. Klimashin, H. Riedl, and P.H. Mayrhofer, Cerium doping of Ti-Al-N coatings for excellent thermal stability and oxidation resistance, Surf. Coat. Technol, 2017, 326, p 165–172
    49. P.H. Mayrhofer, D. Sonnleitner, M. Bartosik, and D. Holec, Structural and mechanical evolution of reactively and non-reactively sputtered Zr–Al–N thin films during annealing, Surf. Coat. Technol, 2014, 244, p 52–56
    50. L. Chen, Y.X. Xu, and L.J. Zhang, Influence of TiN and ZrN insertion layers on the microstructure, mechanical and thermal properties of Cr–Al–N coatings, Surf. Coat. Technol, 2016, 285, p 146–152
    51. H. Ju, P. Jia, J. Xu, L. Yu, Y. Geng, Y, chen, M. Liu, and T. Wei, The effects of adding aluminum on crystal structure, mechanical, oxidation resistance, friction and wear properties of nanocomposite vanadium nitride hard films by reactive magnetron sputtering, Materials Chemistry and Physics, 2018, 215, p 368–375
    52. H. Ju, P. Jia, J. Xu, L. Yu I. Asempah, and Y. Geng, Crystal structure and high temperature tribological behavior of niobium aluminum nitride films, Materialia, 2018, 3, p 202–211
    53. F. Zhou, K. Adachi, K. Kato, Sliding friction and wear property of a-C and a-CNx coatings against SiC balls in water, Thin Solid Films, 2006, 514, p 231–239
    54. K.H. Lee, R. Ohta, H. Sugimura, Y. Inoue, O. Takai, H. Sugimura, Amorphous carbon and carbon nitride multilayered films prepared by shielded arc ion plating, Thin Solid Films, 2005, 475, p 308–312
    55. J. Guo, J. Zhang, C. Zhao, J. Zhang, and Z. Zhang, Influence of temperature on structure as well as adhesion and friction and wear behavior of hydrogenated carbon nitride films prepared on silicon substrate, Applied Surface Science, 2011, 258, p 791–799
    56. A. Erdemir, I.B. Nilufer, O.L. Eryilmaz, M. Beschliesser, and G.R. Fenske, Friction and wear performance of diamond-like carbon films grown in various source gas plasmas, Surf. Coat. Technol, 1999, 120–121, p 589–593
    57. S. Neuville and A. Matthews, A perspective on the optimisation of hard carbon and related coatings for engineering applications, Thin Solid Films, 2007, 515, p 6619–6653
    58. W. Tillmann, E. Vogli, and F. Hoffmann, Wear-resistant and low-friction diamond-like-carbon (DLC)-layers for industrial tribological applications under humid conditions, Surf. Coat. Technol, 2009, 204, p 1040–1045
    59. M. Wen, C.Q. Hu, Q.N. Meng, Z.D. Zhao, T. An, Y.D Su, W.X Yu, W.T. Zheng, Effects of nitrogen flow rate on the preferred orientation and phase transition for niobium nitride films grown by direct current reactive magnetron sputtering, Appl. Phys., 2009, 42, 035304
    60. X. Cui, H. Cui, T. Guo, E. Liu, T. Shao, and G. Jin, Effects of Heat-treatment on Mechanical Properties and Corrosion Resistance of NbN Films, Physics Procedia, 2013, 50, p 433–437
    61. W. Lv, L. Shen, J. Liu, J. Chen, L. Wu, D. Qi, G. Zhang, and X. Li, Mechanical properties of single-phase Al1−xInxN films across the compositional range (0 ≤ x ≤ 0.7) grown by radio-frequency magnetron sputtering, Applied Surface Science, 2020, 504, 144335
    62. 林清彥,高功率脈衝磁控濺射沉積氮化鋁鉻及氮化鈦薄膜之特性研究,明志科技大學,碩士論文,2020。
    63. 蔡孟蒓,三元合金靶沉積氮化鋁鈦硼及氮化鋁鈦矽硬質薄膜之機械性質與磨潤性能,國立虎尾科技大學,碩士論文,2018。
    64. M. Bazzan, Synthesis and characterization of titanium carbon nitride films by High Power Impulse Magnetron Sputtering, Dipartimento di Fisica e Astronomia-Galileo Galilei, 2014
    65. C. Liu, A. Leyland, Q. Bi, and A. Matthews, Corrosion resistance of multi-layered plasma-assisted physical vapour deposition TiN and CrN coatings, Surface and Coatings Technology, 2001, 141, p 164–173
    66. J. Lin and W. D. Sproul, Structure and properties of Cr2O3 coatings deposited using DCMS, PDCMS, and DOMS, Surface and Coatings Technology, 2015, 276, p 70–76
    67. J.C. Ding, Q.M. Wang, Z.R. Liu, S. Jeong, T.F. Zhang, and K.H. Kim, Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique, Journal of Alloys and Compounds, 2019, 772, p 112–121
    68. H.T. Hsueh, W.J. Shen, M.H. Tsai, J.W. Yeh, Effect of nitrogen content and substrate bias on mechanical and corrosion properties of high-entropy films (AlCrSiTiZr)100 – xNx, Surf. Coat. Technol, 2012, 206, p 4106–4112
    69. C.H. Chang, C.B. Yang, C.C. Sunga, and C.Y. Hsu, Structure and tribological behavior of (AlCrNbSiTiV)N film deposited using direct current magnetron sputtering and high power impulse magnetron sputtering, Thin Solid Films, 2018, 668, p 63–68
    70. 楊聰仁,腐蝕電化學分析。
    71. 葉貴誠,直流磁控濺鍍添加鈦金屬元素對碳氮鍍層之機械性質及磨潤性質之影響,國立成功大學機械工程學系,碩士論文,2016。
    72. F. Ye, Z. Jiao, S. Yan, L. Guo, L. Feng, and J. Yu, Microbeam plasma arc remanufacturing: Effects of Al on microstructure, wear resistance, corrosion resistance and high temperature oxidation resistance of AlxCoCrFeMnNi high-entropy alloy cladding layer, Vacuum, 2020, 174, 109178
    73. V. Babrauskas, Arc Beads from Fires: Can ‘Cause’ Beads Be Distinguished from ‘Victim’ Beads by Physical or Chemical Testing?, Journal of Fire Protection Engineering, 2004, 14, p 125–147
    74. Y.L. Su, W.H. Kao, and Y.C. Chang, Mechanical and Tribological Properties and High-Speed Drilling Performance of NbTiN Coatings Prepared by High-Power Impulse Magnetron Sputtering with Varying Nitrogen and Acetylene Flux Rates, Journal of Materials Engineering and Performance, 2020, 29, p 8194–8212
    75. P.K. Huang and J.W. Yeh, Effects of nitrogen content on structure and mechanical properties of multi-element (AlCrNbSiTiV)N coating, Surf. Coat. Technol, 2009, 203, p 1891–1896
    76. H. Mostaan, F. Karimzadeh, and M.H. Abbasi, Synthesis and formation mechanism of nanostructured NbAl3 intermetallic during mechanical alloying and a kinetic study on its formation, Thermochimica Acta, 2012, 529, p 36–44
    77. J.H. Schneibel, P.F. Becher, J.A. Horton and J.M. Res, Microstructure and fracture toughness of powder-processed Al3Nb, Journal of Materials Research, 1988, 3, p 1272–1276
    78. T. Yamamoto, and J. Mazumder, Synthesis of Nanocrystalline NbAl3 by Laser Ablation Technique, NanoStructured Materials, 1996, 7, p 305–312
    79. I. Manna, P.P. Chatterjee, V.S. Rao, and S.K. Pabi, Codeposition of Nanocrystalline NbAl3 Particles on Cu, Scripta Materialia, 1999, 40, p 409–415
    80. K.A. Aissa, A. Achour, J. Camus, L.L. Brizoual, P.Y. Jouan, and M.A. Djouadi, Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures, Thin Solid Films, 2014, 550, p 264–267
    81. J. Robertson, Diamond-like amorphous carbon, Materials Science and Engineering, 2002, 37, p 129–271
    82. R.G. Lacerda and F.C. Marques, Hard hydrogenated carbon films with low stress, Appl. Phys. Lett, 1998, 73, p 617–619
    83. C.D. Rivera-Tello, F.J. Flores-Ruiz, M. Flores-Jiménez, J. Perez-Alvarez, O. Jiménez, and M. Flores, Graphitization processes in wear tracks of Bi-layer carbon coating deposited by PVD-HiPIMS technique, Materials Today Communications, 2020, 25, 101597
    84. L.R. Sheppard, H. Zhang, R. Liu, S. Macartney, T. Murphy, P. Wainer, and R. Wuhrer, Reactive sputtered TixNbyN coatings. II. Effect of common deposition parameters, Materials Chemistry and Physics, 2019, 224, p 320–327
    85. T. Liu, S. Xia, Q. Bai, B. Zhou, Y. Lu, and T. Shoji, Evaluation of Grain Boundary Network and Improvement of Intergranular Cracking Resistance in 316L Stainless Steel after Grain Boundary Engineering, Materials, 2019, 12, p 242–259
    86. W.H. Kao, Y.L. Su, and M.Y. Shih, Effects of Varying Power and Argon Gas Flux on Tribological Properties and High-Speed Drilling Performance of Diamond-Like Carbon Coatings Deposited using High-Power Impulse Magnetron Sputtering System, Journal of Materials Engineering and Performance, 2020, 29, p 7291–7307
    87. W.H. Kao, Y.L. Su, J.H. Horng, and H.M. Wu, Effects of carbon doping on mechanical, tribological, structural, anti-corrosion and anti-glass-sticking properties of CrNbSiTaZr high entropy alloy coatings, Thin Solid Films, 2021, 717, 138448
    88. A. Leyland and A. Matthews, On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behavior, Wear, 2000, 246, p 1–11
    89. Z. Wang, Y. Huang, C.T. Liu, J. Li, and J. Wang, Atomic packing and size effect on the Hume-Rothery rule, Intermetallics, 2019, 109, p 139–144
    90. S.Y. Chang, S.Y. Lin, Y.C. Huang, and C.L. Wu, Mechanical properties, deformation behaviors and interface adhesion of (AlCrTaTiZr)Nx multi-component coatings, Surf. Coat. Technol, 2010, 204, p 3307–3314
    91. Y.S. Jhong, C.W. Huang, S.J. Lin, Effects of CH4 flow ratio on the structure and properties of reactively sputtered (CrNbSiTiZr)Cx coatings, Mater. Chem. Phys., 2018, 210, p 348–352.
    92. W. Tillmann, N.F.L. Dias, D. Stangier, L. Hagen, M. Schaper, F. Hengsbach, and K. P. Hoyer, Tribo-mechanical properties and adhesion behavior of DLC coatings sputtered onto 36NiCrMo16 produced by selective laser melting, Surf. Coat. Technol, 2020, 394, 125748
    93. V. Podgursky, R. Nisumaa, E. Adoberg, A. Surzhenkov, A. Sivitski, and P. Kulu, Comparative study of surface roughness and tribological behavior during running-in period of hard coatings deposited by lateral rotating cathode arc, Wear, 2010, 268, p 751–755
    94. N. Axén, S. Jacobson, and S. Hogmark, Influence of hardness of the counterbody in three-body abrasive wear- an overlooked hardness effect, Tribology International, 1994, 27, p 233–241
    95. Y.S. Leea, M. Niinomi, M. Nakai, K. Narita, K. Cho, and H. Liu, Wear transition of solid-solution-strengthened Ti–29Nb–13Ta–4.6Zr alloys by interstitial oxygen for biomedical applications, Journal of the Mechanical Behavior of Biomedical Materials, 2015, 51, p 398–408
    96. 許嘉睿,碳氮鍍膜添加鎢之機械性質與磨潤性質研究,國立成功大學機械工程學系,碩士論文,2014。
    97. Q. Luo, J. Li, Q. Yan, W. Li, Y. Gao, M. Kitchen, L. Bowen, N. Farmilo, and Y. Ding, Sliding wear of medium-carbon bainitic/martensitic/austenitic steel treated by short-term low-temperature austempering, Wear, 2021, 203732
    98. N.F. Asri, T. Husaini, A.B. Sulong, E.H. Majlan, and W.R.W. Daud, Coating of stainless steel and titanium bipolar plates for anticorrosion in PEMFC: A review, International Journal of Hydrogen Energy, 2017, 42, p 9135–9148
    99. 蘇明德,金屬之最,科學發展,555,p 72–77。
    100. 毛胤翔,含鈮氮化物添加鈦元素製備單層與複合鍍層之磨潤性質、抗腐蝕性質及通入乙炔後之高速鑽削應用,國立成功大學機械工程學系,碩士論文,2019。
    101. W.H. Kao, Y.L. Su, J.H. Horng, and H.M. Wu, Effects of carbon doping on mechanical, tribological, structural, anti-corrosion and anti-glass-sticking properties of CrNbSiTaZr high entropy alloy coatings, Thin Solid Films, 2021, 717, 138448
    102. 林承業,濺鍍氣體通量對含氫碳鍍層(a-CNX:H)之機械性質及磨潤性質之影響,國立成功大學機械工程學系,碩士論文,2017。
    103. 吳桓銘,高溫處理後含碳之高熵鍍層之磨潤及抗腐蝕性質並探討應用於玻璃磨具抗沾黏性之研究,國立成功大學機械工程學系,碩士論文,2019。
    104. A.R. Massih and R.J. Pérez, Thermodynamic evaluation of the Nb-O system, Quantum Technologies AB, 2006, 2, p 1–31
    105. M. Kalisz, M. Grobelny, M. Mazur, D. Wojcieszak, M. Świniarski, M. Zdrojek, J. Domaradzki, and D. Kaczmarek, Mechanical and electrochemical properties of Nb2O5, Nb2O5: Cu and graphene layers deposited on titanium alloy (Ti6Al4V), Surface & Coatings Technology, 2015, 271, p 92–99
    106. M. Raaif, Investigating the structure and tribo-mechanical performance of PVD TiN on bearing TiN substrate constructed by rf plasma, Materials Chemistry and Physics, 2019, 224, p 117–123
    107. A. Munitz and R. Abbaschian, The effect of supercooling on the microstructure of Al-Nb alloys, Journal of Materials Science, 2000, 35, p 2263–2271

    下載圖示
    2026-06-29公開
    QR CODE