本篇論文主要在探討以超音波噴霧熱裂解法沉積氧化鋅薄膜應用於紫外光感測器技術之研究。超音波噴霧熱裂解法具有成本低廉、製程時間短及非真空等優勢。此外，用不同的速度沉積薄膜甚至可得到不同晶體結構，進而大幅改變元件之特性。
為了瞭解氧化鋅薄膜和鈍化層的特性，在本研究中使用(一)掃描式電子顯微鏡、(二) X-射線繞射分析、(三) 光致發光、(四) X射線光電子能譜學、(五)穿透式電子顯微鏡。我們透過這些分析得到氧空缺的分布以及元件表面的化學特性，並針對其調整製程參數以達到更好的元件特性。
在這次研究中我們設計四種不同結構的元件探討氧化鋅奈米顆粒的特性以及氧空缺和金屬氧化物半導體的氧氣化學吸附作用在元件中扮演的角色。在取得各方條件的平衡後我們製作出氧化鋅奈米顆粒包含氧化鎂鋅覆蓋層的金屬-半導體-金屬之紫外光感測器，於偏壓5伏特的情況下，黑箱量測所得的暗電流低至約0.056微安培；同時，在波長340奈米、強度為36.1微瓦的紫外光照射下，得到約687.2微安培之光電流，其光暗電流比可達約11365.9倍，且偵測度達到2.23×〖10〗^12(Jones)。響應速度方面，上升時間約為14秒，下降時間約為8秒。

This thesis mainly investigates the zinc oxide thin film deposited by ultrasonic pyrolysis and applies to ultraviolet photodetectors. Ultrasonic Spray Pyrolysis Deposition (USPD) is a thin film deposition technology which is low cost, non-vacuum, rapid process and easy to carry out precursor doping. In addition, we can obtain different crystal structures by controlling the growth rate of USPD and drastically change the performance of device.
In order to understand the structure and chemical properties of ZnO nanoparticles and cap layer, the (1) scanning electron microscopy, (2) X-ray diffraction, (3) photoluminescence, (4)X-ray photoelectron spectroscopy and (5) transmission electron microscopy analyses are adopted in this research. By above analyses, we got the information of oxygen vacancy distribution and chemical absorption of oxygen molecule phenomenon on ZnO surface, then we tuned the parameters of processes for better performance of devices.
In this research, we designed four different structures to investigate the performances of in-situ grown ZnO nanoparticles and the roles that oxygen vacancy and the chemical absorption of oxygen molecule phenomenon played in. The dark current measured by the black box is as low as about 0.056 µA at a bias voltage of 5 V. At the same time, about 687.2 µA was measured under the illumination of 340 nm UV light with intensity of 36.1µW, photo-to-dark current ratio up to 11365.9 times and the detectivity is about 2.23×〖10〗^12 Jones. In the case of dynamic performance, the rise time and fall time are 14 s and 8 s, respectively.

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