| 研究生: |
宋國豪 Sung, Kuo-Hao |
|---|---|
| 論文名稱: |
添加不同乙炔流量於PVD蒸鍍鈮鋁及鈮鋁氮鍍層對機械、抗腐蝕與磨潤性質之影響 Mechanical, anti-corrosion and tribological properties of NbAl and NbAlN coatings by PVD with different acetylene flux rate |
| 指導教授: |
蘇演良
Su, Yean-Liang |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 論文出版年: | 2021 |
| 畢業學年度: | 109 |
| 語文別: | 中文 |
| 論文頁數: | 71 |
| 中文關鍵詞: | 磨潤科技 、鈮鋁鍍層 、氮化鈮 、氮化鋁 |
| 外文關鍵詞: | Tribology, NbAlN, Niobium, Aluminium |
| 相關次數: | 點閱:213 下載:0 |
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本研究以射頻偏壓直流非平衡磁控濺鍍系統鍍製Nb、NbXAl、NbXAlN與Nb2AlN-CHX系列鍍層於SKH51高速鋼底材上,其中‘X’代表鈮靶電流或乙炔通量,於本實驗的第一階段,使用3A鈮靶電流鍍製的純Nb鍍層與使用變化1到3A鈮靶電流鍍製的NbXAl與NbXAlN鍍層皆互相比較,以找出最佳機械與磨耗性質之鍍層。
本研究發現,添加Al與N皆減少了晶粒尺寸,也促成了固溶強化效應,使得硬度、硬度與彈性模數(H/E)比值、附著性與磨潤性質皆有所改善。而當鈮靶電流施加至2A後,一個較佳的Nb含量促使鍍層結晶化而使得峰值強度更強,並產生許多結晶結構包含立方的NbN (111)、NbN (220)與NbN (200)和六方的AlN (002) 與 NbN (114),這些不同的結晶相能提供各種不同的好處(雞尾酒效應),譬如NbN(220)能提供高硬度值,而AlN(002)提供好的機械性質與熱穩定性,因此Nb2AlN鍍層有第一階段所有鍍層當中最高的硬度(34.5 GPa)、附著性(>100N)與最佳磨潤性質。
綜合以上,於第二階段,Nb2AlN鍍層被選擇添入一系列變化之乙炔流量(6、12與18 sccm),以進一步改善鍍層的磨潤性質,而添加乙炔後,乙炔使得鍍層結晶結構從金屬氮化物轉變為類鑽碳結構(DLC),且平均摩擦係數由於乙炔的影響而大幅下降。於Nb2AlN-CHX系列鍍層當中,Nb2AlN-CH12鍍層具有最高的H/E值(0.094)且於對磨球上還有充足的富碳轉移層(固體潤滑層),表示磨耗試驗時鍍層與對磨球的接觸面產生固體潤滑效應,因此,Nb2AlN-CH12鍍層表現出所有鍍層中最佳的磨潤性質包括最低的磨深(0.29 µm)與磨耗率(0.37 x10-6mm3/Nm)。
In this study, addition of Al and N decreased the grain size which cause refinement and prompts a solid solution effects make the hardness/elastic modulus ratio value, hardness, adhesion property and tribological performance improved. Following the addition of acetylene, which made the coating structure transfer from a metal nitride crystalline structure to a DLC structure. Among the Nb2AlN-CHx coatings, Nb2AlN-CH12 coating has the highest H/E value and the rich-carbon transferred layer formed on counterbody induced the contact surfaces were solid lubricant effect. Consequently, Nb2AlN-CH12 coating behaves the best tribological performance among all coatings.
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