為了減少嬰幼兒及老年人因呼吸疾病而致死的比率，本論文實現一呼吸感測系統。此系統包含微懸臂樑架構氣流感測器、訊號處理電路、數位轉換電路，並將此系統單晶片實現。本電路使用直流抵補電壓校正技術來消除微機電氣流感測器所產生的直流抵補電壓，且設計兩種版本的感測器來分析，比較敏感度並改善模擬設定。
本晶片採用台積電 (TSMC) 0.35μm CMOS/MEMS 2P4M 3.3V 混合訊號製程加上微機電後製程製作，以48 S/B封裝，尺寸為1.797×2.353 mm2，含感測器系統功耗為 6.31 mW。

To lower the death rate of infants and elders due to respiration diseases, a respiration detection system has been implemented. The system contains the MEMS cantilevered flow sensor, the signal processing circuit and the digital conversion circuit, and they are integrated into a single chip. A DC offset calibration technique has been proposed to eliminate the offset voltage caused by the MEMS cantilevered flow sensor. Two versions of MEMS cantilevered flow sensors with different designs are implemented and their sensitivities are compared.
This chip was fabricated by using Taiwan Semiconductor Manufacturing Company (TSMC) 0.35μm CMOS/MEMS 2P4M 3.3V mixed-signal polycide process and MEMS post process. The die area of this chip is 1.797x 2.353 mm2. The system power consumption is 6.31 mW containing the sensor power consumption.

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